| Year | Authors | Title | Journal | DOI |
|---|---|---|---|---|
| 2025 | Butrymowicz-Kubiak A, Muzioł TM, Madajski P, Szymanska IB | New Gold(I) Complexes as Potential Precursors for Gas-Assisted Methods: Structure, Volatility, Thermal Stability, and Electron Sensitivity | Molecules | 10.3390/molecules30010146 |
| 2025 | Chang B, Anand GAE, Le HAT, Liu X, Hansen TW, de Teresa JM, Han A | 3D ice lithography and post-processing using gold organometallic precursor | Additive Manufacturing | 10.1016/j.addma.2025.104645 |
| 2025 | Pandey M, Antony B | Computation of electron interaction with halide precursors | Radiation Physics and Chemistry | 10.1016/j.radphyschem.2024.112502 |
| 2025 | Pandey M, Antony B | Theoretical investigation of electron impact scattering cross sections of metal carbonyl precursors for FEBID applications | Journal of Electron Spectroscopy and Related Phenomena | 10.1016/j.elspec.2025.147571 |
| 2025 | Sala L, Lyshchuk H, Nag P, Rousseau P, Maclot S, Domaracka A, Kočišek J | Decay of iron pentacarbonyl clusters upon interaction with heavy ions | Physica Scripta | 10.1088/1402-4896/ada205 |
| 2025 | Bokman GT, Fiorini S, Strucka J, Lukić B, Bland SN, Mughal K, Liu S, Rack A, Supponen O | Planar shock-induced bubble collapse and jetting in water captured via x-ray phase contrast imaging | Applied Physics Letters | 10.1063/5.0272963 |
| 2025 | Butrymowicz-Kubiak A, Muzioł TM, Madajski P, Szymańska IB | New Gold(I) Complexes as Potential Precursors for Gas-Assisted Methods: Structure, Volatility, Thermal Stability, and Electron Sensitivity | Molecules | 10.3390/molecules30010146 |
| 2025 | Chang B, Anand GA, Haque R, Chiaro DA, Sharma M, Williams AR, Niklaus F, Yee DW, King GM, Han A | Ice Lithography: Recent Progress Opens a New Frontier of Opportunities | Advanced Functional Materials | 10.1002/adfm.202515237 |
| 2025 | Fernández-González C, Morales-Fernández P, Turnbull LA, Abert C, Suess D, Foerster M, Niño M, Nita P, Mandziak A, Finizio S, Bagués N, Pereiro E, Fernández-Pacheco A, Pérez L, Ruiz-Gómez S, Donnelly C | Realization of Complex-Shaped Magnetic Nanotubes with 3D Printing and Electrodeposition | Advanced Functional Materials | 10.1002/adfm.202515722 |
| 2025 | Fullerton J, Leo N, Jurczyk J, Donnelly C, Sanz-Hernández D, Skoric L, Mille N, Stanescu S, MacLaren DA, Belkhou R, Hierro-Rodriguez A, Fernández-Pacheco A | Fractional Skyrmion Tubes in Chiral-Interfaced 3D Magnetic Nanowires | Advanced Functional Materials | 10.1002/adfm.202501615 |
| 2025 | Fullerton J, Phatak C | Design and Control of Three-Dimensional Topological Magnetic Fields Using Interwoven Helical Nanostructures | Nano Letters | 10.1021/acs.nanolett.4c06152 |
| 2025 | Gellerup BS, Lasseter JC, Kang K, Xiao K, Zarkadoula E, Huang JJ, Retterer ST, Randolph SJ, Rack PD | Nanoscale Editing of Multi and Single Layer Tungsten Disulfide via Gas-Assisted Focused Electron Beam Induced Etching for Device Prototyping | Advanced Functional Materials | 10.1002/adfm.202507816 |
| 2025 | Gubbiotti G, Barman A, Ladak S, Bran C, Grundler D, Huth M, Plank H, Schmidt G, van Dijken S, Streubel R, Dobrovoloskiy O, Scagnoli V, Heyderman L, Donnelly C, Hellwig O, Fallarino L, Jungfleisch MB, Farhan A, Maccaferri N, Vavassori P, Fischer P, Tomasello R, Finocchio G, Clérac R, Sessoli R, Makarov D, Sheka DD, Krawczyk M, Gallardo R, Landeros P, D’Aquino M, Hertel R, Pirro P, Ciubotaru F, Becherer M, Gartside J, Ono T, Bortolotti P, Fernández-Pacheco A | 2025 roadmap on 3D nanomagnetism | Journal of Physics Condensed Matter | 10.1088/1361-648X/ad9655 |
| 2025 | Jang S, Park S, Yun SJ, Kim UJ, Ivanov IN, Ghosh S, Randolph SJ, Kim S | Raman Laser-Induced Structural Modification in CVD-Grown Monolayer MoS2 for Multi-Purposed Nanofabrication | ACS Applied Nano Materials | 10.1021/acsanm.5c02037 |
| 2025 | Jochmann NP, Salvador-Porroche A, Barth S | Beyond the Beam: Exploring Charged Particle Nanoprinting | Advanced Functional Materials | 10.1002/adfm.202507465 |
| 2025 | Jureddy CS, Maćkosz K, Butrymowicz-Kubiak A, Szymańska IB, Hoffmann P, Utke I | Electron beam-based direct writing of nanostructures using a palladium $\beta$-ketoesterate complex | Beilstein Journal of Nanotechnology | 10.3762/BJNANO.16.41 |
| 2025 | Kato S, Tsuji A, Ogasawara H, Tokunaga T, Yamamoto T, Kobayashi S | Suppression of carbon contamination in tungsten oxide by oxygen-plasma-assisted electron beam-induced deposition | Journal of Vacuum Science & Technology B | 10.1116/6.0004857 |
| 2025 | Koraltan S, Porrati F, Kraft R, Barth S, Weigand M, Abert C, Suess D, Huth M, Wintz S | Reconfigurable 3D Magnetic Nanoarchitectures | Advanced Functional Materials | 10.1002/adfm.202515338 |
| 2025 | Kuprava A, Huth M | Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition | Beilstein Journal of Nanotechnology | 10.3762/bjnano.16.4 |
| 2025 | Liu X, Zemlyanov D, Sharma S, Ghosh S, Lasseter J, Beechem TE, Appenzeller J, Randolph SJ, Chen Z | Focused Helium Ion Beam for Direct Patterning of Monolayer MoS2 Nanoribbon Field Effect Devices | Advanced Functional Materials | 10.1002/adfm.202514880 |
| 2025 | Raghavan A, Pratiush U, Valleti M, Liu Ryu, Emery R, Funakubo H, Liu Y, Rack P, Kalinin S | Invariant discovery of features across multiple length scales: Applications in microscopy and autonomous materials characterization | Journal of Applied Physics | 10.1063/5.0233070 |
| 2025 | Schröder C, Ghebretinsae B, Lonsky M, Al Mamoori M, Porrati F, Huth M, Müller J | Origin of magnetic switching cascades in nanostructured Co3Fe tetrapods | Applied Physics Letters | 10.1063/5.0254061 |
| 2025 | Tsarapkin A, Zurak L, Maćkosz K, Löffler L, Deinhart V, Utke I, Feichtner T, Höflich K | Double Helical Plasmonic Antennas | Advanced Functional Materials | 10.1002/adfm.202507471 |
| 2025 | Yin Y, Liu B, Han Y, Liu Q, Kou J, Zhang Y, Wen J, Liu S, Wang Q, Shan Y, Liu Y, Feng J | Nanoscale 3D Printing for Empowering Future Nanodevices | Advanced Materials Technologies | 10.1002/admt.202500083 |
| 2025 | Zhakina E, Turnbull LA, Xu W, König M, Simon P, Carrillo-Cabrera W, Fernández-Pacheco A, Vool U, Suess D, Abert C, Fomin VM, Donnelly C | Reconfigurable Three-Dimensional Superconducting Nanoarchitectures | Advanced Functional Materials | 10.1002/adfm.202506057 |
| 2024 | Abdel-Rahman MK, Eckhert PM, McElwee-White L, Fairbrother HD | Reactions of Ions with Adsorbed Me3PtCpMe: The Role of Ion Identity | Journal of Physical Chemistry C | 10.1021/acs.jpcc.4c00630 |
| 2024 | Boeckers H, Chaudhary A, Martinović P, Walker AV, McElwee-White L, Swiderek P | Electron-induced deposition using Fe(CO)4MA and Fe(CO)5 – effect of MA ligand and process conditions | Beilstein Journal of Nanotechnology | 10.3762/bjnano.15.45 |
| 2024 | Glessi C, Polman FA, Hagen CW | Water-assisted purification during electron beam-induced deposition of platinum and gold | Beilstein Journal of Nanotechnology | 10.3762/BJNANO.15.73 |
| 2024 | Hari S, van Dorp WF, Mulders JJL, Trompenaars PHF, Kruit P, Hagen CW | Sidewall angle tuning in focused electron beam-induced processing | Beilstein Journal of Nanotechnology | 10.3762/bjnano.15.40 |
| 2024 | Höflich K, Maćkosz K, Jureddy C, Tsarapkin A, Utke I | Direct electron beam writing of silver using a β-diketonate precursor: first insights | Beilstein Journal of Nanotechnology | 10.3762/BJNANO.15.90 |
| 2024 | Lyshchuk H, Chaudhary A, Luxford TFM, Ranković M, Kočišek J, Fedor J, McElwee-White L, Nag P | Electron-induced ligand loss from iron tetracarbonyl methyl acrylate | Beilstein Journal of Nanotechnology | 10.3762/bjnano.15.66 |
| 2024 | Pandey M, Antony B | Calculations of electron scattering cross sections from tungsten precursors used in FEBID | Journal of Electron Spectroscopy and Related Phenomena | 10.1016/j.elspec.2024.147430 |
| 2024 | Pruchnik B, Kwoka K, Gacka E, Badura D, Kunicki P, Sierakowski A, Janus P, Piasecki T, Gotszalk T | New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures | Beilstein Journal of Nanotechnology | 10.3762/bjnano.15.103 |
| 2024 | Pruchnik B, Piasecki T, Gacka E, Masteghin MG, Cox DC, Gotszalk T | Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition | Journal of Microelectromechanical Systems | 10.1109/JMEMS.2024.3377595 |
| 2024 | Pruchnik BC, Fidelus JD, Gacka E, Mika K, Zaraska L, Sulka GD, Gotszalk T | Atomic force microscopy in mechanical measurements of single nanowires | Ultramicroscopy | 10.1016/j.ultramic.2024.113985 |
| 2024 | Sikora M, Wojcieszak D | Impact of carbon and platinum protective layers on EDS accuracy in FIB cross-sectional analysis of W/Hf/W thin-film multilayers | Micron | 10.1016/j.micron.2024.103689 |
| 2024 | Szkudlarek A, Michalik JM, Serrano-Esparza I, Nováček Z, Novotná V, Ozga P, Kapusta C, De Teresa JM | Graphene removal by water-assisted focused electron-beam-induced etching – unveiling the dose and dwell time impact on the etch profile and topographical changes in SiO2 substrates | Beilstein Journal of Nanotechnology | 10.3762/bjnano.15.18 |
| 2024 | Žaper L, Rickhaus P, Wyss M, Gross B, Wagner K, Poggio M, Braakman F | Scanning Nitrogen-Vacancy Magnetometry of Focused-Electron-Beam-Deposited Cobalt Nanomagnets | ACS Applied Nano Materials | 10.1021/acsanm.3c05470 |
| 2024 | Lasseter J, Gellerup S, Ghosh S, Yun SJ, Vasudevan R, Unocic RR, Olunloyo O, Retterer ST, Xiao K, Randolph SJ, Rack PD | Selected Area Manipulation of MoS2 via Focused Electron Beam-Induced Etching for Nanoscale Device Editing | ACS Applied Materials and Interfaces | 10.1021/acsami.3c17182 |
| 2024 | Afaneh AT, Alshhadat M, Marashdeh A, Almatarneh MH, Helal W | DFT Insights into FEBID Stability: Condensed Study of Gold(I) Complexes with Phosphine Ligands | ChemistrySelect | 10.1002/slct.202303726 |
| 2024 | Allen FI, De Teresa JM, Onoa B | Focused Helium Ion and Electron Beam-Induced Deposition of Organometallic Tips for Dynamic Atomic Force Microscopy of Biomolecules in Liquid | ACS Applied Materials and Interfaces | 10.1021/acsami.3c16407 |
| 2024 | Barth S, Porrati F, Knez D, Jungwirth F, Jochmann NP, Huth M, Winkler R, Plank H, Gracia I, Cané C | Nanoscale, surface-confined phase separation by electron beam induced oxidation | Nanoscale | 10.1039/d4nr01650e |
| 2024 | Butrymowicz-Kubiak A, Luba W, Madajska K, Muzioł T, Szymańska IB | Pivalate complexes of copper(ii) with aliphatic amines as potential precursors for depositing nanomaterials from the gas phase | New Journal of Chemistry | 10.1039/d3nj04959k |
| 2024 | Butrymowicz-Kubiak A, Muzioł TM, Kaczmarek-K\cedziera A, Jureddy CS, Maćkosz K, Utke I, Szymańska IB | New palladium(ii) $\beta$-ketoesterates for focused electron beam induced deposition: synthesis, structures, and characterization | Dalton Transactions | 10.1039/d4dt01287a |
| 2024 | Córdoba R | Additive nanofabrication using focused ion and electron beams | Encyclopedia of Condensed Matter Physics | 10.1016/B978-0-323-90800-9.00035-4 |
| 2024 | Escalante-Quiceno AT, Fernández VV, Martín JI, Hierro-Rodriguez A, Hlawacek G, Jaafar M, Asenjo A, Magén C, De Teresa JM | Focused electron beam induced deposition of magnetic tips for improved magnetic force microscopy | Low Temperature Physics | 10.1063/10.0028622 |
| 2024 | Fullerton J, McCray AR, Petford-Long AK, Phatak C | Understanding the Effect of Curvature on the Magnetization Reversal of Three-Dimensional Nanohelices | Nano Letters | 10.1021/acs.nanolett.3c04172 |
| 2024 | Gacka E, Pruchnik B, Tamulewicz-Szwajkowska M, Badura D, Rangelow IW, Gotszalk T | Fabrication of focused ion beam-deposited nanowire probes for conductive atomic force microscopy | Measurement: Journal of the International Measurement Confederation | 10.1016/j.measurement.2024.114815 |
| 2024 | Gellerup S, Emery R, Retterer ST, Randolph SJ, Rack PD | XeF2 gas assisted focused electron beam induced etching of niobium thin films: towards direct write editing of niobium superconducting devices | Nanoscale Horizons | 10.1039/d4nh00407h |
| 2024 | Gracia-Abad R, Sangiao S, Balakrishnan G, De Teresa JM | FIB-fabrication of superconducting devices based on Bi2Se3 junctions | Scientific Reports | 10.1038/s41598-024-75576-x |
| 2024 | Herrer L, Salvador-Porroche A, Hlawacek G, Cea P, De Teresa JM | Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a comparison with Ga+ and e− beams | Nanoscale | 10.1039/d4nr02680b |
| 2024 | Höflich K, Maćkosz K, Jureddy CS, Tsarapkin A, Utke I | Direct electron beam writing of silver using a $\beta$-diketonate precursor: first insights | Beilstein Journal of Nanotechnology | 10.3762/BJNANO.15.90 |
| 2024 | Jungwirth F, Salvador-Porroche A, Porrati F, Jochmann NP, Knez D, Huth M, Gracia I, Cané C, Cea P, De Teresa JM, Barth S | Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion | Journal of Physical Chemistry C | 10.1021/acs.jpcc.3c08250 |
| 2024 | Kähler H, Winkler R, Arthaber H, Plank H, Schmid S | Toward practical mass spectrometry with nanomechanical pillar resonators by surface acoustic wave transduction | AIP Advances | 10.1063/5.0176791 |
| 2024 | Kambalathmana H, Flatae AM, Biagini C, Tantussi F, De Angelis F, Agio M | Plasmonic Nanocone Scanning Antenna: Fabrication and Optical Properties | Advanced Photonics Research | 10.1002/adpr.202300058 |
| 2024 | Nydegger M, Wang ZJ, Willinger MG, Spolenak R, Reiser A | Direct In- and Out-of-Plane Writing of Metals on Insulators by Electron-Beam-Enabled, Confined Electrodeposition with Submicrometer Feature Size | Small Methods | 10.1002/smtd.202301247 |
| 2024 | Rajamani S, Simeone D, Pecora A, Manoccio M, Balestra G, Bayramov AH, Mamedov NT, Passaseo A, Gigli G, Tobaldi DM, Tasco V, Esposito M, Cola A, Cuscunà M | Circularly Polarized Light Detection Through 3D Chiral Metasurface-Based Phototransistors | Advanced Materials Technologies | 10.1002/admt.202301250 |
| 2024 | Reisecker V, Kuhness D, Haberfehlner G, Brugger-Hatzl M, Winkler R, Weitzer A, Loibner D, Dienstleder M, Kothleitner G, Plank H | Spectral Tuning of Plasmonic Activity in 3D Nanostructures via High-Precision Nano-Printing | Advanced Functional Materials | 10.1002/adfm.202310110 |
| 2024 | Reisecker V, Winkler R, Plank H | A Review on Direct-Write Nanoprinting of Functional 3D Structures with Focused Electron Beams | Advanced Functional Materials | 10.1002/adfm.202407567 |
| 2024 | Schlereth C, Weiser M, White E, Felfer P, Galetz M | Oxide scale microstructure and failure mechanism of alloy 601 under varying metal dusting conditions | Journal of Materials Science | 10.1007/s10853-023-09260-2 |
| 2024 | Schmidt L, Azizy R, Schricker K, Diegel C, Chen Y, Rack A, Bergmann JP | Describing the effect of local gas flow on keyhole and melt flow dynamics utilizing high-speed synchrotron X-ray imaging and numerical simulation | Procedia CIRP | 10.1016/j.procir.2024.08.173 |
| 2024 | Schmidt L, Schricker K, Diegel C, Sachs F, Bergmann JP, Knauer A, Romanus H, Requardt H, Chen Y, Rack A | Effect of partial and global shielding on surface-driven phenomena in keyhole mode laser beam welding | Welding in the World | 10.1007/s40194-023-01627-y |
| 2024 | Schuck AG, Kölsch S, Valadkhani A, Mazin II, Valentí R, Huth M | Strain-induced magnetic anisotropy of multi-domain epitaxial EuPd2 thin films | JPhys Materials | 10.1088/2515-7639/ad2d5e |
| 2024 | Tsarapkin A, Maćkosz K, Jureddy CS, Utke I, Höflich K | Area-Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding | Advanced Materials | 10.1002/adma.202313571 |
| 2024 | Vogl LM, Schweizer P, Minor AM, Michler J, Utke I | Unraveling the Highly Plastic Behavior of ALD-Aluminum Oxide Encapsulations by Small-Scale Tensile Testing | Advanced Engineering Materials | 10.1002/adem.202302220 |
| 2024 | Volkov OM, Pylypovskyi OV, Porrati F, Kronast F, Fernandez-Roldan JA, Kákay A, Kuprava A, Barth S, Rybakov FN, Eriksson O, Lamb-Camarena S, Makushko P, Mawass MA, Shakeel S, Dobrovolskiy OV, Huth M, Makarov D | Three-dimensional magnetic nanotextures with high-order vorticity in soft magnetic wireframes | Nature Communications | 10.1038/s41467-024-46403-8 |
| 2024 | Ye L, Zhang G, Lin H, Li Y, Liu Q, Liu Z, Gong Q, Lu G | Characterization of Chiral Near Field Within Nanogaps Using Surface-Enhanced Raman Scattering | Advanced Optical Materials | 10.1002/adom.202301446 |
| 2023 | Anyanwu CP, Pakeltis G, Rack PD, Masiello DJ | Nanoscale Characterization of Individual Three-Dimensional Split Ring Resonator Systems | ACS Applied Optical Materials | 10.1021/acsaom.2c00157 |
| 2023 | Bilgilisoy E, Kamali A, Gentner TX, Ballmann G, Harder S, Steinrück HP, Marbach H, Ingólfsson O | A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2 | Beilstein Journal of Nanotechnology | 10.3762/BJNANO.14.98 |
| 2023 | De Teresa JM | Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies | Materials for Quantum Technology | 10.1088/2633-4356/acbefb |
| 2023 | Ellrott G, Beck P, Sultanov V, Rothau S, Lindlein N, Chekhova M, Krstić V | Collectively Enhanced Giant Circular Dichroism of Germanium Nanohelix Square Lattice Arrays | Advanced Photonics Research | 10.1002/adpr.202300159 |
| 2023 | Escalante-Quiceno AT, Novotný O, Neuman J, Magén C, De Teresa JM | Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition | Sensors | 10.3390/s23062879 |
| 2023 | Fullerton J, Hierro-Rodriguez A, Donnelly C, Sanz-Hernández D, Skoric L, MacLaren DA, Fernández-Pacheco A | Controlled evolution of three-dimensional magnetic states in strongly coupled cylindrical nanowire pairs | Nanotechnology | 10.1088/1361-6528/aca9d6 |
| 2023 | He M, Zhu D, Wang H, Yang Z, Shen F, Wu R, Kuang C, Liu X | Advancements in Micro-Nano Optical Device Based on Two-Photon Direct Writing | Guangxue Xuebao/Acta Optica Sinica | 10.3788/AOS231039 |
| 2023 | Höflich K, Hobler G, Allen FI, Wirtz T, Rius G, McElwee-White L, Krasheninnikov AV, Schmidt M, Utke I, Klingner N, Osenberg M, Córdoba R, Djurabekova F, Manke I, Moll P, Manoccio M, De Teresa JM, Bischoff L, Michler J, De Castro O, Delobbe A, Dunne P, Dobrovolskiy OV, Frese N, Gölzhäuser A, Mazarov P, Koelle D, Möller W, Pérez-Murano F, Philipp P, Vollnhals F, Hlawacek G | Roadmap for focused ion beam technologies | Applied Physics Reviews | 10.1063/5.0162597 |
| 2023 | Jurczyk J, Höflich K, Madajska K, Berger L, Brockhuis L, Edwards TE, Kapusta C, Szymańska IB, Utke I | Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition | Nanomaterials | 10.3390/nano13091516 |
| 2023 | Kähler H, Arthaber H, Winkler R, West RG, Ignat I, Plank H, Schmid S | Transduction of Single Nanomechanical Pillar Resonators by Scattering of Surface Acoustic Waves | Nano Letters | 10.1021/acs.nanolett.3c00605 |
| 2023 | Kahro T, Raudonen K, Merisalu J, Tarre A, Ritslaid P, Kasikov A, Jõgiaas T, Käämbre T, Otsus M, Kozlova J, Alles H, Tamm A, Kukli K | Nanostructures Stacked on Hafnium Oxide Films Interfacing Graphene and Silicon Oxide Layers as Resistive Switching Media | Nanomaterials | 10.3390/nano13081323 |
