F3AST (FEBID 3D Algorithm for Stream File Generation) is an open-source Python software designed to facilitate nanoscale 3D printing using Focused Electron Beam Induced Deposition (FEBID). It enables the layer-by-layer fabrication of complex three-dimensional nanostructures, including arbitrary 3D shapes such as nanowire-based meshed geometries, surfaces, and volumes. This is achieved by generating precise stream files that control the electron beam during the deposition process.Built upon the FEBID continuum model, F3AST simplifies the number of effective parameters for 3D printing to just two (or three when heating is involved). This streamlined approach allows for fast and accurate 3D printing, eliminating the need for simulations and requiring only a simple two-step calibration process for users.F3AST is compatible with most available precursors and can be used with microscopes from all major manufacturers.

FIB-o-Mat is a powerful software solution designed to automate and optimize processes in Focused Ion Beam (FIB) fabrication. By providing advanced control over patterning parameters, it enables the creation of complex and highly precise nanostructures with exceptional reproducibility. The software is particularly valuable for streamlining intricate workflows, such as multi-step fabrication, milling, and deposition, allowing for significant efficiency gains and consistent results. Its user-friendly interface and customizable features make it an essential tool for researchers and engineers aiming to push the boundaries of FIB-based nanofabrication.

3BID (Three-Dimensional Beam-Induced Deposition) is a specialized software tool designed to simulate and optimize Focused Electron Beam Induced Deposition (FEBID) processes. It models the 3D growth dynamics of nanostructures by integrating physical phenomena like electron scattering, precursor transport, and surface reactions. With predictive capabilities and parameter optimization, 3BID aids in designing complex, high-precision nanostructures for advanced applications in electronics, photonics, and nanomechanics, reducing experimental trial-and-error efforts.

3DOME is a sophisticated Python-based simulation and compensation tool developed to enhance the precision and versatility of 3D nanoprinting using Focused Electron Beam Induced Deposition (FEBID). It addresses key challenges in fabricating high-fidelity nanostructures, such as temperature-induced growth instabilities, edge proximity effects, and height deviations. The tool integrates experiment-based layered height corrections, simulation-driven temperature compensation, and advanced proximity adjustments. Additionally, 3DOME supports the design and merging of complex structures, including inclined segments, screws, and non-rectangular geometries, enabling the creation of intricate architectures with unprecedented accuracy. This modular and expandable platform is pivotal for advancing FEBID’s capabilities in cutting-edge nanoscale applications.