| 2023 | Kamali A, Carden WG, Johnson JV, McElwee-White L, Ingólfsson O | Dissociative electron attachment and dissociative ionization of CF3AuCNC(CH3)3, a potential FEBID precursor for gold deposition | European Physical Journal D | 10.1140/epjd/s10053-023-00721-6 |
| 2023 | Ko T, Kumar S, Shin S, Seo D, Seo S | Colloidal Quantum Dot Nanolithography: Direct Patterning via Electron Beam Lithography | Nanomaterials | 10.3390/nano13142111 |
| 2023 | Kuprava A, Huth M | Fast and Efficient Simulation of the FEBID Process with Thermal Effects | Nanomaterials | 10.3390/nano13050858 |
| 2023 | Lamb-Camarena S, Porrati F, Kuprava A, Wang Q, Urbánek M, Barth S, Makarov D, Huth M, Dobrovolskiy OV | 3D Magnonic Conduits by Direct Write Nanofabrication | Nanomaterials | 10.3390/nano13131926 |
| 2023 | Lasseter J, Rack PD, Randolph SJ | Selected Area Deposition of High Purity Gold for Functional 3D Architectures | Nanomaterials | 10.3390/nano13040757 |
| 2023 | Li Y, Xu S, Sezen M, Bakan Misirlioglu F, Vredenbregt EJ | Rubidium focused ion beam induced platinum deposition | Journal of Vacuum Science & Technology B | 10.1116/6.0002609 |
| 2023 | Martinović P, Barnewitz L, Rohdenburg M, Swiderek P | Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation | Journal of Vacuum Science & Technology A | 10.1116/6.0002306 |
| 2023 | Mason NJ, Pintea M, Csarnovics I, Fodor T, Szikszai Z, Kertész Z | Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition | ACS Omega | 10.1021/acsomega.3c00793 |
| 2023 | Matsui S, Ichihashi T, Mito M | Electron Beam Induced Film Deposition | 10.1364/msba.1989.tua1 | |
| 2023 | Pintea M, Mason N, Peiró-Franch A, Clark E, Samanta K, Glessi C, Schmidtke IL, Luxford T | Dissociative electron attachment to gold(I)-based compounds: 4,5-dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I) | Frontiers in Chemistry | 10.3389/fchem.2023.1028008 |
| 2023 | Plank H, Fowlkes JD, Winkler R, Rack PD | 3D Nanoprinting Replication Enhancement Using a Simulation-Informed Analytical Model for Electron Beam Exposure Dose Compensation | ACS Omega | 10.1021/ACSOMEGA.2C06596 |
| 2023 | Porrati F, Barth S, Gazzadi GC, Frabboni S, Volkov OM, Makarov D, Huth M | Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures | ACS Nano | 10.1021/acsnano.2c10968 |
| 2023 | Prosvetov A, Verkhovtsev AV, Sushko G, Solov’yov AV | Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me 2 Au(tfac) | European Physical Journal D | 10.1140/epjd/s10053-023-00598-5 |
| 2023 | Ramos-Cano CJ, Miki-Yoshida M, Herrera-Basurto R, Mercader-Trejo F, Fuentes-Cobas L, Auciello O, Hurtado-Macías A | Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films | Applied Physics A: Materials Science and Processing | 10.1007/s00339-022-06374-3 |
| 2023 | Reisecker V, Kuhness D, Plank H | Towards Predictable 2D/3D Plasmonics via FEBIDInternational Conference on Metamaterials, Photonic Crystals and Plasmonics | International Conference on Metamaterials, Photonic Crystals and Plasmonics | |
| 2023 | Su S, Wang K, Huang C, Jin L, Xiao S, Ruan Q | Advances in Structural Color Research Based on Two-Photon Polymerization 3D Printing Technology | Zhongguo Jiguang/Chinese Journal of Lasers | 10.3788/CJL230749 |
| 2023 | Tsarapkin A, Rgensen SJ, Feichtner T, Mackosz K, Deinhart V, Utke I, Reich S, Flich KH | Double helical plasmonic antennas for enhanced chiroptical interactions | International Conference on Metamaterials, Photonic Crystals and Plasmonics | |
| 2023 | Weinert T, Hübner R, Facsko S, Erb DJ | Bottom-up fabrication of FeSb2 nanowires on crystalline GaAs substrates with ion-induced pre-patterning | Frontiers in Physics | 10.3389/fphy.2023.1149608 |
| 2023 | Winkler R, Brugger-Hatzl M, Porrati F, Kuhness D, Mairhofer T, Seewald LM, Kothleitner G, Huth M, Plank H, Barth S | Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition | Nanomaterials | 10.3390/nano13212907 |
| 2023 | Winkler R, Brugger-Hatzl M, Seewald LM, Kuhness D, Barth S, Mairhofer T, Kothleitner G, Plank H | Additive Manufacturing of Co3Fe Nano-Probes for Magnetic Force Microscopy | Nanomaterials | 10.3390/nano13071217 |
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| 2022 | Baranowski M, Sachser R, Marinković BP, Ivanović SD, Huth M | Charge Transport inside TiO2 Memristors Prepared via FEBID | Nanomaterials | 10.3390/nano12234145 |
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| 2016 | Vavassori P, Pancaldi M, Perez-Roldan MJ, Chuvilin A, Berger A | Remote Magnetomechanical Nanoactuation | Small | 10.1002/smll.201503351 |
| 2016 | Wang H, Kurata K, Fukunaga T, Takamatsu H, Zhang X, Ikuta T, Takahashi K, Nishiyama T, Ago H, Takata Y | A simple method for fabricating free-standing large area fluorinated single-layer graphene with size-tunable nanopores | Carbon | 10.1016/j.carbon.2015.12.070 |
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| 2016 | Wu Y, Li G, Cherqui C, Bigelow NW, Thakkar N, Masiello DJ, Camden JP, Rack PD | Electron Energy Loss Spectroscopy Study of the Full Plasmonic Spectrum of Self-Assembled Au-Ag Alloy Nanoparticles: Unraveling Size, Composition, and Substrate Effects | ACS Photonics | 10.1021/acsphotonics.5b00548 |
| 2016 | Zhang Y | Liquid Phase Scanning Electron Microscopy: A New Approach to Investigate Lithium Dendrite Formation in Liquid Electrolytes | ECS Meeting Abstracts | 10.1149/ma2016-02/2/204 |
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| 2015 | Samukawa S | (Invited) Neutral Beam Technology – Defect-free Nanofabrication for Novel Nano-materials and Nano-devices | ECS Meeting Abstracts | 10.1149/ma2015-02/26/1008 |
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| 2015 | Shi X, Prewett P, Huq E, Bagnall DM, Boden SA | Proximity Effect Quantification and Dose Optimisation for High Resolution Helium Ion Beam Lithography | Proceedings of the 41st International Conference on Micro and Nano Engineering | |
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| 2014 | Bull MS, Sullan RM, Li H, Perkins TT | Improved single molecule force spectroscopy using micromachined cantilevers | ACS Nano | 10.1021/nn5010588 |
| 2014 | Chen X, Zhou L, Wang P, Cao H, Miao X, Wei F | A study of electron beam induced deposition and nano device fabrication using liquid cell TEM technology | Chinese Journal of Chemistry | 10.1002/cjoc.201400139 |
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| 2014 | Martin AA, Toth M, Aharonovich I | Subtractive 3d printing of optically active diamond structures | Scientific Reports | 10.1038/srep05022 |
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| 2014 | Mulders JJ | Purity and resistivity improvements for electron-beam-induced deposition of Pt | Applied Physics A: Materials Science and Processing | 10.1007/s00339-014-8662-2 |
| 2014 | Muthukumar K, Valentí R, Jeschke HO | Dynamics of tungsten hexacarbonyl, dicobalt octacarbonyl, and their fragments adsorbed on silica surfaces | Journal of Chemical Physics | 10.1063/1.4873584 |
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| 2014 | Zhao S, Connie AT, Dastjerdi MH, Kong XH, Wang Q, Djavid M, Sadaf S, Liu XD, Shih I, Guo H, Mi Z | Aluminum nitride nanowire light emitting diodes: Breaking the fundamental bottleneck of deep ultraviolet light sources | Scientific Reports | 10.1038/srep08332 |
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| 2013 | Kulshrestha N, Misra A, Koratkar N, Misra DS | Electrical transport and breakdown in graphene multilayers loaded with electron beam induced deposited platinum | ACS Applied Materials and Interfaces | 10.1021/am400489y |
| 2013 | Lee SW, Sankaran RM | Direct writing via electron-driven reactions | Materials Today | 10.1016/j.mattod.2013.04.007 |
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| 2013 | Murakami K, Kadowaki T, Fujita JI | Damage and strain in single-layer graphene induced by very-low-energy electron-beam irradiation | Applied Physics Letters | 10.1063/1.4790388 |
| 2013 | Murphy KF, Chen LY, Gianola DS | Effect of organometallic clamp properties on the apparent diversity of tensile response of nanowires | Nanotechnology | 10.1088/0957-4484/24/23/235704 |
| 2013 | Neumann I, Costache MV, Bridoux G, Sierra JF, Valenzuela SO | Enhanced spin accumulation at room temperature in graphene spin valves with amorphous carbon interfacial layers | Applied Physics Letters | 10.1063/1.4820586 |
| 2013 | Nikulina E, Idigoras O, Porro JM, Vavassori P, Chuvilin A, Berger A | Origin and control of magnetic exchange coupling in between focused electron beam deposited cobalt nanostructures | Applied Physics Letters | 10.1063/1.4821034 |
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| 2013 | Paufert P, Fonda E, Li Z, Domenichini B, Bourgeois S | Watching adsorption and electron beam induced decomposition on the model system Mo(CO) 6 /Cu(1 1 1) by X-ray absorption and photoemission spectroscopies | Applied Surface Science | 10.1016/j.apsusc.2013.07.089 |
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| 2013 | Porrati F, Kämpken B, Terfort A, Huth M | Fabrication and electrical transport properties of binary Co-Si nanostructures prepared by focused electron beam-induced deposition | Journal of Applied Physics | 10.1063/1.4790320 |
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| 2013 | Roberts NA, Fowlkes JD, Magel GA, Rack PD | Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum | Nanoscale | 10.1039/c2nr33014h |
| 2013 | Roberts NA, Gonzalez CM, Fowlkes JD, Rack PD | Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO)6 with improved conductivity and resolution | Nanotechnology | 10.1088/0957-4484/24/41/415301 |
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| 2013 | Shi G, Bao S, Lai W, Rao Z, Zhang X, Wang Z | Electron beam induced growth of silver nanoparticles | Scanning | 10.1002/sca.21035 |
| 2013 | Slattery AD, Blanch AJ, Quinton JS, Gibson CT | Efficient attachment of carbon nanotubes to conventional and high-frequency AFM probes enhanced by electron beam processes | Nanotechnology | 10.1088/0957-4484/24/23/235705 |
| 2013 | Stolle C, Bartenwerfer M, Celle C, Simonato JP, Fatikow S | Nanorobotic strategies for handling and characterization of metal-assisted etched silicon nanowires | IEEE/ASME Transactions on Mechatronics | 10.1109/TMECH.2012.2193591 |
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| 2013 | Taurino A, Farella I, Cola A, Lomascolo M, Quaranta F, Catalano M | Optimization of electron beam induced deposition process for the fabrication of diode-like Pt/SiO2/W devices | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.4811824 |
| 2013 | Timilsina R, Smith DA, Rack PD | A comparison of neon versus helium ion beam induced deposition via Monte Carlo simulations | Nanotechnology | 10.1088/0957-4484/24/11/115302 |
| 2013 | Van Dorp WF, Beyer A, Mainka M, Gölzhäuser A, Hansen TW, Wagner JB, Hagen CW, De Hosson JT | Focused electron beam induced processing and the effect of substrate thickness revisited | Nanotechnology | 10.1088/0957-4484/24/34/345301 |
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| 2013 | Vollnhals F, Wintrich P, Walz MM, Steinrück HP, Marbach H | Electron beam induced surface activation of ultrathin porphyrin layers on Ag(111) | Langmuir | 10.1021/la4028095 |
| 2013 | Vollnhals F, Woolcot T, Walz MM, Seiler S, Steinrück HP, Thornton G, Marbach H | Electron beam-induced writing of nanoscale iron wires on a functional metal oxide | Journal of Physical Chemistry C | 10.1021/jp405640a |
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| 2013 | Wozniak P, Hoflich K, Fritsch S, Christiansen S, Banzer P, Leuchs G | Experimental investigation of a single chrial nano-structure made of a composite material | IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings | 10.1109/CLEOE-IQEC.2013.6801011 |
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| 2013 | Zhang W | Revealing the 1 nm/s extensibility of nanoscale amorphous carbon in a scanning electron microscope | Scanning | 10.1002/sca.21059 |
| 2013 | Zhang W, Zhang Q, Zhao MQ, Theil Kuhn L | Direct writing on graphene ‘paper’ by manipulating electrons as ‘invisible ink’ | Nanotechnology | 10.1088/0957-4484/24/27/275301 |
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| 2012 | Bishop J, Toth M, Phillips M, Lobo C | Effects of oxygen on electron beam induced deposition of SiO2 using physisorbed and chemisorbed tetraethoxysilane | Applied Physics Letters | 10.1063/1.4767521 |
| 2012 | Börrnert F, Fu L, Gorantla S, Knupfer M, Büchner B, Rümmeli MH | Programmable sub-nanometer sculpting of graphene with electron beams | ACS Nano | 10.1021/nn304256a |
| 2012 | Brodard P, Bechelany M, Philippe L, Michler J | Synthesis and attachment of silver nanowires on atomic force microscopy cantilevers for tip-enhanced Raman spectroscopy | Journal of Raman Spectroscopy | 10.1002/jrs.3091 |
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| 2012 | Dobrovolskiy OV, Begun E, Huth M, Shklovskij VA | Electrical transport and pinning properties of Nb thin films patterned with focused ion beam-milled washboard nanostructures | New Journal of Physics | 10.1088/1367-2630/14/11/113027 |
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| 2012 | Drezner Y, Greenzweig Y, Fishman D, van Veldhoven E, Maas DJ, Raveh A, Livengood RH | Structural characterization of He ion microscope platinum deposition and sub-surface silicon damage | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.4732074 |
| 2012 | D’Urzo L, Schaltin S, Shkurankov A, Plank H, Kothleitner G, Gspan C, Binnemans K, Fransaer J | Direct-on-barrier copper electroplating on ruthenium from the ionic liquid 1-ethyl-3-methylimidazolium dicyanamide | Journal of Materials Science: Materials in Electronics | 10.1007/s10854-011-0525-4 |
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| 2012 | Felner I, Wolf O, Millo O | High-temperature superconductivity in sulfur-doped amorphous carbon systems | Journal of Superconductivity and Novel Magnetism | 10.1007/s10948-011-1327-x |
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| 2012 | Gardener JA, Golovchenko JA | Ice-assisted electron beam lithography of graphene | Nanotechnology | 10.1088/0957-4484/23/18/185302 |
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| 2012 | Huang CW, Liao CH, Wu CH, Wu JC | Photocatalytic water splitting to produce hydrogen using multi-junction solar cell with different deposited thin films | Solar Energy Materials and Solar Cells | 10.1016/j.solmat.2012.07.003 |
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| 2012 | Mulders JJ, Veerhoek JM, Bosch EG, Trompenaars PH | Fabrication of pure gold nanostructures by electron beam induced deposition with Au(CO)Cl precursor: Deposition characteristics and primary beam scattering effects | Journal of Physics D: Applied Physics | 10.1088/0022-3727/45/47/475301 |
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| 2012 | Rosenberg SG, Landheer K, Hagen CW, Fairbrother DH | Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.4751281 |
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| 2011 | Bresin M, Thiel BL, Toth M, Dunn KA | Focused electron beam-induced deposition at cryogenic temperatures | Journal of Materials Research | 10.1557/jmr.2010.59 |
| 2011 | Brunel D, Troadec D, Hourlier D, Deresmes D, Zdrojek M, Mélin T | Characterization of ion/electron beam induced deposition of electrical contacts at the sub-$\mu$m scale | Microelectronic Engineering | 10.1016/j.mee.2011.03.011 |
| 2011 | Cambel V, Gregušová D, Eliáš P, Fedor J, Kostič I, Maňka J, Ballo P | Switching magnetization magnetic force microscopy – An alternative to conventional lift-mode MFM | Journal of Electrical Engineering | 10.2478/v10187-011-0006-2 |
| 2011 | Chen HY, Chen CC, Hsueh FK, Liu JT, Shy SL, Wu CS, Chien CH, Hu C, Huang CC, Yang FL | A novel nanoinjection lithography (NInL) technology and its application for 16-nm node device fabrication | IEEE Transactions on Electron Devices | 10.1109/TED.2011.2163938 |
| 2011 | Chen IC, Wu PJ, Lin PY, Wang YC, Chen YH | Growth of bent carbon nanotubes by in-situ control of cantilever bending | Carbon | 10.1016/j.carbon.2011.03.001 |
| 2011 | Córdoba R, Fernández-Pacheco R, Fernández-Pacheco A, Gloter A, Magén C, Stéphan O, Ibarra MR, de Teresa JM | Nanoscale chemical and structural study of co-based FEBID structures by STEM-EELS and HRTEM | Nanoscale Research Letters | 10.1186/1556-276X-6-592 |
| 2011 | De Angelis F, Liberale C, Coluccio ML, Cojoc G, Di Fabrizio E | Emerging fabrication techniques for 3D nano-structuring in plasmonics and single molecule studies | Nanoscale | 10.1039/c1nr10124b |
| 2011 | de Boer SK, van Dorp WF, De Hosson JT | Charging effects during focused electron beam induced deposition of silicon oxide | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3659713 |
| 2011 | Díaz C, Valenzuela ML, Bravo D, Dickinson C, O’Dwyer C | Solid-state synthesis of embedded single-crystal metal oxide and phosphate nanoparticles and in situ crystallization | Journal of Colloid and Interface Science | 10.1016/j.jcis.2011.05.066 |
| 2011 | Dobrovolskiy OV, Begun E, Huth M, Shklovskij VA, Tsindlekht MI | Vortex lattice matching effects in a washboard pinning potential induced by Co nanostripe arrays | Physica C: Superconductivity and its Applications | 10.1016/j.physc.2011.05.245 |
| 2011 | Dobrovolskiy OV, Huth M, Shklovskij VA | Fabrication of artificial washboard pinning structures in thin niobium films | Journal of Superconductivity and Novel Magnetism | 10.1007/s10948-010-1055-7 |
| 2011 | Donev EU, Schardein G, Wright JC, Hastings JT | Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor | Nanoscale | 10.1039/c1nr10026b |
| 2011 | Fan J, Michalik JM, Casado L, Roddaro S, Ibarra MR, De Teresa JM | Investigation of the influence on graphene by using electron-beam and photo-lithography | Solid State Communications | 10.1016/j.ssc.2011.07.028 |
| 2011 | Fleischer M, Weber-Bargioni A, Altoe MV, Schwartzberg AM, Schuck PJ, Cabrini S, Kern DP | Gold nanocone near-field scanning optical microscopy probes | ACS Nano | 10.1021/nn102199u |
| 2011 | Fleischer M, Weber-Bargioni A, Cabrini S, Kern DP | Fabrication of metallic nanocones by induced deposition of etch masks and ion milling | Microelectronic Engineering | 10.1016/j.mee.2011.02.090 |
| 2011 | Gabureac MS, Bernau L, Boero G, Utke I | High spatial resolution Hall nano-sensors by tuned direct-write Co/C-FEBID | Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 | |
| 2011 | Gabureac MS, Bernau L, Utke I | Nanosynthesis of tunable composite materials by room-temperature pulsed focused electron beam induced chemical vapour deposition | Journal of Nanoscience and Nanotechnology | 10.1166/jnn.2011.5067 |
| 2011 | Ganczarczyk A, Geller M, Lorke A | XeF2 gas-assisted focused-electron-beaminduced etching of GaAs with 30 nm resolution | Nanotechnology | 10.1088/0957-4484/22/4/045301 |
| 2011 | Gazzadi GC, Mulders H, Trompenaars P, Ghirri A, Affronte M, Grillo V, Frabboni S | Focused electron beam deposition of nanowires from cobalt tricarbonyl nitrosyl (Co(CO)3NO) Precursor | Journal of Physical Chemistry C | 10.1021/jp206562h |
| 2011 | Gianola DS, Sedlmayr A, Mnig R, Volkert CA, Major RC, Cyrankowski E, Asif SA, Warren OL, Kraft O | In situ nanomechanical testing in focused ion beam and scanning electron microscopes | Review of Scientific Instruments | 10.1063/1.3595423 |
| 2011 | Guo D, Kometani R, Warisawa S, Ishihara S | MP-10 Evaluations of the downward growth characteristics on the 3-D nanostructure fabrication using focused-ion-beam chemical vapor deposition | The Proceedings of the Symposium on Micro-Nano Science and Technology | 10.1299/jsmemnm.2011.3.87 |
| 2011 | Halka V, Schmid MJ, Avrutskiy V, Ma X, Schuster R | Electron-beam-induced deposition of metallic microstructures from a molten-salt film on conductive and nonconductive substrates | Angewandte Chemie – International Edition | 10.1002/anie.201006560 |
| 2011 | Hauchard C, Rowntree PA | Low-energy electron-induced decarbonylation of Fe(CO) 5 films adsorbed on Au(111) surfaces | Canadian Journal of Chemistry | 10.1139/v11-073 |
| 2011 | Henry MR, Kim S, Rykaczewski K, Fedorov AG | Inert gas jets for growth control in electron beam induced deposition | Applied Physics Letters | 10.1063/1.3605588 |
| 2011 | Hochleitner G, Steinmair M, Lugstein A, Roediger P, Wanzenboeck HD, Bertagnolli E | Focused electron beam induced deposition of gold catalyst templates for si-nanowire synthesis | Nanotechnology | 10.1088/0957-4484/22/1/015302 |
| 2011 | Höflich K, Yang RB, Berger A, Leuchs G, Christiansen S | The direct writing of plasmonic gold nanostructures by electron-beam- induced deposition | Advanced Materials | 10.1002/adma.201004114 |
| 2011 | Hoshino T, Morishima K | Electron-beam direct processing on living cell membrane | Applied Physics Letters | 10.1063/1.3653278 |
| 2011 | Jaafar M, Serrano-Ramón L, Iglesias-Freire O, Fernández-Pacheco A, Ibarra MR, de Teresa JM, Asenjo A | Hysteresis loops of individual Co nanostripes measured by magnetic force microscopy | Nanoscale Research Letters | 10.1186/1556-276X-6-407 |
| 2011 | Jenke MG, Lerose D, Niederberger C, Michler J, Christiansen S, Utke I | Toward local growth of individual nanowires on three-dimensional microstructures by using a minimally invasive catalyst templating method | Nano Letters | 10.1021/nl2021448 |
| 2011 | Kai S, Takahashi K, Norsyazwan H, Ikuta T, Nishiyama T, Nagayama K | Deposition rate and movement effect of paraffin-based EBID | Electronics and Communications in Japan | 10.1002/ecj.10192 |
| 2011 | Kim HM, Lee MH, Kim KB | Theoretical and experimental study of nanopore drilling by a focused electron beam in transmission electron microscopy | Nanotechnology | 10.1088/0957-4484/22/27/275303 |
| 2011 | Kulkarni DD, Rykaczewski K, Singamaneni S, Kim S, Fedorov AG, Tsukruk VV | Thermally induced transformations of amorphous carbon nanostructures fabricated by electron beam induced deposition | ACS Applied Materials and Interfaces | 10.1021/am1010173 |
| 2011 | Kurra N, Vijaykumar T, Kulkarni GU | CNT manipulation: Inserting a carbonaceous dielectric layer beneath using electron beam induced deposition | Journal of Nanoscience and Nanotechnology | 10.1166/jnn.2011.3112 |
| 2011 | Landheer K, Rosenberg SG, Bernau L, Swiderek P, Utke I, Hagen CW, Fairbrother DH | Low-energy electron-induced decomposition and reactions of adsorbed tetrakis(trifluorophosphine)platinum [Pt(PF3)4] | Journal of Physical Chemistry C | 10.1021/jp204189k |
| 2011 | Lavrijsen R, Córdoba R, Schoenaker FJ, Ellis TH, Barcones B, Kohlhepp JT, Swagten HJ, Koopmans B, De Teresa JM, Magén C, Ibarra MR, Trompenaars P, Mulders JJ | Fe:O:C grown by focused-electron-beam-induced deposition: Magnetic and electric properties | Nanotechnology | 10.1088/0957-4484/22/2/025302 |
| 2011 | Lee SW, Liang D, Gao XP, Sankaran RM | Direct writing of metal nanoparticles by localized plasma electrochemical reduction of metal cations in polymer films | Advanced Functional Materials | 10.1002/adfm.201100093 |
| 2011 | Liebes Y, Hadad B, Ashkenasy N | Effects of electrons on the shape of nanopores prepared by focused electron beam induced etching | Nanotechnology | 10.1088/0957-4484/22/28/285303 |
| 2011 | Liu S, Zhao Q, Li Q, Zhang H, You L, Zhang J, Yu D | Controlled deformation of Si3N4 nanopores using focused electron beam in a transmission electron microscope | Nanotechnology | 10.1088/0957-4484/22/11/115302 |
| 2011 | Liu Z, Bøggild P, Yang JR, Cheng Y, Grey F, Liu YL, Wang L, Zheng QS | A graphite nanoeraser | Nanotechnology | 10.1088/0957-4484/22/26/265706 |
| 2011 | Mangold MA, Weiss C, Dirks B, Holleitner AW | Optical field-enhancement in metal nanoparticle arrays contacted by electron beam induced deposition | Applied Physics Letters | 10.1063/1.3599713 |
| 2011 | Martínez-Pérez MJ, Javier S, Luis F, Córdoba R, Drung D, Schurig T, Bellido E, De Miguel R, Gómez-Moreno C, Lostao A, Ruíz-Molina D | Ultrasensitive broad band SQUID microsusceptometer for magnetic measurements at very low temperatures | IEEE Transactions on Applied Superconductivity | 10.1109/TASC.2010.2082479 |
| 2011 | Michalik JM, Roddaro S, Casado L, Ibarra MR, De Teresa JM | Quantification and minimization of disorder caused by focused electron beam induced deposition of cobalt on graphene | Microelectronic Engineering | 10.1016/j.mee.2010.12.002 |
| 2011 | Mulders JJ, Belova LM, Riazanova A | Electron beam induced deposition at elevated temperatures: Compositional changes and purity improvement | Nanotechnology | 10.1088/0957-4484/22/5/055302 |
| 2011 | Muthukumar K, Opahle I, Shen J, Jeschke HO, Valentí R | Interaction of W(CO)6 with SiO2 surfaces: A density functional study | Physical Review B – Condensed Matter and Materials Physics | 10.1103/PhysRevB.84.205442 |
| 2011 | Notargiacomo A, Giovine E, Di Gaspare L | Ion and electron beam deposited masks for pattern transfer by reactive ion etching | Microelectronic Engineering | 10.1016/j.mee.2011.02.053 |
| 2011 | Persano A, Nabet B, Taurino A, Prete P, Lovergine N, Cola A | Polarization anisotropy of individual core/shell GaAs/AlGaAs nanowires by photocurrent spectroscopy | Applied Physics Letters | 10.1063/1.3578189 |
| 2011 | Plank H, Kothleitner G, Hofer F, Michelitsch SG, Gspan C, Hohenau A, Krenn J | Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3622314 |
| 2011 | Porrati F, Sachser R, Schwalb CH, Frangakis AS, Huth M | Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation | Journal of Applied Physics | 10.1063/1.3559773 |
| 2011 | Porrati F, Sachser R, Walz MM, Vollnhals F, Steinrück HP, Marbach H, Huth M | Magnetotransport properties of iron microwires fabricated by focused electron beam induced autocatalytic growth | Journal of Physics D: Applied Physics | 10.1088/0022-3727/44/42/425001 |
| 2011 | Post PC, Mohammadi-Gheidari A, Hagen CW, Kruit P | Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3656027 |
| 2011 | Prabhu AS, Freedman KJ, Robertson JW, Nikolov Z, Kasianowicz JJ, Kim MJ | SEM-induced shrinking of solid-state nanopores for single molecule detection | Nanotechnology | 10.1088/0957-4484/22/42/425302 |
| 2011 | Rack A, Weitkamp T, Zanette I, Morawe C, Vivo Rommeveaux A, Tafforeau P, Cloetens P, Ziegler E, Rack T, Cecilia A, Vagovič P, Harmann E, Dietsch R, Riesemeier H | Coherence preservation and beam flatness of a single-bounce multilayer monochromator (beamline ID19 – ESRF) | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 10.1016/j.nima.2010.11.069 |
| 2011 | Rajput NS, Banerjee A, Verma HC | Electron-and ion-beam-induced maneuvering of nanostructures: Phenomenon and applications | Nanotechnology | 10.1088/0957-4484/22/48/485302 |
| 2011 | Roberts GS, Singjai P | Joining carbon nanotubes | Nanoscale | 10.1039/c1nr10720h |
| 2011 | Roediger P, Wanzenboeck HD, Hochleitner G, Bertagnolli E | Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etching | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3596563 |
| 2011 | Roediger P, Wanzenboeck HD, Waid S, Hochleitner G, Bertagnolli E | Focused-ion-beam-inflicted surface amorphization and gallium implantation-new insights and removal by focused-electron-beam-induced etching | Nanotechnology | 10.1088/0957-4484/22/23/235302 |
| 2011 | Sachser R, Porrati F, Schwalb CH, Huth M | Universal conductance correction in a tunable strongly coupled nanogranular metal | Physical Review Letters | 10.1103/PhysRevLett.107.206803 |
| 2011 | Sangiao S, Morelln L, Ibarra MR, De Teresa JM | Ferromagnet-superconductor nanocontacts grown by focused electron/ion beam techniques for current-in-plane Andreev Reflection measurements | Solid State Communications | 10.1016/j.ssc.2010.10.028 |
| 2011 | Schardein G, Donev EU, Hastings JT | Electron-beam-induced deposition of gold from aqueous solutions | Nanotechnology | 10.1088/0957-4484/22/1/015301 |
| 2011 | Schirmer M, Walz MM, Papp C, Kronast F, Gray AX, Balke B, Cramm S, Fadley CS, Steinrück HP, Marbach H | Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: Protective capping of metallic iron structures | Nanotechnology | 10.1088/0957-4484/22/47/475304 |
| 2011 | Schirmer M, Walz MM, Vollnhals F, Lukasczyk T, Sandmann A, Chen C, Steinrück HP, Marbach H | Electron-beam-induced deposition and post-treatment processes to locally generate clean titanium oxide nanostructures on Si(100) | Nanotechnology | 10.1088/0957-4484/22/8/085301 |
| 2011 | Schoenaker FJ, Córdoba R, Fernndez-Pacheco R, Magén C, Stéphan O, Zuriaga-Monroy C, Ibarra MR, De Teresa JM | Focused electron beam induced etching of titanium with XeF2 | Nanotechnology | 10.1088/0957-4484/22/26/265304 |
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| 2011 | Serrano-Ramón L, Córdoba R, Rodríguez LA, Magén C, Snoeck E, Gatel C, Serrano I, Ibarra MR, De Teresa JM | Ultrasmall functional ferromagnetic nanostructures grown by focused electron-beam-induced deposition | ACS Nano | 10.1021/nn201517r |
| 2011 | Sezen M, Plank H, Fisslthaler E, Chernev B, Zankel A, Tchernychova E, Blümel A, List EJ, Grogger W, Pölt P | An investigation on focused electron/ion beam induced degradation mechanisms of conjugated polymers | Physical Chemistry Chemical Physics | 10.1039/c1cp22406a |
| 2011 | Siegel J, Heitz J, Švorčík V | Self-organized gold nanostructures on laser patterned PET | Surface and Coatings Technology | 10.1016/j.surfcoat.2011.07.080 |
| 2011 | Solovyeva V, Cmyrev A, Sachser R, Reith H, Huth M | Influence of irradiation-induced disorder on the Peierls transition in TTF-TCNQ microdomains | Journal of Physics D: Applied Physics | 10.1088/0022-3727/44/38/385301 |
| 2011 | Sysoev VV, Strelcov E, Kar S, Kolmakov A | The electrical characterization of a multi-electrode odor detection sensor array based on the single SnO2 nanowire | Thin Solid Films | 10.1016/j.tsf.2011.04.179 |
| 2011 | Szkudlarek A, Gabureac M, Utke I | Determination of the surface diffusion coefficient and the residence time of adsorbates via local focused electron beam induced chemical vapour deposition | Journal of Nanoscience and Nanotechnology | 10.1166/jnn.2011.5066 |
| 2011 | Takahashi Y, Ando M, Ihara R, Fujiwara T | Green-emissive Mn-activated nanocrystallized glass with willemite-type Zn_2GeO_4 | Optical Materials Express | 10.1364/ome.1.000372 |
| 2011 | Utke I, Jenke MG, Röling C, Thiesen PH, Iakovlev V, Sirbu A, Mereuta A, Caliman A, Kapon E | Polarisation stabilisation of telecom lasers by minimally-invasive direct-write focused electron beam induced deposition | Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 | |
| 2011 | Van Dorp WF, Lazić I, Beyer A, Gölzhäuser A, Wagner JB, Hansen TW, Hagen CW | Ultrahigh resolution focused electron beam induced processing: The effect of substrate thickness | Nanotechnology | 10.1088/0957-4484/22/11/115303 |
| 2011 | Van Dorp WF, Zhang X, Feringa BL, Wagner JB, Hansen TW, De Hosson JT | Nanometer-scale lithography on microscopically clean graphene | Nanotechnology | 10.1088/0957-4484/22/50/505303 |
| 2011 | van Oven JC, Berwald F, Berggren KK, Kruit P, Hagen CW | Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3640743 |
| 2011 | Volkov RL, Borgardt NI, Kukin VN, Prikhod’ko AS, Basaev AS, Shaman YP | Application of a focused ion beam to prepare electron microscopy samples of surface nanostructures | Journal of Surface Investigation | 10.1134/S1027451011090151 |
| 2011 | Wakaya F, Takamoto K, Teraoka T, Murakami K, Abo S, Takai M | Electron transport properties of Pt nanoarch fabricated by electron-beam-induced deposition | Japanese Journal of Applied Physics | 10.1143/JJAP.50.06GG14 |
| 2011 | Walz MM, Vollnhals F, Schirmer M, Steinrück HP, Marbach H | Generation of clean iron nanocrystals on an ultra-thin SiOx film on Si(001) | Physical Chemistry Chemical Physics | 10.1039/c1cp20865a |
| 2011 | Wei X, Wang MS, Bando Y, Golberg D | Electron-beam-induced substitutional carbon doping of boron nitride nanosheets, nanoribbons, and nanotubes | ACS Nano | 10.1021/nn103548r |
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| 2010 | Beard JD, Gordeev SN | Large flexibility of high aspect ratio carbon nanostructures fabricated by electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/21/47/475702 |
| 2010 | Beaumont A, Dubuc C, Beauvais J, Drouin D | Direct-write electron beam lithography in silicon dioxide at low energy | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3478304 |
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| 2010 | Bernau L, Gabureac M, Erni R, Utke I | Tunable nanosynthesis of composite materials by electron-impact reaction | Angewandte Chemie – International Edition | 10.1002/anie.201004220 |
| 2010 | Burbridge DJ, Crampin S, Viau G, Gordeev SN | Selected immobilization of individual nanoparticles by spot-exposure electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/21/4/045302 |
| 2010 | Chen CL, Arakawa K, Mori H | Two-dimensional metallic tungsten nanowire network fabricated by electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/21/28/285304 |
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| 2010 | Denisyuk AI | Creating V-shaped optical antennas | Journal of Optical Technology | 10.1364/jot.77.000527 |
| 2010 | Dobrovolskiy OV, Huth M, Shklovskij VA | Anisotropic magnetoresistive response in thin Nb films decorated by an array of Co stripes | Superconductor Science and Technology | 10.1088/0953-2048/23/12/125014 |
| 2010 | Egerton RF | Mechanisms of Radiation Damage and Electron-Beam Fabrication | Microscopy and Microanalysis | 10.1017/s1431927610055182 |
| 2010 | Fisslthaler E, Sezen M, Plank H, Blümel A, Sax S, Grogger W, List EJ | Direct sub-micrometer-patterning of conjugated polymers and polymer light- emitting devices by electron beam lithography | Macromolecular Chemistry and Physics | 10.1002/macp.200900665 |
| 2010 | Fowlkes JD, Doktycz MJ, Rack PD | An optimized nanoparticle separator enabled by electron beam induced deposition | Nanotechnology | 10.1088/0957-4484/21/16/165303 |
| 2010 | Fowlkes JD, Rack PD | Fundamental Electron-Precursor-Solid Interactions Derived from Time-Dependent Electron-Beam-Induced Deposition Simulations and Experiments | ACS Nano | 10.1021/nn901363a |
| 2010 | Foyevtsov O, Reith H, Huth M | Transport measurements on microcrystals of oriented CeIn3 and CeCoIn5 thin films | Thin Solid Films | 10.1016/j.tsf.2010.06.028 |
| 2010 | Frabboni S, Gazzadi GC, Pozzi G | Ion and electron beam nanofabrication of the which-way double-slit experiment in a transmission electron microscope | Applied Physics Letters | 10.1063/1.3529947 |
| 2010 | Gabureac M, Bernau L, Utke I, Boero G | Granular Co-C nano-Hall sensors by focused-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/21/11/115503 |
| 2010 | Graells S, Aćimović S, Volpe G, Quidant R | Direct growth of optical antennas using e-beam-induced gold deposition | Plasmonics | 10.1007/s11468-010-9128-9 |
| 2010 | Hyon Noh J, Nikiforov M, Kalinin SV, Vertegel AA, Rack PD | Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions | Nanotechnology | 10.1088/0957-4484/21/36/365302 |
| 2010 | Kox R, Deheryan S, Chen C, Arjmandi N, Lagae L, Borghs G | Local solid-state modification of nanopore surface charges | Nanotechnology | 10.1088/0957-4484/21/33/335703 |
| 2010 | Lei A, Petersen DH, Booth TJ, Homann LV, Kallesoe C, Sukas OS, Gyrsting Y, Molhave K, Boggild P | Customizable in situ TEM devices fabricated in freestanding membranes by focused ion beam milling | Nanotechnology | 10.1088/0957-4484/21/40/405304 |
| 2010 | Li J, Toth M, Dunn KA, Thiel BL | Interfacial mixing and internal structure of Pt-containing nanocomposites grown by room temperature electron beam induced deposition | Journal of Applied Physics | 10.1063/1.3428427 |
| 2010 | MacKus AJ, Mulders JJ, Van De Sanden MC, Kessels WM | Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition | Journal of Applied Physics | 10.1063/1.3431351 |
| 2010 | Miyazoe H, Utke I, Kikuchi H, Kiriu S, Friedli V, Michler J, Terashima K | Improving the metallic content of focused electron beam-induced deposits by a scanning electron microscope integrated hydrogen-argon microplasma generator | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3449808 |
| 2010 | Murakami K, Matsubara N, Ichikawa S, Wakaya F, Takai M | In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3360902 |
| 2010 | Nedelcu M, Saifullah MS, Hasko DG, Jang A, Anderson D, Huck WT, Jones GA, Weiland ME, Kang DJ, Steiner U | Fabrication of sub-10nm metallic lines of low line-width roughness by hydrogen reduction of patterned metal-organic materials | Advanced Functional Materials | 10.1002/adfm.201000219 |
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| 2010 | Olynick DL, Cord B, Schipotinin A, Ogletree DF, Schuck PJ | Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3425632 |
| 2010 | Park BC, Park YC, Lee HJ, Kim YH | Transmission electron microscopy study of damage layer formed through ion beam induced deposition of platinum on silicon substrate | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3516651 |
| 2010 | Passacantando M, Bussolotti F, Santucci S | Tuning electromechanical response of individual CNT by selective electron beam induced deposition | Journal of Non-Crystalline Solids | 10.1016/j.jnoncrysol.2010.05.031 |
| 2010 | Pfeiffer HC | Direct write electron beam lithography: a historical overview | Photomask Technology 2010 | 10.1117/12.868477 |
| 2010 | Poggio M, Degen CL | Force-detected nuclear magnetic resonance: Recent advances and future challenges | Nanotechnology | 10.1088/0957-4484/21/34/342001 |
| 2010 | Porrati F, Sachser R, Strauss M, Andrusenko I, Gorelik T, Kolb U, Bayarjargal L, Winkler B, Huth M | Artificial granularity in two-dimensional arrays of nanodots fabricated by focused-electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/21/37/375302 |
| 2010 | Qin H, Kim HS, Blick RH | Marshmallowing of nanopillar arrays by field emission | Journal of Applied Physics | 10.1063/1.3309776 |
| 2010 | Roediger P, Hochleitner G, Bertagnolli E, Wanzenboeck HD, Buehler W | Focused electron beam induced etching of silicon using chlorine | Nanotechnology | 10.1088/0957-4484/21/28/285306 |
| 2010 | Roediger P, Wanzenboeck HD, Hochleitner G, Bertagnolli E, Buehler W | Focused electron beam induced etching of silicon by chlorine gas: Negative effects of residual gas contamination on the etching process | Journal of Applied Physics | 10.1063/1.3525587 |
| 2010 | Rommel M, Spoldi G, Yanev V, Beuer S, Amon B, Jambreck J, Petersen S, Bauer AJ, Frey L | Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3431085 |
| 2010 | Roy S, Gao Z | Direct-write fabrication of a nanoscale digital logic element on a single nanowire | Nanotechnology | 10.1088/0957-4484/21/24/245306 |
| 2010 | Rykaczewski K, Henry MR, Kim SK, Fedorov AG, Kulkarni D, Singamaneni S, Tsukruk VV | The effect of the geometry and material properties of a carbon joint produced by electron beam induced deposition on the electrical resistance of a multiwalled carbon nanotube-to-metal contact interface | Nanotechnology | 10.1088/0957-4484/21/3/035202 |
| 2010 | Rykaczewski K, Hildreth OJ, Kulkarni D, Henry MR, Kim SK, Wong CP, Tsukruk VV, Fedorov AG | Maskless and resist-free rapid prototyping of three-dimensional structures through electron beam induced deposition (EBID) of carbon in combination with metal-assisted chemical etching (MaCE) of silicon | ACS Applied Materials and Interfaces | 10.1021/am1000773 |
| 2010 | Schwalb CH, Grimm C, Baranowski M, Sachser R, Porrati F, Reith H, Das P, Müller J, Völklein F, Kaya A, Huth M | A tunable strain sensor using nanogranular metals | Sensors (Switzerland) | 10.3390/s101109847 |
| 2010 | Shi M, Lane B, Mooney CB, Dow TA, Scattergood RO | Diamond tool wear measurement by electron-beam-induced deposition | Precision Engineering | 10.1016/j.precisioneng.2010.03.009 |
| 2010 | Smith DA, Joy DC, Rack PD | Monte Carlo simulation of focused helium ion beam induced deposition | Nanotechnology | 10.1088/0957-4484/21/17/175302 |
| 2010 | Sychugov I, Nakayama Y, Mitsuishi K | Manifold enhancement of electron beam induced deposition rate at grazing incidence | Nanotechnology | 10.1088/0957-4484/21/2/025303 |
| 2010 | Sychugov I, Nakayama Y, Mitsuishi K | Sub-10 nm crystalline silicon nanostructures by electron beam induced deposition lithography | Nanotechnology | 10.1088/0957-4484/21/28/285307 |
| 2010 | Toth M, Thiel BL, Knowles WR | Gas cascade amplification in ultra-high-resolution environmental scanning electron microcopy | Microscopy and Microanalysis | 10.1017/S1431927610000425 |
| 2010 | Utke I, Gabureac M, Friedli V, Bernau L, Michler J | In-situ monitoring of gas-assisted focused ion beam and focused electron beam induced processing | Journal of Physics: Conference Series | 10.1088/1742-6596/241/1/012072 |
| 2010 | Utke I, Gölzhäuser A | Small, minimally invasive, direct: Electrons induce local reactions of adsorbed functional molecules on the nanoscale | Angewandte Chemie – International Edition | 10.1002/anie.201002677 |
| 2010 | Vanhove N, Lievens P, Vandervorst W | Electron beam induced etching of silicon with SF6 | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3504594 |
| 2010 | Völklein F, Reith H, Schmitt MC, Huth M, Rauber M, Neumann R | Microchips for the investigation of thermal and electrical properties of individual nanowires | Journal of Electronic Materials | 10.1007/s11664-009-1046-2 |
| 2010 | Walz MM, Schirmer M, Vollnhals F, Lukasczyk T, Steinrück HP, Marbach H | Electrons as Invisible Ink: Fabrication of nanostructures by local electron beam induced activation of SiOx | Angewandte Chemie – International Edition | 10.1002/anie.201001308 |
| 2010 | Weber-Bargioni A, Schwartzberg A, Schmidt M, Harteneck B, Ogletree DF, Schuck PJ, Cabrini S | Functional plasmonic antenna scanning probes fabricated by induced-deposition mask lithography | Nanotechnology | 10.1088/0957-4484/21/6/065306 |
| 2010 | Wiedemair J, Menegazzo N, Pikarsky J, Booksh KS, Mizaikoff B, Kranz C | Novel electrode materials based on ion beam induced deposition of platinum carbon composites | Electrochimica Acta | 10.1016/j.electacta.2010.05.008 |
| 2010 | Wiedemair J, Moon JS, Reinauer F, Mizaikoff B, Kranz C | Ion beam induced deposition of platinum carbon composite electrodes for combined atomic force microscopy-scanning electrochemical microscopy | Electrochemistry Communications | 10.1016/j.elecom.2010.05.008 |
| 2010 | Wielgoszewski G, Sulecki P, Gotszalk T, Janus P, Szmigiel D, Grabiec P, Zschech E | Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3502614 |
| 2010 | Wnuk JD, Gorham JM, Rosenberg SG, Madey TE, Hagen CW, Fairbrother DH | Atomic radical abatement of organic impurities from electron beam deposited metallic structures | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3378142 |
| 2010 | Wnuk JD, Gorham JM, Rosenberg SG, Van Dorp WF, Madey TE, Hagen CW, Fairbrother DH | Electron beam irradiation of dimethyl-(acetylacetonate) gold(III) adsorbed onto solid substrates | Journal of Applied Physics | 10.1063/1.3295918 |
| 2010 | Ye J, Chen C, Lagae L, Maes G, Borghs G, Van Dorpe P | Strong location dependent surface enhanced Raman scattering on individual gold semishell and nanobowl particles | Physical Chemistry Chemical Physics | 10.1039/c0cp00872a |
| 2010 | Ye W, Peña Martin PA, Kumar N, Daly SR, Rockett AA, Abelson JR, Girolami GS, Lyding JW | Direct writing of sub-5 nm hafnium diboride metallic nanostructures | ACS Nano | 10.1021/nn1018522 |
| 2010 | Zado A, Tschumak E, Lischka K, As DJ | Electrical characterization of an interface n-type conduction channel in cubic GaN/AlGaN heterostructures | Physica Status Solidi (C) Current Topics in Solid State Physics | 10.1002/pssc.200982625 |
| 2010 | Zeeb B, Jäger S, Schäfer C, Nill P, Meixner AJ, Kern DP, Fleischer M | Self-aligned gold nanocone probe tips | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 10.1116/1.3518461 |
| 2009 | Balaur E, Peele AG | Tunnelling through diamond-like carbon nanofilms deposited by electron-beam-induced deposition | Thin Solid Films | 10.1016/j.tsf.2009.04.015 |
| 2009 | Beard JD, Burbridge DJ, Moskalenko AV, Dudko O, Yarova PL, Smirnov SV, Gordeev SN | An atomic force microscope nanoscalpel for nanolithography and biological applications | Nanotechnology | 10.1088/0957-4484/20/44/445302 |
| 2009 | Botman A, Hagen CW, Li J, Thiel BL, Dunn KA, Mulders JJ, Randolph S, Toth M | Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4 | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3253551 |
| 2009 | Botman A, Mulders JJ, Hagen CW | Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective | Nanotechnology | 10.1088/0957-4484/20/37/372001 |
| 2009 | Bret T, Afra B, Becker R, Hofmann T, Edinger K, Liang T, Hoffmann P | Gas assisted focused electron beam induced etching of alumina | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3243208 |
| 2009 | Burbridge DJ, Gordeev SN | Proximity effects in free-standing EBID structures | Nanotechnology | 10.1088/0957-4484/20/28/285308 |
| 2009 | Chen C, Hutchison JA, Clemente F, Kox R, Uji-I. H, Hofkens J, Lagae L, Maes G, Borghs G, Van Dorpe P | Direct evidence of high spatial localization of hot spots in surface-enhanced Raman scattering | Angewandte Chemie – International Edition | 10.1002/anie.200905389 |
| 2009 | Chen SJ, Howitt DG, Gierhart BC, Smith RL, Collins SD | The applications of in situ electron energy loss spectroscopy to the study of electron beam nanofabrication | Microscopy and Microanalysis | 10.1017/S1431927609090345 |
| 2009 | Cox D, Kazakoval O, Bowyer E, Favata AL, Tzalenchuk A | Superconducting nanostructures in a single step process | Journal of Physics: Conference Series | 10.1088/1742-6596/150/5/052275 |
| 2009 | De Teresa JM, Cárdoba R, Fernández-Pacheco A, Montero O, Strichovanec P, Ibarra MR | Origin of the difference in the resistivity of as-grown focused-ion- and focused-electron-beam-induced Pt nanodeposits | Journal of Nanomaterials | 10.1155/2009/936863 |
| 2009 | De Teresa JM, Fernández-Pacheco A, Córdoba R, Sesé J, Ibarra MR, Guillamón I, Suderow H, Vieira S | Transport properties of superconducting amorphous W-based nanowires fabricated by focused-ion-beam-induced-deposition for applications in Nanotechnology | Materials Research Society Symposium Proceedings | 10.1557/proc-1180-cc04-09 |
| 2009 | Dhawan A, Gerhold M, Madison A, Fowlkes J, Russell PE, Vo-Dinh T, Leonard DN | Fabrication of nanodot plasmonic waveguide structures using FIB milling and electron beam-induced deposition | Scanning | 10.1002/sca.20152 |
| 2009 | Dhawan A, Gerhold M, Russell P, Vo-Dinh T, Leonard D | Fabrication of metallic nanodot structures using focused ion beam (FIB) and electron beam-induced deposition for plasmonic waveguides | Quantum Dots, Particles, and Nanoclusters VI | 10.1117/12.809927 |
| 2009 | Donev EU, Hastings JT | Electron-beam-induced deposition of platinum from a liquid precursor | Nano Letters | 10.1021/nl9012216 |
| 2009 | Donev EU, Hastings JT | Liquid-precursor electron-beam-induced deposition of Pt nanostructures: dose, proximity, resolution | Nanotechnology | 10.1088/0957-4484/20/50/505302 |
| 2009 | Easter C, O’Neal CB | Characterization of high-pressure XeF2 vapor-phase silicon etching for MEMS processing | Journal of Microelectromechanical Systems | 10.1109/JMEMS.2009.2029976 |
| 2009 | Ervin MH, Nichols BM | Electron beam induced deposition of cobalt for use as single- and multiwalled carbon nanotube growth catalyst | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3250259 |
| 2009 | Fernández-Pacheco A, De Teresa JM, Córdoba R, Ibarra MR | Metal-insulator transition in Pt-C nanowires grown by focused-ion-beam- induced deposition | Physical Review B – Condensed Matter and Materials Physics | 10.1103/PhysRevB.79.174204 |
| 2009 | Fernández-Pacheco A, De Teresa JM, Córdoba R, Ibarra MR, Petit D, Read DE, O’Brien L, Lewis ER, Zeng HT, Cowburn RP | Domain wall conduit behavior in cobalt nanowires grown by focused electron beam induced deposition | Applied Physics Letters | 10.1063/1.3139068 |
| 2009 | Fernndez-Pacheco A, De Teresa JM, Córdoba R, Ibarra MR | Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition | Journal of Physics D: Applied Physics | 10.1088/0022-3727/42/5/055005 |
| 2009 | Fernndez-Pacheco A, De Teresa JM, Szkudlarek A, Córdoba R, Ibarra MR, Petit D, O’Brien L, Zeng HT, Lewis ER, Read DE, Cowburn RP | Magnetization reversal in individual cobalt micro-and nanowires grown by focused-electron-beam-induced-deposition | Nanotechnology | 10.1088/0957-4484/20/47/475704 |
| 2009 | Fowlkes JD, Smith DA, Lassiter MG, Rack PD | Electron beam induced deposition and etching: Fundamentals, challenges and nanotechnology-based applications | Microscopy and Microanalysis | 10.1017/S1431927609099176 |
| 2009 | Friedli V, Utke I | Optimized molecule supply from nozzle-based gas injection systems for focused electron- and ion-beam induced deposition and etching: Simulation and experiment | Journal of Physics D: Applied Physics | 10.1088/0022-3727/42/12/125305 |
| 2009 | Friedli V, Utke I, Mølhave K, Michler J | Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O 2)2 | Nanotechnology | 10.1088/0957-4484/20/38/385304 |
| 2009 | Fukuda R, Hayaki S, Nakatsuji H | Valence ionization spectra of group six metal hexacarbonyls studied by the symmetry-adapted cluster-configuration interaction method | Journal of Chemical Physics | 10.1063/1.3257963 |
| 2009 | Fukuda T, Nakajima M, Liu P, Elshimy H | Nanofabrication, nanoinstrumentation and nanoassembly by nanorobotic manipulation | International Journal of Robotics Research | 10.1177/0278364908097212 |
| 2009 | Gazzadi GC, Frabboni S | Structural evolution and graphitization of metallorganic-Pt suspended nanowires under high-current-density electrical test | Applied Physics Letters | 10.1063/1.3119582 |
| 2009 | Grimm C, Klingenberger D, Huth M | Tunnel percolation and current path switching in a granular metal | Journal of PHysics: Conference Series | 10.1088/1742-6596/150/2/022019 |
| 2009 | Hamann T, Böhler E, Swiderek P | Low-energy-electron-induced hydroamination of an alkene | Angewandte Chemie – International Edition | 10.1002/anie.200901338 |
| 2009 | Hedhili MN, Bredehöft JH, Swiderek P | Electron-induced reactions of MeCpPtMe3 investigated by HREELS | Journal of Physical Chemistry C | 10.1021/jp810834r |
| 2009 | Heerkens CT, Kamerbeek MJ, van Dorp WF, Hagen CW, Hoekstra J | Electron beam induced deposited etch masks | Microelectronic Engineering | 10.1016/j.mee.2008.11.079 |
| 2009 | Huth M, Klingenberger D, Grimm C, Porrati F, Sachser R | Conductance regimes of W-based granular metals prepared by electron beam induced deposition | New Journal of Physics | 10.1088/1367-2630/11/3/033032 |
| 2009 | Joshi KB, Singh P, Verma S | Fabrication of platinum nanopillars on peptide-based soft structures using a focused ion beam | Biofabrication | 10.1088/1758-5082/1/2/025002 |
| 2009 | Kahng YH, Choi J, Jeong K, Chon Park B, Kim DH, Lyou J, Lee JJ, Lee H, Lee T, Jung Ahn S | Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes | Ultramicroscopy | 10.1016/j.ultramic.2009.09.011 |
| 2009 | Klingenberger D, Huth M | Modular ultrahigh vacuum-compatible gas-injection system with an adjustable gas flow for focused particle beam-induced deposition | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.3196789 |
| 2009 | Kometani R, Warisawa S, Ishihara S | Nanomanufacturing tool fabrications by focused-ion-beam chemical vapor deposition | Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 | |
| 2009 | Kox R, Chen C, Lagae L, Borghs G | Shrinking solid-state nanopores and nanoslits using electron beam induced deposition with different precursors | 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 | |
| 2009 | Kox R, Chen C, Maes G, Lagae L, Borghs G | Shrinking solid-state nanopores using electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/20/11/115302 |
| 2009 | Lassiter JB, Knight MW, Mirin NA, Halas NJ | Reshaping the plasmonic properties of an individual nanoparticle | Nano Letters | 10.1021/nl9025665 |
| 2009 | Liu L, Zeng D, Wei X, Chen Q, Li X | Strength analysis of clamping in micro/nano scale experiments | Acta Mechanica Solida Sinica | 10.1016/S0894-9166(09)60389-X |
| 2009 | Liu P, Kantola K, Fukuda T, Arai F | Nanoassembly of nanostructures by cutting, bending and soldering of carbon nanotubes with electron beam | Journal of Nanoscience and Nanotechnology | 10.1166/jnn.2009.033 |
| 2009 | Lukasczyk T, Schirmer M, Steinrück HP, Marbach H | Generation of clean iron structures by electron-beam-induced deposition and selective catalytic decomposition of iron pentacarbonyl on Rh(110) | Langmuir | 10.1021/la901612u |
| 2009 | Makise K, Mitsuishi K, Shimojo M, Furuya K | A nanosized photodetector fabricated by electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/20/42/425305 |
| 2009 | Martínez-Pérez MJ, Sesé J, Córdoba R, Luis F, Drung D, Schurig T | Circuit edit of superconducting microcircuits | Superconductor Science and Technology | 10.1088/0953-2048/22/12/125020 |
| 2009 | Moberlychan WJ | Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion-surface 3D interactions, from micromachining to self-organized picostructures | Journal of Physics Condensed Matter | 10.1088/0953-8984/21/22/224013 |
| 2009 | Murakami K, Matsubara N, Ichikawa S, Kisa T, Nakayama T, Takamoto K, Wakaya F, Takai M, Petersen S, Amon B, Ryssel H | Transmission-electron-microscopy observation of Pt pillar fabricated by electron-beam-induced deposition | Japanese Journal of Applied Physics | 10.1143/JJAP.48.06FF12 |
| 2009 | Murakami K, Nishihara S, Matsubara N, Ichikawa S, Wakaya F, Takai M | Superposition of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3079654 |
| 2009 | Park J, Kwon S, Jun SI, Ivanov IN, Cao J, Musfeldt JL, Rack PD | Stress induced crystallization of hydrogenated amorphous silicon | Thin Solid Films | 10.1016/j.tsf.2008.10.114 |
| 2009 | Park J, Qin H, Kim HS, Blick RH | Marshmallowing of nanopillar arrays by field emission | Journal of Physics: Conference Series | 10.1088/1742-6596/193/1/012039 |
| 2009 | Porrati F, Sachser R, Huth M | The transient electrical conductivity of W-based electron-beam-induced deposits during growth, irradiation and exposure to air | Nanotechnology | 10.1088/0957-4484/20/19/195301 |
| 2009 | Principe EL, Hartfield C, Kruger R, Smith A, Dubois R, Scammon K, Kempshall B | Atomic Layer Deposition and Vapor Deposited SAMS in a CrossBeam FIB-SEM Platform: A Path To Advanced Materials Synthesis | Microscopy Today | 10.1017/s1551929500054444 |
| 2009 | Reguer A, Bedu F, Nitsche S, Chaudanson D, Detailleur B, Dallaporta H | Probing the local temperature by in situ electron microscopy on a heated Si3N4 membrane | Ultramicroscopy | 10.1016/j.ultramic.2009.09.006 |
| 2009 | Rius G, Llobet J, Esplandiu MJ, Solé L, Borrisé X, Pérez-Murano F | Using electron and ion beams on carbon nanotube-based devices. Effects and considerations for nanofabrication | Microelectronic Engineering | 10.1016/j.mee.2008.12.007 |
| 2009 | Roediger P, Wanzenboeck HD, Hochleitner G, Bertagnolli E | Evaluation of chamber contamination in a scanning electron microscope | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3244628 |
| 2009 | Roy P, Lynch R, Schmuki P | Electron beam induced in-vacuo Ag deposition on TiO2 from ionic liquids | Electrochemistry Communications | 10.1016/j.elecom.2009.05.051 |
| 2009 | Rykaczewski K, Henry MR, Fedorov AG | Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube | Applied Physics Letters | 10.1063/1.3225553 |
| 2009 | Sachser R, Porrati F, Huth M | Hard energy gap and current-path switching in ordered two-dimensional nanodot arrays prepared by focused electron-beam-induced deposition | Physical Review B – Condensed Matter and Materials Physics | 10.1103/PhysRevB.80.195416 |
| 2009 | Sanford CA, Stern L, Barriss L, Farkas L, DiManna M, Mello R, Maas DJ, Alkemade PF | Beam induced deposition of platinum using a helium ion microscope | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3237095 |
| 2009 | Seo MK, Kang JH, Kim MK, Ahn BH, Kim JY, Jeong KY, Park HG, Lee YH | Wavelength-scale photonic-crystal laser formed by electron-beam-induced nano-block deposition | Optics Express | 10.1364/oe.17.006790 |
| 2009 | Sezen M, Plank H, Nellen PM, Meier S, Chernev B, Grogger W, Fisslthaler E, List EJ, Scherf U, Poelt P | Ion beam degradation analysis of poly(3-hexylthiophene) (P3HT): Can cryo-FIB minimize irradiation damage? | Physical Chemistry Chemical Physics | 10.1039/b816893h |
| 2009 | Sharma R | Kinetic measurements from in situ TEM observations | Microscopy Research and Technique | 10.1002/jemt.20667 |
| 2009 | Sharma R, Moore E, Rez P, Treacy MM | Site-specific fabrication of Fe particles for carbon nanotube growth | Nano Letters | 10.1021/nl803180e |
| 2009 | Sidorkin VA, Alkemade PF, Salemink HW, Schmits R, van der Drift E | Method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3263171 |
| 2009 | Solá F, Biaggi-Labiosa A, Fonseca LF, Resto O, Lebrón-Colón M, Meador MA | Field emission and radial distribution function studies of fractal-like amorphous carbon nanotips | Nanoscale Research Letters | 10.1007/s11671-009-9270-5 |
| 2009 | Solá F, Resto O, Biaggi-Labiosa A, Fonseca LF | Growth and characterization of branched carbon nanostructures arrays in nano-patterned surfaces from porous silicon substrates | Micron | 10.1016/j.micron.2008.01.005 |
| 2009 | Solovyeva V, Keller K, Huth M | Organic charge transfer phase formation in thin films of the BEDT-TTF/TCNQ donor-acceptor system | Thin Solid Films | 10.1016/j.tsf.2009.05.006 |
| 2009 | Steinberg H, Lilach Y, Salant A, Wolf O, Faust A, Millo O, Banin U | Anomalous temperature dependent transport through single colloidal nanorods strongly coupled to metallic leads | Nano Letters | 10.1021/nl901912e |
| 2009 | Suutala A, Olkkonen J, Cox DC, Lappalainen J, Jantunen H | Inverted method for fabricating a nano-aperture device with subwavelength structures | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.3263225 |
| 2009 | Sychugov I, Nakayama Y, Mitsuishi K | Composition control of electron beam induced nanodeposits by surface pretreatment and beam focusing | Journal of Physical Chemistry C | 10.1021/jp9079684 |
| 2009 | Takahashi K, Hilmi N, Ito Y, Ikuta T, Zhang X | Measurement of the thermal conductivity of nanodeposited material | International Journal of Thermophysics | 10.1007/s10765-009-0666-3 |
| 2009 | Tran PD, Barthes-Labrousse MG, Doppelt P | Iridium CVD using di-$\mu$-chloro-tetrakis(trifluorophosphine)-diiridium(I) precursor, in-situ generated from chlorotetrakis(trifluorophosphine)iridium | Chemical Vapor Deposition | 10.1002/cvde.200906788 |
| 2009 | Tripathi SK, Kulkarni VN | Evolution of surface morphology of nano and micro structures during focused ion beam induced growth | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 10.1016/j.nimb.2009.01.050 |
| 2009 | Trudel S, Hill RH | Top-down meets bottom-up – Electron-beam induced metalorganic deposition of amorphous iron oxide nanostructures | Canadian Journal of Chemistry | 10.1139/V08-124 |
| 2009 | Turchanin A, Beyer A, Nottbohm CT, Zhang X, Stosch R, Sologubenko A, Mayer J, Hinze P, Weimann T, Gölzhäuser A | One nanometer thin carbon nanosheets with tunable conductivity and stiffness | Advanced Materials | 10.1002/adma.200803078 |
| 2009 | Turchanin A, Beyer A, Nottbohm CT, Zhang X, Stosch R, Sologubenko A, Mayer J, Hinze P, Weimann T, Gölzhäuser A | Thin Films: One Nanometer Thin Carbon Nanosheets with Tunable Conductivity and Stiffness (Adv. Mater. 12/2009) | Advanced Materials | 10.1002/adma.200990039 |
| 2009 | Van Dorp WF, Wnuk JD, Gorham JM, Fairbrother DH, Madey TE, Hagen CW | Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy | Journal of Applied Physics | 10.1063/1.3225091 |
| 2009 | Ven Kouwen L, Botman A, Hagen CW | Focused electron-Beam-induced deposition of 3 nm dots in a scanning electron microscope | Nano Letters | 10.1021/nl900717r |
| 2009 | Wnuk JD, Gorham JM, Fairbrother DH | Growth and microstructure of nanoscale amorphous carbon nitride films deposited by electron beam irradiation of 1, 2-diaminopropane | Journal of Physical Chemistry C | 10.1021/jp900966m |
| 2009 | Wnuk JD, Gorham JM, Rosenberg SG, Van Dorp WF, Madey TE, Hagen CW, Fairbrother DH | Electron induced surface reactions of the organometallic precursor trimethyl(methylcyclopentadienyl)platinum(IV) | Journal of Physical Chemistry C | 10.1021/jp807824c |
| 2009 | Ye W, Martin P, Kumar N, Zhang F, Rockett A, Abelson J, Girolami G, Lyding J | Direct writing of sub-5 nm metals on carbon nanotubes and graphene using a UHV-STM | 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 | |
| 2009 | Yemini M, Hadad B, Liebes Y, Goldner A, Ashkenasy N | The controlled fabrication of nanopores by focused electron-beam-induced etching | Nanotechnology | 10.1088/0957-4484/20/24/245302 |
| 2009 | Zhang D, Breguet JM, Clavel R, Phillippe L, Utke I, Michler J | In situ tensile testing of individual Co nanowires inside a scanning electron microscope | Nanotechnology | 10.1088/0957-4484/20/36/365706 |
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| 2008 | Basu J, Barry Carter C, Divakar R, Shenoy VB, Ravishankar N | Modified electron-beam-induced deposition of metal nanostructure arrays using a parallel electron beam | Applied Physics Letters | 10.1063/1.2992193 |
| 2008 | Beuer S, Rommel M, Petersen S, Amon B, Sulzbach T, Engl W, Bauer AJ, Ryssel H | Recent improvements in the integration of field emitters into scanning probe microscopy sensors | Microelectronic Engineering | 10.1016/j.mee.2008.01.048 |
| 2008 | Bhuvana T, Kulkarni GU | Highly conducting patterned Pd nanowires by direct-write electron beam lithography | ACS Nano | 10.1021/nn700372h |
| 2008 | Botman A, de Winter DA, Mulders JJ | Electron-beam-induced deposition of platinum at low landing energies | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2976576 |
| 2008 | Botman A, Hesselberth M, Mulders JJ | Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition | Microelectronic Engineering | 10.1016/j.mee.2007.12.036 |
| 2008 | Botman A, Hesselberth M, Mulders JJ | Investigation of morphological changes in platinum-containing nanostructures created by electron-beam-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2990790 |
| 2008 | Bruk MA, Zhikharev EN, Shevchuk SL, Volegova IA, Spirin AV, Teleshov EN, Kal’nov VA, Maishev YP | Formation of masking pattern by electron beam-induced vapor deposition | High Energy Chemistry | 10.1007/s10733-008-2008-6 |
| 2008 | Bruk MA, Zhikharev EN, Shevchuk SL, Volegova IA, Spirin AV, Teleshov EN, Kal’nov VA, Maishev YP | Features of resist-free formation of masking pattern by electron beam-induced vapor deposition | High Energy Chemistry | 10.1134/S0018143908050056 |
| 2008 | Burbridge DJ, Crampin S, Viau G, Gordeev SN | Strategies for the immobilization of nanoparticles using electron beam induced deposition | Nanotechnology | 10.1088/0957-4484/19/44/445302 |
| 2008 | Burean E, Swiderek P | Electron-induced reactions in condensed acetaldehyde: identification of products and energy-dependent cross sections | Journal of Physical Chemistry C | 10.1021/jp807419k |
| 2008 | Chang WS, Bauerdick S, Jeong MS | Resolution enhancing using cantilevered tip-on-aperture silicon probe in scanning near-field optical microscopy | Ultramicroscopy | 10.1016/j.ultramic.2008.04.078 |
| 2008 | Chen IC, Chen LH, Gapin A, Jin S, Yuan L, Liou SH | Iron-platinum-coated carbon nanocone probes on tipless cantilevers for high resolution magnetic force imaging | Nanotechnology | 10.1088/0957-4484/19/7/075501 |
| 2008 | Crozier PA | Proximity effects in nanoscale patterning with high resolution electron beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2834560 |
| 2008 | De Angelis F, Das G, Liberale C, Mecarini F, Matteucci M, Di Fabrizio E | Fabrication and characterization of plasmonic nanolens for applications in biophotonics | Microelectronic Engineering | 10.1016/j.mee.2007.12.035 |
| 2008 | Fowlkes JD, Smith DA, Rack PD | Electron beam induced processing: Experimentation, simulation, and applications | Microscopy and Microanalysis | 10.1017/S1431927608083633 |
| 2008 | Frabboni S, Gazzadi GC, Pozzi G | Nanofabrication and the realization of Feynman’s two-slit experiment | Applied Physics Letters | 10.1063/1.2962987 |
| 2008 | Friedli V, Hoffmann S, Michler J, Utke I | AFM sensors in scanning electron and ion microscopes: Tools for nanomechanics, nanoanalytics, and nanofabrication | NanoScience and Technology | 10.1007/978-3-540-74080-3_7 |
| 2008 | Furuya K | Nanofabrication by advanced electron microscopy using intense and focused beam | Science and Technology of Advanced Materials | 10.1088/1468-6996/9/1/014110 |
| 2008 | Furuya K, Shimojo M, Takeguchi M, Song M, Mitsuishi K, Tanaka M | Position controlled fabrication of metal nanostructures with focused electron beam | TMS Annual Meeting | |
| 2008 | Furuya K, Takeguchi M, Song M, Mitsuishi K, Tanaka M | Electron beam induced fabrication and characterization of nanostructures | Journal of Physics: Conference Series | 10.1088/1742-6596/126/1/012024 |
| 2008 | Garetto A, Baur C, Oster J, Waiblinger M, Edinger K | Advanced process capabilities for electron beam based photomask repair in a production environment | Photomask Technology 2008 | 10.1117/12.801554 |
| 2008 | Gazzadi GC, Frabboni S, Menozzi C, Incerti L | Electrical characterization of suspended Pt nanowires grown by EBID with water vapour assistance | Microelectronic Engineering | 10.1016/j.mee.2008.01.016 |
| 2008 | Giesbers AJ, Zeitler U, Neubeck S, Freitag F, Novoselov KS, Maan JC | Nanolithography and manipulation of graphene using an atomic force microscope | Solid State Communications | 10.1016/j.ssc.2008.06.027 |
| 2008 | Guan Y, Fowlkes JD, Retterer ST, Simpson ML, Rack PD | Nanoscale lithography via electron beam induced deposition | Nanotechnology | 10.1088/0957-4484/19/50/505302 |
| 2008 | Hagen CW, Van Dorp WF, Crozier PA | The nucleation stage in electron beam induced deposition | Journal of Physics: Conference Series | 10.1088/1742-6596/126/1/012025 |
| 2008 | Hagen CW, van Dorp WF, Crozier PA, Kruit P | Electronic pathways in nanostructure fabrication | Surface Science | 10.1016/j.susc.2007.11.034 |
| 2008 | Iliescu C, Chen B, Wei J, Pang AJ | Characterisation of silicon carbide films deposited by plasma-enhanced chemical vapour deposition | Thin Solid Films | 10.1016/j.tsf.2007.07.013 |
| 2008 | Jenkins CA, Ramesh R, Huth M, Eichhorn T, Pörsch P, Elmers HJ, Jakob G | Growth and magnetic control of twinning structure in thin films of Heusler shape memory compound Ni2 MnGa | Applied Physics Letters | 10.1063/1.3044473 |
| 2008 | Kai S, Takahashi K, Norsyazwan H, Ikuta T, Nishiyama T, Nagayama K | Deposition rate and movement effect of paraffin-based EBID | IEEJ Transactions on Sensors and Micromachines | 10.1541/ieejsmas.128.161 |
| 2008 | Kieft E, Bosch E | Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM | Journal of Physics D: Applied Physics | 10.1088/0022-3727/41/21/215310 |
| 2008 | Klein KL, Randolph SJ, Fowlkes JD, Allard LF, Meyer III HM, Simpson ML, Rack PD | Single-crystal nanowires grown via electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/19/34/345705 |
| 2008 | Kruit P, Van Dorp WF, Hagen CW, Crozier PA | Synthesis of nanostructures using electron beam induced deposition | Microscopy and Microanalysis | 10.1017/S1431927608084511 |
| 2008 | Kunz RR, Mayer TM | Electron beam induced surface nucleation and low temperature thermal decomposition of metal carbonyls | 10.1063/1.37155 | |
| 2008 | Lassiter MG, Liang T, Rack PD | Inhibiting spontaneous etching of nanoscale electron beam induced etching features: Solutions for nanoscale repair of extreme ultraviolet lithography masks | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2917076 |
| 2008 | Lassiter MG, Rack PD | Nanoscale electron beam induced etching: A continuum model that correlates the etch profile to the experimental parameters | Nanotechnology | 10.1088/0957-4484/19/45/455306 |
| 2008 | Li J, Toth M, Tileli V, Dunn KA, Lobo CJ, Thiel BL | Evolution of the nanostructure of deposits grown by electron beam induced deposition | Applied Physics Letters | 10.1063/1.2959112 |
| 2008 | Lobo CJ, Toth M, Wagner R, Thiel BL, Lysaght M | High resolution radially symmetric nanostructures from simultaneous electron beam induced etching and deposition | Nanotechnology | 10.1088/0957-4484/19/02/025303 |
| 2008 | Lukasczyk T, Schirmer M, Steinrück HP, Marbach H | Electron-beam-induced deposition in ultrahigh vacuum: Lithographic fabrication of clean iron nanostructures | Small | 10.1002/smll.200701095 |
| 2008 | McConkey JW, Malone CP, Johnson PV, Winstead C, McKoy V, Kanik I | Electron impact dissociation of oxygen-containing molecules-A critical review | Physics Reports | 10.1016/j.physrep.2008.05.001 |
| 2008 | Meyer JC, Girit CO, Crommie MF, Zettl A | Hydrocarbon lithography on graphene membranes | Applied Physics Letters | 10.1063/1.2901147 |
| 2008 | Miyazoe H, Utke I, Michler J, Terashima K | Controlled focused electron beam-induced etching for the fabrication of sub-beam-size nanoholes | Applied Physics Letters | 10.1063/1.2839334 |
| 2008 | Plank H, Gspan C, Dienstleder M, Kothleitner G, Hofer F | The influence of beam defocus on volume growth rates for electron beam induced platinum deposition | Nanotechnology | 10.1088/0957-4484/19/48/485302 |
| 2008 | Radenovic A, Trepagnier E, Csencsits R, Downing KH, Liphardt J | Fabrication of 10 nm diameter hydrocarbon nanopores | Applied Physics Letters | 10.1063/1.3012376 |
| 2008 | Reguer A, Bedu F, Tonneau D, Dallaporta H, Prestigiacomo M, Houel A, Sudraud P | Structural and electrical studies of conductive nanowires prepared by focused ion beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2830630 |
| 2008 | Rykaczewski K, Marshall A, White WB, Fedorov AG | Dynamic growth of carbon nanopillars and microrings in electron beam induced dissociation of residual hydrocarbons | Ultramicroscopy | 10.1016/j.ultramic.2008.04.006 |
| 2008 | Seo MK, Park HG, Yang JK, Kim JY, Kim SH, Lee YH | Controlled sub-nanometer tuning of photonic crystal resonator by carbonaceous nano-dots | Optics Express | 10.1364/oe.16.009829 |
| 2008 | Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K | Formation of nanoscale platinum and iron oxide structures using electron beam induced deposition techniques | Journal of Physics: Conference Series | 10.1088/1742-6596/100/5/052016 |
| 2008 | Silva MM, Vaz A, Veríssimo C, Moshkalev SA, Swart JW | Fabrication of Multi-point Test Structures Using Focused Ion Beam and Selective Carbon Nanotubes Deposition by Dielectrophoresis | ECS Transactions | 10.1149/1.2956063 |
| 2008 | Smith DA, Fowlkes JD, Rack PD | Understanding the kinetics and nanoscale morphology of electron-beam- induced deposition via a three-dimensional monte carlo simulation: the effects of the precursor molecule and the deposited material | Small | 10.1002/smll.200701133 |
| 2008 | Smith DA, Fowlkes JD, Rack PD | Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation | Nanotechnology | 10.1088/0957-4484/19/41/415704 |
| 2008 | Solá F, Resto O, Azlin BL, Fonseca LF | Growth of branched carbon nanostructures in nanopatterned surfaces created by focused ion beam | Materials Research Society Symposium Proceedings | 10.1557/proc-1059-kk04-12 |
| 2008 | Song M, Furuya K | Fabrication and characterization of nanostructures on insulator substrates by electron-beam-induced deposition | Science and Technology of Advanced Materials | 10.1088/1468-6996/9/2/023002 |
| 2008 | Takeguchi M, Shimojo M, Furuya K | Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor | Applied Physics A: Materials Science and Processing | 10.1007/s00339-008-4851-1 |
| 2008 | Thurier C, Doppelt P | Platinum OMCVD processes and precursor chemistry | Coordination Chemistry Reviews | 10.1016/j.ccr.2007.04.005 |
| 2008 | Tripathi SK, Shukla N, Kulkarni VN | Substrate atom enriched carbon nanostructures fabricated by focused electron beam induced deposition | Nanotechnology | 10.1088/0957-4484/19/46/465302 |
| 2008 | Utke I, Hoffmann P, Melngailis J | Gas-assisted focused electron beam and ion beam processing and fabrication | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2955728 |
| 2008 | Van Dorp WF, Hagen CW | A critical literature review of focused electron beam induced deposition | Journal of Applied Physics | 10.1063/1.2977587 |
| 2008 | Van Dorp WF, Hagen CW, Crozier PA, Kruit P | Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition | Nanotechnology | 10.1088/0957-4484/19/22/225305 |
| 2008 | Wang YG, Zuo BS, Wang TH, Wang N, Luo ZC, Li DR, Zhou SX | Synthesis and characterization of hydrocarbon coating prepared by in situ electron beam deposition on ZnSe nanowire | Journal of Physical Chemistry C | 10.1021/jp710859j |
| 2008 | Wei XL, Liu Y, Chen Q, Peng LM | Controlling electron-beam-induced carbon deposition on carbon nanotubes by Joule heating | Nanotechnology | 10.1088/0957-4484/19/35/355304 |
| 2008 | Willis M, Alkire R | Preparation of uniform metal seed arrays for nucleation studies | Electrochemical and Solid-State Letters | 10.1149/1.2992705 |
| 2008 | Zalkind S, Yakshinskiy BV, Madey TE | Interaction of benzene with TiO2 surfaces: Relevance to contamination of extreme ultraviolet lithography mirror capping layers | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2978392 |
| 2008 | Zhang W, Liu ZQ, Furuya K | Fabrication and characterization of cellular iron nanocrystalline film | Nanotechnology | 10.1088/0957-4484/19/13/135302 |
| 2008 | Zhang W, Shimojo M, Furuya K | Effect of dynamic precursor gas pressure on growth behavior of amorphous Si-C-O nanorods by electron beam-induced deposition | Journal of Materials Science | 10.1007/s10853-008-2445-0 |
| 2007 | Chang WS, Jeong MS, Kim DC, Kim J | Fabrication of cantilevered tip-on-aperture probe for enhancing resolution of scanning near-field optical microscopy system | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.46.5563 |
| 2007 | Che R, Takeguchi M, Shimojo M, Furuya K | Field electron emission from single carbon nanorod fabricated by electron beam induced deposition | Journal of Physics: Conference Series | 10.1088/1742-6596/61/1/040 |
| 2007 | Che RC, Liang CY, Zhou XG, Shi HL, Feng J, Li JQ | Resistivity and field electron emission of nanowires formed by electron beam induced chemical vapor deposition | Chinese Journal of Chemical Physics | 10.1088/1674-0068/20/06/680-684 |
| 2007 | Choi YR, Rack PD, Frost B, Joy DC | Effect of electron beam-induced deposition and etching under bias | Scanning | 10.1002/sca.20060 |
| 2007 | Crozier PA | Nanoscale oxide patterning with electron-solid-gas reactions | Nano Letters | 10.1021/nl071044+ |
| 2007 | De Angelis F, Das G, Liberale C, Mecarini F, Di Fabrizio E | Fabrication and characterization of plasmonic nanolens for applications in biophotonics | Optics InfoBase Conference Papers | 10.1364/fio.2007.fthi5 |
| 2007 | Dhara S | Formation, dynamics, and characterization of nanostructures by ion beam irradiation | Critical Reviews in Solid State and Materials Sciences | 10.1080/10408430601187624 |
| 2007 | Dobrozemsky R, Menhart S, Buchtela K | Residence times of water molecules on stainless steel and aluminum surfaces in vacuum and atmosphere | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.2718958 |
| 2007 | Ervin MH, Chang D, Nichols B, Wickenden A, Barry J, Melngailis J | Annealing of electron beam induced deposits of platinum from Pt(PF3)4 | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2806978 |
| 2007 | Fatikow S, Eichhorn V, Sill A, Steinecker A, Meyer C, Occhupinti L, Fahlbusch S, Utke I, Bøggild P, Breguet JM, Kaufmann R, Zadrazil M, Barth W | NanoHand: micro/nano system for automatic handling of nano-objects | Optomechatronic Micro/Nano Devices and Components III | 10.1117/12.754400 |
| 2007 | Fedorov AG, Rykaczewski K, White WB | Transport issues in focused electron beam chemical vapor deposition | Surface and Coatings Technology | 10.1016/j.surfcoat.2007.04.031 |
| 2007 | Frabboni S, Gazzadi GC, Spessot A | TEM study of annealed Pt nanostructures grown by electron beam-induced deposition | Physica E: Low-Dimensional Systems and Nanostructures | 10.1016/j.physe.2006.06.018 |
| 2007 | Friedli V, Santschi C, Michler J, Hoffmann P, Utke I | Mass sensor for in situ monitoring of focused ion and electron beam induced processes | Applied Physics Letters | 10.1063/1.2435611 |
| 2007 | Furuya K, Takeguchi M, Mitsuishi K | Iron Nanostructures Fabricated by Electron Beam Induced Deposition and its Magnetic Properties | Solid State Phenomena | 10.4028/www.scientific.net/ssp.124-126.139 |
| 2007 | Gazzadi GC, Frabboni S, Menozzi C | Suspended nanostructures grown by electron beam-induced deposition of Pt and TEOS precursors | Nanotechnology | 10.1088/0957-4484/18/44/445709 |
| 2007 | Graells S, Alcubilla R, Badenes G, Quidant R | Growth of plasmonic gold nanostructures by electron beam induced deposition | Applied Physics Letters | 10.1063/1.2786600 |
| 2007 | Guan YF, Melechko AV, Pedraza AJ, Simpson ML, Rack PD | Non-lithographic organization of nickel catalyst for carbon nanofiber synthesis on laser-induced periodic surface structures | Nanotechnology | 10.1088/0957-4484/18/33/335306 |
| 2007 | Kakefuda Y, Yamashita Y, Mukai K, Yoshinobu J | Fabrication and analysis of buried iron silicide microstructures using a focused low energy electron beam | Surface Science | 10.1016/j.susc.2007.04.148 |
| 2007 | Langford RM, Wang TX, Ozkaya D | Reducing the resistivity of electron and ion beam assisted deposited Pt | Microelectronic Engineering | 10.1016/j.mee.2007.01.055 |
| 2007 | Lemoine P, Roy SS, Quinn JP, Maguire PD, McLaughlin JA | Carbon nanostructures grown with electron and ion beam methods | Applied Physics A: Materials Science and Processing | 10.1007/s00339-006-3806-7 |
| 2007 | Liu ZQ, Mitsuishi K, Furuya K | Fabrication and investigation of tungsten deposit on top and bottom surfaces of thin film substrate | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.46.6254 |
| 2007 | Luxmoore IJ, Ross IM, Cullis AG, Fry PW, Orr J, Buckle PD, Jefferson JH | Low temperature electrical characterisation of tungsten nano-wires fabricated by electron and ion beam induced chemical vapour deposition | Thin Solid Films | 10.1016/j.tsf.2007.02.029 |
| 2007 | Matsui S | Focused-ion-beam deposition for 3-D nanostructure fabrication | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 10.1016/j.nimb.2007.01.077 |
| 2007 | Matsui S, Kometani R | Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition and its applications | IEICE Transactions on Electronics | 10.1093/ietele/e90-c.1.25 |
| 2007 | Mitsuishi K, Noda T, Mano T, Tanaka M, Furuya K, Koguch N | Structure of nanowires fabricated by electron beam induced deposition to connect self-assembled quantum structures | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.46.6277 |
| 2007 | Miyazoe H, Utke I, Michler J, Terashima K | Focused electron beam induced etching and in-situ monitoring: fabrication of sub-beam sized nanoholes | Digest of Papers – Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC | 10.1109/IMNC.2007.4456200 |
| 2007 | Moskalenko AV, Burbridge DJ, Viau G, Gordeev SN | Electron-beam-induced welding of 3D nano-objects from beneath | Nanotechnology | 10.1088/0957-4484/18/2/025304 |
| 2007 | Murakami K, Wakaya F, Takai M | Observation of fringelike electron-emission pattern in field emission from Pt field emitter fabricated by electron-beam-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2756550 |
| 2007 | Perentes A, Hoffmann P | Focused electron beam induced deposition of Si-based materials from SiOxCy to stoichiometric SiO2: Chemical compositions, chemical-etch rates, and deep ultraviolet optical transmissions | Chemical Vapor Deposition | 10.1002/cvde.200606583 |
| 2007 | Perentes A, Hoffmann P | Oxygen assisted focused electron beam induced deposition of Si-containing materials: Growth dynamics | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2798746 |
| 2007 | Perentes A, Hoffmann P, Munnik F | Focused electron beam induced deposition of pure SIO 2 | 23rd European Mask and Lithography Conference | 10.1117/12.736918 |
| 2007 | Perentes A, Sinicco G, Boero G, Dwir B, Hoffmann P | Focused electron beam induced deposition of nickel | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2794071 |
| 2007 | Pomeroy JM, Grube H, Perrella AC, Gillaspy JD | STM and transport measurements of highly charged ion modified materials | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 10.1016/j.nimb.2006.12.193 |
| 2007 | Rack PD, Fowlkes JD, Randolph SJ | In situ probing of the growth and morphology in electron-beam-induced deposited nanostructures | Nanotechnology | 10.1088/0957-4484/18/46/465602 |
| 2007 | Rykaczewski K, White WB, Fedorov AG | Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy | Journal of Applied Physics | 10.1063/1.2437065 |
| 2007 | Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K | Mechanisms of crystalline iron oxide formation in electron beam-induced deposition | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.46.6247 |
| 2007 | Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K | Fabrication of Iron Oxide Nanostructures by Electron Beam-Induced Deposition | Materials Science Forum | 10.4028/www.scientific.net/msf.561-565.1101 |
| 2007 | Smith DA, Fowlkes JD, Rack PD | A nanoscale three-dimensional Monte Carlo simulation of electron-beam-induced deposition with gas dynamics | Nanotechnology | 10.1088/0957-4484/18/26/265308 |
| 2007 | Solá F, Resto O, Biaggi-Labiosa A, Fonseca LF | Electron beam induced growth of silica nanorods and heterostructures in porous silicon | Nanotechnology | 10.1088/0957-4484/18/40/405308 |
| 2007 | Song M, Mitsuishi K, Furuya K | Fabrication of free-standing tungsten-nanowhiskers on SiO2 substrates with electron-beam induced deposition | Materials Transactions | 10.2320/matertrans.MD200717 |
| 2007 | Spoddig D, Schindler K, Rödiger P, Barzola-Quiquia J, Fritsch K, Mulders H, Esquinazi P | Transport properties and growth parameters of PdC and WC nanowires prepared in a dual-beam microscope | Nanotechnology | 10.1088/0957-4484/18/49/495202 |
| 2007 | Stevens-Kalceff MA, Levick KJ | The assessment of microscopic charging effects induced by focused electron and ion beam irradiation of dielectrics | Microscopy Research and Technique | 10.1002/jemt.20399 |
| 2007 | Takeguchi M, Shimojo M, Furuya K | Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.46.6183 |
| 2007 | Tanaka M, Mitsuishi K, Takeguchi M, Shimojo M, Furuya K, Koguchi N | Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.46.6243 |
| 2007 | Toth M, Lobo C, Knowles R, Phillips M, Postek M, Vladar A | Nanostructure Fabrication by Ultra-high Resolution Environmental Scanning Electron Microscopy | Microscopy and Microanalysis | 10.1017/s1431927607075617 |
| 2007 | Toth M, Lobo CJ, Hartigan G, Ralph Knowles W | Electron flux controlled switching between electron beam induced etching and deposition | Journal of Applied Physics | 10.1063/1.2437667 |
| 2007 | Toth M, Lobo CJ, Knowles WR, Phillips MR, Postek MT, Vladár AE | Nanostructure fabrication by ultra-high-resolution environmental scanning electron microscopy | Nano Letters | 10.1021/nl062848c |
| 2007 | Udalagama CN, Bettiol AA, Watt F | A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 10.1016/j.nimb.2007.02.113 |
| 2007 | Utke I, Friedli V, Purrucker M, Michler J | Resolution in focused electron- and ion-beam induced processing | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2789441 |
| 2007 | van Dorp WF, Hagen CW, Crozier PA, Kruit P | In situ monitoring and control of material growth for high resolution electron beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2804603 |
| 2007 | van Dorp WF, Lazar S, Hagen CW, Kruit P | Solutions to a proximity effect in high resolution electron beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2775456 |
| 2007 | Wnuk JD, Gorham JM, Smith BA, Shin M, Fairbrother DH | Quantifying the flux and spatial distribution of atomic hydrogen generated by a thermal source using atomic force microscopy to measure the chemical erosion of highly ordered pyrolytic graphite | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.2731351 |
| 2007 | Yoshikawa Y, Akita S, Nakayama Y | Barrier modification at contacts between carbon nanotube and Pt electrode using well-controlled joule heating | Japanese Journal of Applied Physics, Part 2: Letters | 10.1143/JJAP.46.L359 |
| 2007 | Youn SW, Takahashi M, Goto H, Maeda R | Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques | Journal of Materials Processing Technology | 10.1016/j.jmatprotec.2006.11.120 |
| 2007 | Zhu T, Argyrakis P, Mastropaolo E, Lee KK, Cheung R | Dry etch release processes for micromachining applications | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2794074 |
| 2006 | Barry JD, Ervin M, Molstad J, Wickenden A, Brintlinger T, Hoffman P, Meingailis J | Electron beam induced deposition of low resistivity platinum from Pt(PF3)4 | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2395962 |
| 2006 | Bauerdick S, Linden A, Stampfer C, Helbling T, Hierold C | Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2388965 |
| 2006 | Blackburn AM, Hasko DG, Williams DA | Electron-beam induced deposition of a nanotip within a nano-aperture structure | Microelectronic Engineering | 10.1016/j.mee.2006.01.164 |
| 2006 | Botman A, Mulders JJ, Weemaes R, Mentink S | Purification of platinum and gold structures after electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/17/15/028 |
| 2006 | Bret T, Utke I, Hoffmann P, Abourida M, Doppelt P | Electron range effects in focused electron beam induced deposition of 3D nanostructures | Microelectronic Engineering | 10.1016/j.mee.2006.01.146 |
| 2006 | Che R, Takeguchi M, Shimojo M, Zhang W, Furuya K | Carbon nanostructure on a tungsten needle tip formed by electron beam induced deposition and its graphitization through resistive heating | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.45.5582 |
| 2006 | Chen IC, Chen LH, Orme C, Quist A, Lal R, Jin S | Fabrication of high-aspect-ratio carbon nanocone probes by electron beam induced deposition patterning | Nanotechnology | 10.1088/0957-4484/17/17/007 |
| 2006 | Chen IC, Chen LH, Ye XR, Daraio C, Jin S, Orme CA, Quist A, Lal R | Extremely sharp carbon nanocone probes for atomic force microscopy imaging | Applied Physics Letters | 10.1063/1.2193435 |
| 2006 | Cho SO, Lee EJ, Lee HM, Kim JG, Kim YJ | Controlled synthesis of abundantly branched, hierarchical nanotrees by electron irradiation of polymers | Advanced Materials | 10.1002/adma.200501600 |
| 2006 | Choi YR, Rack PD, Randolph SJ, Smith DA, Joy DC | Pressure effect of growing with electron beam-induced deposition with tungsten hexafluoride and tetraethylorthosilicate precursor | Scanning | 10.1002/sca.4950280603 |
| 2006 | Djenizian T, Balaur E, Schmuki P | Direct immobilization of DNA on diamond-like carbon nanodots | Nanotechnology | 10.1088/0957-4484/17/8/035 |
| 2006 | Djenizian T, Salhi B, Boukherroub R, Schmuki P | Bulk micromachining of silicon using electron-beam-induced carbonaceous nanomasking | Nanotechnology | 10.1088/0957-4484/17/21/013 |
| 2006 | Djenizian T, Schmuki P | Electron beam lithographic techniques and electrochemical reactions for the micro- and nanostructuring of surfaces under extreme conditions | Journal of Electroceramics | 10.1007/s10832-006-0902-1 |
| 2006 | Fischer M, Wanzenboeck HD, Gottsbachner J, Müller S, Brezna W, Schramboeck M, Bertagnolli E | Direct-write deposition with a focused electron beam | Microelectronic Engineering | 10.1016/j.mee.2006.01.035 |
| 2006 | Frabboni S, Gazzadi GC, Felisari L, Spessot A | Fabrication by electron beam induced deposition and transmission electron microscopic characterization of sub- 10-nm freestanding Pt nanowires | Applied Physics Letters | 10.1063/1.2206996 |
| 2006 | Frabboni S, Gazzadi GC, Spessot A | Transmission electron microscopy characterization and sculpting of sub-1 nm Si-O-C freestanding nanowires grown by electron beam induced deposition | Applied Physics Letters | 10.1063/1.2352723 |
| 2006 | Hagen CW, Silvis-Cividjian N, Kruit P | Resolution limit for electron beam-induced deposition on thick substrates | Scanning | 10.1002/sca.4950280402 |
| 2006 | Hu J, Zhou J, Li M, Gao Q, Niou C, Chien KW | Study on the effect of FIB electron beam assisted platinum deposition on TEM sample analysis | Conference Proceedings from the International Symposium for Testing and Failure Analysis | 10.31399/asm.cp.istfa2006p0071 |
| 2006 | Jin CH, Wang JY, Chen Q, Peng LM | In situ fabrication and graphitization of amorphous carbon nanowires and their electrical properties | Journal of Physical Chemistry B | 10.1021/jp057240r |
| 2006 | Kakefuda Y, Yamashita Y, Mukai K, Yoshinobu J | Compact UHV system for fabrication and in situ analysis of electron beam deposited structures using a focused low energy electron beam | Review of Scientific Instruments | 10.1063/1.2198810 |
| 2006 | Kern P, Jäggi C, Utke I, Friedli V, Michler J | Local electron beam induced reduction and crystallization of amorphous titania films | Applied Physics Letters | 10.1063/1.2219398 |
| 2006 | Ketharanathan S, Sharma R, Crozier PA, Drucker J | Electron beam induced deposition of pure, nanoscale Ge | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2178372 |
| 2006 | Li W, Joy DC | Study of temperature influence on electron beam induced deposition | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.2187995 |
| 2006 | Liao Z, Xu J, Jing G, Yu D | Effect of sputtering on depositing platinum by focused ion beam | Chinese Journal of Electronics | |
| 2006 | Liu ZQ, Mitsuishi K, Furuya K | Dynamic Monte Carlo simulation on the electron-beam-induced deposition of carbon, silver, and tungsten supertips | Microscopy and Microanalysis | 10.1017/S1431927606060648 |
| 2006 | Liu ZQ, Mitsuishi K, Furuya K | A dynamic Monte Carlo study of the in situ growth of a substance deposited using electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/17/15/038 |
| 2006 | Liu ZQ, Mitsuishi K, Furuya K | Crystallization of focused-electron-beam deposited tungsten wire on molybdenum substrate | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.45.5548 |
| 2006 | Menzel D | Electronically induced surface chemistry: Localised bond breaking versus delocalisation | Surface and Interface Analysis | 10.1002/sia.2429 |
| 2006 | Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M, Furuya K | Proximity effect in electron-beam-induced deposition | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.45.5517 |
| 2006 | Mitsuishi K, Shimojo M, Tanaka M, Takeguchi M, Song M, Furuya K | TEM sample preparation using a new nanofabrication technique combining electron-beam-induced deposition and low-energy ion milling | Microscopy and Microanalysis | 10.1017/S143192760606065X |
| 2006 | Mitsuishi K, Takeguchi M, Kondo Y, Hosokawa F, Okamoto K, Sannomiya T, Hori M, Iwama T, Kawazoe M, Furuya K | Ultrahigh-vacuum third-order spherical aberration (Cs) corrector for a scanning transmission electron microscope | Cambridge University Press | 10.1017/S1431927606060661 |
| 2006 | Motayed A, Davydov AV, Vaudin MD, Levin I, Melngailis J, Mohammad SN | Fabrication of GaN-based nanoscale device structures utilizing focused ion beam induced Pt deposition | Journal of Applied Physics | 10.1063/1.2215354 |
| 2006 | Oon CH, Khong SH, Boothroyd CB, Thong JT | Characteristics of single metallic nanowire growth via a field-emission induced process | Journal of Applied Physics | 10.1063/1.2181281 |
| 2006 | Perentes A, Bret T, Utke I, Hoffmann P, Vaupel M | Real-time reflectometry-controlled focused-electron-beam-induced deposition of transparent materials | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2170096 |
| 2006 | Randolph SJ, Fowlkes JD, Rack PD | Focused, nanoscale electron-beam-induced deposition and etching | Critical Reviews in Solid State and Materials Sciences | 10.1080/10408430600930438 |
| 2006 | Sato T, Mitsui M, Yamanaka J, Nakagawa K, Aoki Y, Sato S, Miyata C | Formation of microcrystalline silicon and SiNx films by electron-beam-induced-chemical vapor deposition at ultra low temperature | Thin Solid Films | 10.1016/j.tsf.2005.07.333 |
| 2006 | Shimojo M, Takeguchi M, Che R, Zhang W, Tanaka M, Mitsuishi K, Furuya K | Effects of heat treatment on electric properties of nanorods formed by electron beam-induced deposition | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.45.5509 |
| 2006 | Shimojo M, Takeguchi M, Furuya K | Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature | Nanotechnology | 10.1088/0957-4484/17/15/003 |
| 2006 | Singh A, Khandelwal A, Li X, Xing H, Kuno M, Jena D | Field-effect transistors and photodetectors based on solution-synthesized nanowires | Device Research Conference – Conference Digest, DRC | 10.1109/drc.2006.305121 |
| 2006 | Smith DA, Rack PD, Fowlkes JD, Liang T | Understanding the growth mechanisms of electron beam induced deposition via a Monte – Carlo based, 3D growth simulation | 2006 6th IEEE Conference on Nanotechnology IEEE Nano 2006 | 10.1109/nano.2006.247740 |
| 2006 | Takeguchi M, Shimojo M, Che R, Furuya K | Fabrication of a nano-magnet on a piezo-driven tip in a TEM sample holder | Journal of Materials Science | 10.1007/s10853-006-7825-8 |
| 2006 | Takeguchi M, Shimojo M, Mitsuishi K, Tanaka M, Che R, Furuya K | Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties | Journal of Materials Science | 10.1007/s10853-006-0091-y |
| 2006 | Takeguchi M, Shimojo M, Tanaka M, Che R, Zhang W, Furuya K | Electron holographic study of the effect of contact resistance of connected nanowires on resistivity measurement | Surface and Interface Analysis | 10.1002/sia.2403 |
| 2006 | Tanaka M, Chu F, Shimojo M, Takeguchi M, Mitsuishi K, Furuya K | Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams | Journal of Materials Science | 10.1007/s10853-006-7868-x |
| 2006 | Tanaka M, Wagner T, Takeguchi M, Han M, Shimojo M, Mitsuishi K, Furuya K | Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope | Surface and Interface Analysis | 10.1002/sia.2402 |
| 2006 | Toth M, Knowles WR, Hartigan G, Lobo CJ | Electron flux controlled switching between electron beam induced etching and deposition | Microscopy and Microanalysis | 10.1017/S1431927606069753 |
| 2006 | Utke I, Friedli V, Amorosi S, Michler J, Hoffmann P | Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems | Microelectronic Engineering | 10.1016/j.mee.2006.01.136 |
| 2006 | Utke I, Friedli V, Fahlbusch S, Hoffmann S, Hoffmann P, Michler J | Tensile strengths of metal-containing joints fabricated by focused electron beam induced deposition | Advanced Engineering Materials | 10.1002/adem.200500254 |
| 2006 | Utke I, Friedli V, Fahlbusch S, Michler J | Cantilever-based mass and force sensors inside scanning electron microscopes | EMPA Activities | |
| 2006 | Utke I, Friedli V, Michler J, Bret T, Multone X, Hoffmann P | Density determination of focused-electron-beam-induced deposits with simple cantilever-based method | Applied Physics Letters | 10.1063/1.2158516 |
| 2006 | van Dorp WF, Hagen CW, Crozier PA, van Someren B, Kruit P | One nanometer structure fabrication using electron beam induced deposition | Microelectronic Engineering | 10.1016/j.mee.2006.01.155 |
| 2006 | Van Dorp WF, Van Someren B, Hagen CW, Kruit P, Crozier PA | Diffraction patterns of artificial two-dimensional crystals synthesized in situ in an environmental scanning transmission electron microscope | Journal of Microscopy | 10.1111/j.1365-2818.2006.01555.x |
| 2006 | van Dorp WF, van Someren B, Hagen CW, Kruit P, Crozier PA | Statistical variation analysis of sub-5-nm-sized electron-beam-induced deposits | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2170099 |
| 2006 | Wang YG, Wang TH, Lin XW, Dravid VP | Ohmic contact junction of carbon nanotubes fabricated by in situ electron beam deposition | Nanotechnology | 10.1088/0957-4484/17/24/018 |
| 2006 | Wanzenboeck HD, Fischer M, Svagera R, Wernisch J, Bertagnolli E | Custom design of optical-grade thin films of silicon oxide by direct-write electron-beam-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2393245 |
| 2006 | White WB, Rykaczewski K, Fedorov AG | What controls deposition rate in electron-beam chemical vapor deposition? | Physical Review Letters | 10.1103/PhysRevLett.97.086101 |
| 2006 | Wu J, Dong L, Petty J, Pan C, Jiao J | Fabrication and electron microscopy characterization of metal-gated carbon nanotube emitter arrays | International Journal of Nanoscience | 10.1142/s0219581x06004826 |
| 2006 | Xie G, Song M, Furuya K | Fabrication and characterization of Au-nanoparticle/W-nanodendrite structures on Al2O3 substrate | Journal of Materials Science | 10.1007/s10853-006-0148-y |
| 2006 | Xie G, Song M, Mitsuishi K, Furuya K | Characterization of nanometer-sized Pt-dendrite structures fabricated on insulator Al2O3 substrate by electron-beam-induced deposition | Journal of Materials Science | 10.1007/s10853-006-7769-z |
| 2006 | ya Igaki J, Kanda K, Haruyama Y, Ishida M, Ochiai Y, ichi Fujita J, Kaito T, Matsui S | Comparison of FIB-CVD and EB-CVD growth characteristics | Microelectronic Engineering | 10.1016/j.mee.2006.01.105 |
| 2006 | Yeong KS, Law JB, Thong JT | Field-emission-induced growth of nanowire between electrodes | Applied Physics Letters | 10.1063/1.2202733 |
| 2006 | Zhang W, Che R, Takeguchi M, Shimojo M, Furuya K | Formation of Fe-Pt intermetallic phase in nanostructures by electron-beam-induced deposition and postdeposition alloying processes | Surface and Interface Analysis | 10.1002/sia.2410 |
| 2006 | Zhang W, Shimojo M, Takeguchi M, Che RC, Furuya K | Generation mechanism and in situ growth behavior of $\alpha$-iron nanocrystals by electron beam induced deposition | Advanced Engineering Materials | 10.1002/adem.200600026 |
| 2006 | Zhang W, Shimojo M, Takeguchi M, Furuya K | Electron beam-induced formation of nanosized $\alpha$-Fe crystals | Journal of Materials Science | 10.1007/s10853-006-7783-1 |
| 2006 | Zhang Y, Heerkens CT, van Bruggen MJ, Kruit P | Integrated multi-electron-beam blanker array for sub-10-nm electron beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2366677 |
| 2005 | Alexe M, Harnagea C, Hesse D | Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics | Journal of Electroceramics | 10.1007/0-387-23319-9_14 |
| 2005 | Beaulieu D, Ding Y, Wang ZL, Lackey WJ | Influence of process variables on electron beam chemical vapor deposition of platinum | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2050672 |
| 2005 | Boero G, Utke I, Bret T, Quack N, Todorova M, Mouaziz S, Kejik P, Brugger J, Popovic RS, Hoffmann P | Submicrometer Hall devices fabricated by focused electron-beam-induced deposition | Applied Physics Letters | 10.1063/1.1856134 |
| 2005 | Bret T | Phisico-Chemical Study of the Focused Electron Beam Induced Deposition Process | Faculte Sciences et Techniques de l’Ingenieur Section Microtechnique | |
| 2005 | Bret T, Mauron S, Utke I, Hoffmann P | Characterization of focused electron beam induced carbon deposits from organic precursors | Microelectronic Engineering | 10.1016/j.mee.2005.01.006 |
| 2005 | Bret T, Utke I, Hoffmann P | Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures | Microelectronic Engineering | 10.1016/j.mee.2005.01.007 |
| 2005 | Brintlinger T, Fuhrer MS, Melngailis J, Utke I, Bret T, Perentes A, Hoffmann P, Abourida M, Doppelt P | Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2130355 |
| 2005 | Bruk MA, Zhikharev EN, Grigor’ev EI, Spirin AV, Kal’nov VA, Kardash IE | Focused electron beam-induced deposition of iron- and carbon-containing nanostructures from triiron dodecacarbonyl vapor | High Energy Chemistry | 10.1007/s10733-005-0015-4 |
| 2005 | Cai Z, Cloutier P, Hunting D, Sanche L | Comparison between X-ray photon and secondary electron damage to DNA in vacuum | Journal of Physical Chemistry B | 10.1021/jp0459458 |
| 2005 | Che RC, Takeguchi M, Shimojo M, Zhang W, Furuya K | Fabrication and electron holography characterization of FePt alloy nanorods | Applied Physics Letters | 10.1063/1.2136071 |
| 2005 | Cicoira F, Hoffmann P, Olsson CO, Xanthopoulos N, Mathieu HJ, Doppelt P | Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition | Applied Surface Science | 10.1016/j.apsusc.2004.08.005 |
| 2005 | Croitoru MD, Bertsche G, Kern DP, Burkhardt C, Bauerdick S, Şahakalkan S, Roth S | Visualization and in situ contacting of carbon nanotubes in a scanning electron microscope | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2130350 |
| 2005 | Ding W, Dikin DA, Chen X, Piner RD, Ruoff RS, Zussman E, Wang X, Li X | Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor | Journal of Applied Physics | 10.1063/1.1940138 |
| 2005 | Ehrlich C, Edinger K, Boegli V, Kuschnerus P | Application data of the electron beam based photomask repair tool MeRiT MG | 21st European Mask and Lithography Conference | 10.1117/12.637273 |
| 2005 | Fonseca LF, Resto O, Solá F | Electron-beam-induced growth of silicon multibranched nanostructures | Applied Physics Letters | 10.1063/1.2045564 |
| 2005 | Fowlkes JD, Randolph SJ, Rack PD | Growth and simulation of high-aspect ratio nanopillars by primary and secondary electron-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2101732 |
| 2005 | Gazzadi GC, Frabboni S | Fabrication of 5nm gap pillar electrodes by electron-beam Pt deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1872015 |
| 2005 | Hauchard C, Pépin C, Rowntree P | Fe(CO)5 thin films adsorbed on Au(111) and on self-assembled organic monolayers: II. Thermal transformations | Langmuir | 10.1021/la050678y |
| 2005 | Joodaki M, Janus P, Gotszalk T, Kompa G, Edinger K, Rangelow IW | Application of a scanning thermal nano-probe for thermal imaging of high frequency active devices | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.6823 |
| 2005 | Ketharanathan S, Sharma R, Drucker J | Nanoscale electron stimulated chemical vapor deposition of Au in an environmental transmission electron microscope | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2122847 |
| 2005 | Knorovsky GA, MacCallum DO, Holm EA, Michael JR, Semak VV, Nowak-Neely BM | Trends in microwelding | ASM Proceedings of the International Conference: Trends in Welding Research | |
| 2005 | Kwong WY, Zhang WY | Electron-beam assisted platinum deposition as a protective layer for FIB and TEM applications | 10.1109/issm.2005.1513408 | |
| 2005 | Larrieu G, Dubois E | Reactive ion etching of a 20 nanometers tungsten gate using a SF6∕N2 chemistry and hydrogen silsesquioxane hard mask resist | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2050654 |
| 2005 | Li W, Joy D | A Study of Temperature Influence on Electron Beam Induced Deposition | Microscopy and Microanalysis | 10.1017/s1431927605501144 |
| 2005 | Liang T, Frendberg E, Lieberman B, Stivers A | Advanced photolithographic mask repair using electron beams | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2062428 |
| 2005 | Liao ZM, Xun J, Yu P | Electron transport in an array of platinum quantum dots | Physics Letters, Section A: General, Atomic and Solid State Physics | 10.1016/j.physleta.2005.07.036 |
| 2005 | Liu ZQ, Mitsuishi K, Furuya K | Three-dimensional nanofabrication by electron-beam-induced deposition using 200-keV electrons in scanning transmission electron microscope | Applied Physics A: Materials Science and Processing | 10.1007/s00339-004-2999-x |
| 2005 | Liu ZQ, Mitsuishi K, Furuya K | Crystallization of focused-electron-beam deposited tungsten wire on molybdenum substrate | Digest of Papers – Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference | 10.1109/imnc.2005.203792 |
| 2005 | Liu ZQ, Mitsuishi K, Furuya K | Modeling the process of electron-beam-induced deposition by dynamic Monte Carlo simulation | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5659 |
| 2005 | Lu J, Kopley TE, Hueschen M, Moll N, Bai J, Yang D, Fu Q, Liu J, Rider D, Manners I, Winnik MA | Single-walled carbon nanotubes with small diameter, controlled density and defined locations produced from catalyst-containing polymer films | 2005 NSTI Nanotechnology Conference and Trade Show – NSTI Nanotech 2005 Technical Proceedings | |
| 2005 | Luisier A, Utke I, Bret T, Cicoira F, Hauert R, Rhee SW, Doppelt P, Hoffmann P | Comparative Study of Cu-Precursors for 3D Focused Electron Beam Induced Deposition [J. Electrochem. Soc., 151, C535 (2004)] [J. Electrochem. Soc., 151, C590 (2004)] | Journal of The Electrochemical Society | 10.1149/1.1839579 |
| 2005 | Mitsuishi K, Liu ZQ, Shimojo M, Han M, Furuya K | Dynamic profile calculation of deposition resolution by high-energy electrons in electron-beam-induced deposition | Ultramicroscopy | 10.1016/j.ultramic.2004.11.011 |
| 2005 | Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M, Furuya K | On proximity effect in electron beam induced deposition | Digest of Papers – Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference | 10.1109/imnc.2005.203784 |
| 2005 | Mitsuishi K, Shimojo M, Tanaka M, Takeguchi M, Furuya K | Resolution in new nanofabrication technique combining electron-beam-induced deposition and low-energy ion milling | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5627 |
| 2005 | Mølhave K, Madsen DN, Bøggild P | A simple electron-beam lithography system | Ultramicroscopy | 10.1016/j.ultramic.2004.09.011 |
| 2005 | Mukawa T, Okada S, Kobayashi R, Fujita JI, Ishida M, Ichihashi T, Ochiai Y, Kaito T, Matsui S | Position-controlled carbon fiber growth catalyzed using electron beam-induced chemical vapor deposition ferrocene nanopillars | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5639 |
| 2005 | Mukawa T, Okada S, Kobayashi R, Ishida M, Ichihashi T, Ochiai Y, Matsui S, Fujita JI | Position-controlled carbon nanotube growth on single iron nanoparticles prepared by electron beam-induced chemical vapor deposition | Digest of Papers – Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference | 10.1109/imnc.2005.203721 |
| 2005 | Murakami K, Yamasaki N, Abo S, Wakaya F, Takai M | Effect of thermal annealing on emission characteristics of nanoelectron source fabricated using beam-assisted process | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1884117 |
| 2005 | Nishio M, Sawaya S, Akita S, Nakayama Y | Carbon nanotube oscillators toward zeptogram detection | Applied Physics Letters | 10.1063/1.1896426 |
| 2005 | Nishio M, Sawaya S, Akita S, Nakayama Y | Density of electron-beam-induced amorphous carbon deposits | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2037687 |
| 2005 | Okada S, Mukawa T, Kobayashi R, Fujita JI, Ishida M, Ichihashi T, Ochiai Y, Kaito T, Matsui S | Growth manner and mechanical characteristics of amorphous carbon nanopillar grown by electron-beam-induced chemical vapor deposition | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5646 |
| 2005 | Okada S, Mukawa T, Kobayashi R, Ishida M, Ochiai Y, Kaito T, Matsui S, Fujita JI | Comparison of Young’s modulus dependency on beam accelerating voltage between EB- and FIB-CVD pillars | Digest of Papers – Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference | 10.1109/imnc.2005.203824 |
| 2005 | Pang W, Yu H, Zhang H, Kim ES | Temperature-compensated film bulk acoustic resonator above 2 GHz | IEEE Electron Device Letters | 10.1109/LED.2005.848113 |
| 2005 | Prestigiacomo M, Bedu F, Jandard F, Tonneau D, Dallaporta H, Roussel L, Sudraud P | Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition | Applied Physics Letters | 10.1063/1.1927714 |
| 2005 | Randolph SJ, Fowlkes JD, Rack PD | Effects of heat generation during electron-beam-induced deposition of nanostructures | Journal of Applied Physics | 10.1063/1.1942627 |
| 2005 | Randolph SJ, Fowlkes JD, Rack PD | Focused electron-beam-induced etching of silicon dioxide | Journal of Applied Physics | 10.1063/1.1991976 |
| 2005 | Rotkina L, Oh S, Eckstein JN, Rotkin SV | Logarithmic behavior of the conductivity of electron-beam deposited granular Pt C nanowires | Physical Review B – Condensed Matter and Materials Physics | 10.1103/PhysRevB.72.233407 |
| 2005 | Sellmair J, Edinger K, Koops HW | Investigation of a microtriode with a planar field emitter-extractor source fabricated by direct-write nanolithography using electron beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1875332 |
| 2005 | Sharma R | An environmental transmission electron microscope for in situ synthesis and characterization of nanomaterials | Journal of Materials Research | 10.1557/JMR.2005.0241 |
| 2005 | Shimojo M, Bysakh S, Mitsuishi K, Tanaka M, Song M, Furuya K | Selective growth and characterization of nanostructures with transmission electron microscopes | Applied Surface Science | 10.1016/j.apsusc.2004.09.016 |
| 2005 | Shimojo M, Mitsuishi K, Tanaka M, Song M, Furuya K | Electron Beam-Induced Nano-Deposition Using a Transmission Electron Microscope | Materials Science Forum | 10.4028/www.scientific.net/msf.480-481.129 |
| 2005 | Shimojo M, Zhang W, Takeguchi M, Tanaka M, Mitsuishi K, Furuya K | Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5651 |
| 2005 | Silvis-Cividjian N, Hagen CW, Kruit P | Spatial resolution limits in electron-beam-induced deposition | Journal of Applied Physics | 10.1063/1.2085307 |
| 2005 | Song M, Mitsuishi K, Furuya K | Crystallization under 1 MeV electron beam irradiation of nanometer-sized W-dendrites fabricated on alumina substrates with electron-beam-induced deposition | Materials Science Forum | 10.4028/0-87849-960-1.4035 |
| 2005 | Song M, Mitsuishi K, Tanaka M, Takeguchi M, Shimojo M, Furuya K | Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition | Applied Physics A: Materials Science and Processing | 10.1007/s00339-004-2997-z |
| 2005 | Sun YM, Wang S, White JM, Stivers A, Liang T | Electron-assisted chemical etching of oxidized chromium | Applied Surface Science | 10.1016/j.apsusc.2004.11.090 |
| 2005 | Takeguchi M, Shimojo M, Furuya K | Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition | Nanotechnology | 10.1088/0957-4484/16/8/057 |
| 2005 | Takeguchi M, Shimojo M, Furuya K | Fabrication of alpha-iron and iron carbide nanostructures by electron-beam induced chemical vapor deposition and postdeposition heat treatment | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5631 |
| 2005 | Tanaka M, Chu F, Shimojo M, Takeguchi M, Mitsuishi K, Furuya K | Position- and size-controlled fabrication of iron silicide nanorods by electron-beam-induced deposition using an ultrahigh-vacuum transmission electron microscope | Applied Physics Letters | 10.1063/1.1922576 |
| 2005 | Tanaka M, Han M, Takeguchi M, Chu F, Shimojo M, Mitsuishi K, Furuya K | Morphology of iron silicide nanorods formed by electron-beam-induced deposition using ultrahigh-vacuum transmission electron microscope | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5635 |
| 2005 | Tanaka M, Shimojo M, Han M, Mitsuishi K, Furuya K | Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope | Surface and Interface Analysis | 10.1002/sia.1978 |
| 2005 | Tondare VN | Quest for high brightness, monochromatic noble gas ion sources | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.2101792 |
| 2005 | Tsukatani Y, Yamasaki N, Murakami K, Wakaya F, Takai M | Transport properties of Pt nanowires fabricated by beam-induced deposition | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.44.5683 |
| 2005 | Utke I, Michler J, Gasser P, Santschi C, Laub D, Canton M, Buffat PA, Jiao C, Hoffmann P | Cross section investigations of compositions and sub-structures of tips obtained by focused electron beam induced deposition | Advanced Engineering Materials | 10.1002/adem.200500061 |
| 2005 | van Bruggen MJ, van Someren B, Kruit P | Development of a multi-electron-beam source for sub-10nm electron beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.2091087 |
| 2005 | van Dorp WF, van Someren B, Hagen CW, Kruit P, Crozier PA | Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition | Nano Letters | 10.1021/nl050522i |
| 2005 | Wang M, Wang J, Chen Q, Peng LM | Fabrication and electrical and mechanical properties of carbon nanotube interconnections | Advanced Functional Materials | 10.1002/adfm.200500215 |
| 2005 | Wang S, Sun YM, White JM | Electron induced deposition and in situ etching of CrO x Cl y films | Applied Surface Science | 10.1016/j.apsusc.2004.11.060 |
| 2005 | Wang S, Sun YM, White JM, Stivers A, Liang T | Electron-beam-assisted etching of CrOx films by Cl2 | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1848107 |
| 2005 | Xie G, Song M, Mitsuishi K, Furuya K | Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition | Physica E: Low-Dimensional Systems and Nanostructures | 10.1016/j.physe.2005.06.028 |
| 2005 | Xie G, Song M, Mitsuishi K, Furuya K | Growth of tungsten nanodendrites on SiO 2 substrate using electron-beam-induced deposition | Journal of Nanoscience and Nanotechnology | 10.1166/jnn.2005.075 |
| 2005 | Xu S, Tian M, Wang J, Xu J, Redwing JM, Chan MH | Nanometer-scale modification and welding of silicon and metallic nanowires with a high-intensity electron beam | Small | 10.1002/smll.200500240 |
| 2005 | Xu S, Tian M, Wang J, Xu J, Redwing JM, Chan MH | Cover Picture: Nanometer‐Scale Modification and Welding of Silicon and Metallic Nanowires with a High‐Intensity Electron Beam (Small 12/2005) | Small | 10.1002/smll.200590035 |
| 2005 | Yang X, Simpson ML, Randolph SJ, Rack PD, Baylor LR, Cui H, Gardner WL | Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition | Applied Physics Letters | 10.1063/1.1922568 |
| 2004 | Allameh SM, Yao N, Soboyejo WO | Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition | Scripta Materialia | 10.1016/j.scriptamat.2003.05.001 |
| 2004 | Arai F, Liu P, Dong L, Fukuda T | Field Emission Properties of Individual Carbon Nanotubes in Nanorobotic Manipulation and Electron-Beam-Induced Deposition | Journal of Robotics and Mechatronics | 10.20965/jrm.2004.p0597 |
| 2004 | Balog R, Langer J, Gohlke S, Stano M, Abdoul-Carime H, Illenberger E | Low energy electron driven reactions in free and bound molecules: From unimolecular processes in the gas phase to complex reactions in a condensed environment | International Journal of Mass Spectrometry | 10.1016/j.ijms.2003.12.030 |
| 2004 | Bauerdick S, Burkhardt C, Kern DP, Nisch W | Addressable field emitter array: A tool for designing field emitters and a multibeam electron source | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1824050 |
| 2004 | Bret T, Utke I, Gaillard C, Hoffmann P | Periodic structure formation by focused electron-beam-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1800356 |
| 2004 | Cicoira F, Leifer K, Hoffmann P, Utke I, Dwir B, Laub D, Buffat PA, Kapon E, Doppelt P | Electron beam induced deposition of rhodium from the precursor [RhCl(PF3)2]2: Morphology, structure and chemical composition | Journal of Crystal Growth | 10.1016/j.jcrysgro.2004.02.006 |
| 2004 | Clendenning SB, Aouba S, Rayat MS, Grozea D, Sorge JB, Brodersen PM, Sodhi RN, Lu ZH, Yip CM, Freeman MR, Ruda HE, Manners I | Direct writing of patterned ceramics using electron-beam lithography and metallopolymer resists | Advanced Materials | 10.1002/adma.200305740 |
| 2004 | Crozier PA, Tolle J, Kouvetakis J, Ritter C | Synthesis of uniform GaN quantum dot arrays via electron nanolithography of D2GaN3 | Microscopy and Microanalysis | 10.1017/S1431927604887336 |
| 2004 | De Vittorio M, Todaro MT, Stomeo T, Cingolani R, Cojoc D, Di Fabrizio E | Two-dimensional photonic crystal waveguide obtained by e-beam direct writing of SU8-2000 photoresist | Microelectronic Engineering | 10.1016/j.mee.2004.02.075 |
| 2004 | Djenizian T, Santinacci L, Schmuki P | Factors in Electrochemical Nanostructure Fabrication Using Electron-Beam Induced Carbon Masking | Journal of The Electrochemical Society | 10.1149/1.1643744 |
| 2004 | Dylewicz R, Czarnecki P, Myśliwiec J, Miniewicz A, Patela S | Photonic crystal waveguide – Fabrication of the periodic arrays by visible light holographic technique coupled with electron beam-induced deposition | Proceedings of 2004 6th International Conference on Transparent Optical Networks | 10.1109/icton.2004.1362018 |
| 2004 | Edinger K, Becht H, Bihr J, Boegli V, Budach M, Hofmann T, Koops HW, Kuschnerus P, Oster J, Spies P, Weyrauch B | Electron-beam-based photomask repair | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1808711 |
| 2004 | Fujita JI, Ishida M, Ichihashi T, Ochiai Y, Kaito T, Matsui S | Graphitized wavy traces of iron particles observed in amorphous carbon nano-pillars | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.43.3799 |
| 2004 | Gopal V, Radmilovic VR, Daraio C, Jin S, Yang P, Stach EA | Rapid prototyping of site-specific nanocontacts by electron and ion beam assisted direct-write nanolithography | Nano Letters | 10.1021/nl0492133 |
| 2004 | Gopal V, Stach EA, Radmilovic VR, Mowat IA | Metal delocalization and surface decoration in direct-write nanolithography by electron beam induced deposition | Applied Physics Letters | 10.1063/1.1765736 |
| 2004 | Guan YF, Pedraza AJ, Fowlkes JD, Joy DA | Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1821576 |
| 2004 | Guise O, Ahner J, Yates J, Levy J | Formation and thermal stability of sub-10-nm carbon templates on Si(100) | Applied Physics Letters | 10.1063/1.1794369 |
| 2004 | Guise O, Marbach H, Levy J, Ahner J, Yates JT | Electron-beam-induced deposition of carbon films on Si(100) using chemisorbed ethylene as a precursor molecule | Surface Science | 10.1016/j.susc.2004.07.053 |
| 2004 | Han M, Mitsuishi K, Shimojo M, Furuya K | Nanostructure characterization of tungsten-containing nanorods deposited by electron-beam-induced chemical vapour decomposition | Philosophical Magazine | 10.1080/14786430310001646772 |
| 2004 | Ichihashi T, Fujita JI, Ishida M, Ochiai Y | In situ observation of carbon-nanopillar tubulization caused by liquidlike iron particles | Physical Review Letters | 10.1103/PhysRevLett.92.215702 |
| 2004 | Ishida M, Hongo H, Nihey F, Ochiai Y | Diameter-controlled carbon nanotubes grown from lithographically defined nanoparticles | Japanese Journal of Applied Physics, Part 2: Letters | 10.1143/JJAP.43.L1356 |
| 2004 | Jiang S, Tang L, Wang J | Focused ion beam induced metalorganic chemical vapor deposition of C-Pt thin film | Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | |
| 2004 | Kindt JH, Fantner GE, Thompson JB, Hansma PK | Automated wafer-scale fabrication of electron beam deposited tips for atomic force microscopes using pattern recognition | Nanotechnology | 10.1088/0957-4484/15/9/005 |
| 2004 | Klemberg-Sapieha JE, Oberste-Berghaus J, Martinu L, Blacker R, Stevenson I, Sadkhin G, Morton D, McEldowney S, Klinger R, Martin PJ, Court N, Dligatch S, Gross M, Netterfield RP | Mechanical characteristics of optical coatings prepared by various techniques: A comparative study | Applied Optics | 10.1364/AO.43.002670 |
| 2004 | Kometani R, Hoshino T, Kondo K, Kanda K, Haruyama Y, Kaito T, Fujita JI, Ishida M, Ochiai Y, Matsui S | Characteristics of nano-electrostatic actuator fabricated by focused ion beam chemical vapor deposition | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/JJAP.43.7187 |
| 2004 | Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T | Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1689310 |
| 2004 | Li P, Egerton RF | Radiation damage in coronene, rubrene and p-terphenyl, measured for incident electrons of kinetic energy between 100 and 200 kev | Ultramicroscopy | 10.1016/j.ultramic.2004.05.010 |
| 2004 | Liang T, Frendberg E, Bald DJ, Penn M, Stivers AR | E-beam mask repair: fundamental capability and applications | 24th Annual BACUS Symposium on Photomask Technology | 10.1117/12.569210 |
| 2004 | Liang T, Stivers AR, Penn M, Bald D, Sethi C, Boegli V, Budach M, Edinger K, Spies P | Demonstration of damage-free mask repair using electron beam-induced processes | Photomask and Next-Generation Lithography Mask Technology XI | 10.1117/12.557788 |
| 2004 | Liao ZM, Xu J, Jing GY, Yu DP | Effect of sputtering on depositing platinum by focused ion beam | International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT | 10.1109/icsict.2004.1435286 |
| 2004 | Liu ZQ, Mitsuishi K, Furuya K | Features of self-supporting tungsten nanowire deposited with high-energy electrons | Journal of Applied Physics | 10.1063/1.1755434 |
| 2004 | Liu ZQ, Mitsuishi K, Furuya K | The growth behavior of self-standing tungsten tips fabricated by electron-beam-induced deposition using 200 keV electrons | Journal of Applied Physics | 10.1063/1.1788844 |
| 2004 | Liu ZQ, Mitsuishi K, Furuya K | Effects of focus change on the fabrication of tungsten nanowire by electron-beam-induced deposition | Nanotechnology | 10.1088/0957-4484/15/6/019 |
| 2004 | Luisier A, Utke I, Bret T, Cicoira F, Hauert R, Rhee SW, Doppelt P, Hoffmann P | Comparative Study of Cu Precursors for 3D Focused Electron Beam Induced Deposition | Journal of The Electrochemical Society | 10.1149/1.1765680 |
| 2004 | Luisier A, Utke I, Bret T, Cicoira F, Hauert R, Rhee SW, Doppelt P, Hoffmann P | Comparative Study of Cu-Precursors for 3D Focused Electron Beam Induced Deposition | Journal of The Electrochemical Society | 10.1149/1.1779335 |
| 2004 | Mitsuishi K, Shimojo M, Tanaka M, Takeguchi M, Furuya K | Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling | Digest of Papers – Microprocesses and Nanotechnology | 10.1109/imnc.2004.245752 |
| 2004 | Mølhave K, Hansen TM, Madsen DN, Bøggild P | Towards pick-and-place assembly of nanostructures | Journal of Nanoscience and Nanotechnology | 10.1166/jnn.2004.025 |
| 2004 | Mølhave K, Madsen DN, Dohn S, Bøggild P | Constructing, connecting and soldering nanostructures by environmental electron beam deposition | Nanotechnology | 10.1088/0957-4484/15/8/033 |
| 2004 | Murakami K, Yamasaki N, Abo S, Wakaya F, Takai M | Observation of electron emission pattern from nano-split emitter fabricated using beam assisted process | Technical Digest of the 17th International Vacuum Nanoelectronics Conference, IVNC 2004 | 10.1116/1.1875372 |
| 2004 | Nakamatsu KI, Kometani R, Monta T, Kaito T, Fujita JI, Ochiai Y, Ichihashi T, Tajima T, Matsui S | Evaluation of metal-insulator-metal free-space-wiring fabricated by FIB-CVD | Digest of Papers – Microprocesses and Nanotechnology 2004 | 10.1109/imnc.2004.245730 |
| 2004 | Okada S, Mukawa T, Kobayashi R, Fujita J, Ishida M, Ichihashi T, Ochiai Y, Kaito T, Matsui S | Growth manner and mechanical characteristics of amorphous carbon nanopillar grown by EB-CVD | Digest of Papers – Microprocesses and Nanotechnology 2004 | 10.1109/imnc.2004.245721 |
| 2004 | Oster J, Huth M, Wiehl L, Adrian H | Growth of Fe nanostructures | Journal of Magnetism and Magnetic Materials | 10.1016/j.jmmm.2003.12.545 |
| 2004 | Panja C, Samano EC, Saliba NA, Koel BE | Probing the chemistry of CH3I on Pt-Sn alloys | Surface Science | 10.1016/j.susc.2003.11.038 |
| 2004 | Perentes A, Bachmann A, Leutenegger M, Utke I, Sandu C, Hoffmann P | Focused electron beam induced deposition of a periodic transparent nano-optic pattern | Microelectronic Engineering | 10.1016/j.mee.2004.02.079 |
| 2004 | Shimojo M, Mitsuishi K, Tameike A, Furuya K | Electron induced nanodeposition of tungsten using field emission scanning and transmission electron microscopes | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1688349 |
| 2004 | Shimojo M, Mitsuishi K, Tanaka M, Han M, Furuya K | Application of transmission electron microscopes to nanometre-sized fabrication by means of electron beam-induced deposition | Journal of Microscopy | 10.1111/j.0022-2720.2004.01307.x |
| 2004 | Shimojo M, Takeguchi M, Tanaka M, Mitsuishi K, Furuya K | Electron beam-induced deposition using iron carbonyl and the effects of heat treatment on nanostructure | Applied Physics A: Materials Science and Processing | 10.1007/s00339-004-2952-z |
| 2004 | Takeguchi M, Shimojo M, Mitsuishi K, Tanaka M, Furuya K | Nanostructures fabricated by electron beam induced chemical vapor deposition | Superlattices and Microstructures | 10.1016/j.spmi.2004.08.038 |
| 2004 | Takeguchi M, Shimojo M, Mitsuishi K, Tanaka M, Furuya K | Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas | Digest of Papers – Microprocesses and Nanotechnology 2004 | 10.1109/imnc.2004.245723 |
| 2004 | Tanaka A, Yoon SH, Mochida I | Formation of fine Fe-Ni particles for the non-supported catalytic synthesis of uniform carbon nanofibers | Carbon | 10.1016/j.carbon.2004.01.029 |
| 2004 | Tanaka M, Shimojo M, Mitsuishi K, Furuya K | The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor | Applied Physics A: Materials Science and Processing | 10.1007/s00339-003-2394-z |
| 2004 | Tsukatani Y, Yamasaki N, Murakami K, Wakaya F, Takai M | Transport properties of Pt nanowires fabricated by beam induced deposition | Japanese Journal of Applied Physics | 10.1109/imnc.2004.245731 |
| 2004 | Ueda K, Yoshimura M | Fabrication of nanofigures by focused electron beam-induced deposition | Thin Solid Films | 10.1016/j.tsf.2004.06.078 |
| 2004 | Utke I, Bret T, Laub D, Buffat P, Scandella L, Hoffmann P | Thermal effects during focused electron beam induced deposition of nanocomposite magnetic-cobalt-containing tips | Microelectronic Engineering | 10.1016/j.mee.2004.02.084 |
| 2004 | Wang S, Sun YM, Wang Q, White JM | Electron-beam induced initial growth of platinum films using Pt(PF3)4 | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1761266 |
| 2004 | Xie GQ, Song M, Mitsuishi K, Furuya K | Selective tungsten deposition into ordered nanohole arrays of anodic porous alumina by electron-beam-induced deposition | Applied Physics A: Materials Science and Processing | 10.1007/s00339-004-2926-1 |
| 2003 | Arai F, Liu P, Dong L, Nakajima M, Fukuda T | Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters | Proceedings of the IEEE Conference on Nanotechnology | 10.1109/NANO.2003.1231038 |
| 2003 | Bauerdick S, Burkhardt C, Kern DP, Nisch W | Substrate-integrated microelectrodes with improved charge transfer capacity by 30-dimensional micro-fabrication | Biomedical Microdevices | 10.1023/A:1024526626016 |
| 2003 | Bauerdick S, Burkhardt C, Rudorf R, Barth W, Bucher V, Nisch W | In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope | Microelectronic Engineering | 10.1016/S0167-9317(03)00160-6 |
| 2003 | Bret T, Utke I, Bachmann A, Hoffmann P | In situ control of the focused-electron-beam-induced deposition process | Applied Physics Letters | 10.1063/1.1626261 |
| 2003 | Djenizian T, Santinacci L, Hildebrand H, Schmuki P | Electron beam induced carbon deposition used as a negative resist for selective porous silicon formation | Surface Science | 10.1016/S0039-6028(02)02545-1 |
| 2003 | Edinger K, Becht H, Becker R, Bert V, Boegli VA, Budach M, G÷hde S, Guyot J, Hofmann T, Hoinkis O, Kaya A, Koops HW, Spies P, Weyrauch B, Bihr J | A novel electron-beam-based photomask repair tool | 23rd Annual BACUS Symposium on Photomask Technology | 10.1117/12.532866 |
| 2003 | Faradzhev NS, Kusmierek DO, Yakshinskiy BV, Madey TE | Effects of electron irradiation on structure and bonding of SF6 on Ru(0001) | Low Temperature Physics | 10.1063/1.1542442 |
| 2003 | Fowlkes JD, Pedraza AJ | Si nanoparticle synthesis and self-organization | Materials Research Society Symposium – Proceedings | 10.1557/proc-737-f5.7 |
| 2003 | Fujita J, Ishida M, Ichihashi T, Ochiai Y, Kaito T, Matsui S | Graphitized wavy traces of iron particles observed in amorphous carbon nano-pillars | Digest of Papers – Microprocesses and Nanotechnology 2003 – 2003 International Microprocesses and Nanotechnology Conference, MNC 2003 | 10.1109/IMNC.2003.1268526 |
| 2003 | Fujita J, Ishida M, Ichihashi T, Ochiai Y, Kaito T, Matsui S | Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1624259 |
| 2003 | Fukuda T, Arai F, Dong L | Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations | Proceedings of the IEEE | 10.1109/JPROC.2003.818334 |
| 2003 | Furuya K, Mitsuishi K, Shimojo M, Takeguchi M | Position and size controlled fabrication of nano-metals and -semiconductors with fine focused electron beam | Reviews on Advanced Materials Science | |
| 2003 | Hashizume T, Ootomo S, Inagaki T, Hasegawa H | Surface passivation of GaN and GaN/AlGaN heterostructures by dielectric films and its application to insulated-gate heterostructure transistors | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1585077 |
| 2003 | Jarupoonphol W, Murakami K, Sakata K, Takai M, Hosono A, Okuda S | Optimization of Pt tip field emitter array fabricated using focused ion and electron beams | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1569932 |
| 2003 | Koops HW | Rapid prototyping and structure generation using three-dimensional nanolithography with electron-beam-induced chemical reactions | Smart Sensors, Actuators, and MEMS | 10.1117/12.500603 |
| 2003 | Lehrer C, Frey L, Schäfer M, Sulzbach T, Petersen S, Ryssel H | Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams | Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC | 10.1109/IVMC.2003.1222992 |
| 2003 | Luisier A | Comparative study of Cu-precursors for 3D focused electron beam-induced deposition | Microelectronic Engineering | 10.1016/s0167-9317(03)00171-0 |
| 2003 | Madsen DN, Mølhave K, Mateiu R, Bøggild P, Rasmussen AM, Appel CC, Brorson M, Jacobsen CJ | Nanoscale soldering of positioned carbon nanotubes using highly conductive electron beam induced gold deposition | Proceedings of the IEEE Conference on Nanotechnology | 10.1109/NANO.2003.1231786 |
| 2003 | Madsen DN, Moølhave K, Mateiu R, Rasmussen AM, Brorson M, Jacobsen CJ, Bøggild P | Soldering of nanotubes onto microelectrodes | Nano Letters | 10.1021/nl0257972 |
| 2003 | Mitsuishi K, Shimojo M, Han M, Furuya K | Electron-beam-induced deposition using a subnanometer-sized probe of high-energy electrons | Applied Physics Letters | 10.1063/1.1611274 |
| 2003 | Mølhave K, Madsen DN, Rasmussen AM, Carlsson A, Appel CC, Brorson M, Jacobsen CJ, Bøggild P | Solid Gold Nanostructures Fabricated by Electron Beam Deposition | Nano Letters | 10.1021/nl034528o |
| 2003 | Murakami K, Jarupoonphol W, Sakata K, Takai M | Fabrication of nano electron source using beam-assisted process | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/jjap.42.4037 |
| 2003 | Murakami K, Takai M | Characteristics of nano electron source fabricated using beam assisted process | Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC | 10.1109/IVMC.2003.1222967 |
| 2003 | Rack PD, Randolph S, Deng Y, Fowlkes J, Choi Y, Joy DC | Nanoscale electron-beam-stimulated processing | Applied Physics Letters | 10.1063/1.1565696 |
| 2003 | Rack PD, Thesen A, Randolph S, Fowlkes JD, Joy DC | Soft electron beam etching for precision TEM sample preparation | Metrology, Inspection, and Process Control for Microlithography XVII | 10.1117/12.482822 |
| 2003 | Ray V, Antoniou N, Krechmer A, Saxonis A | Improvements of Secondary Electron Imaging and Endpoint Detection in Focused Ion Beam Circuit Modification | Conference Proceedings from the International Symposium for Testing and Failure Analysis | 10.31399/asm.cp.istfa2003p0338 |
| 2003 | Rotkina L, Lin JF, Bird JP | Nonlinear current-voltage characteristics of Pt nanowires and nanowire transistors fabricated by electron-beam deposition | Applied Physics Letters | 10.1063/1.1629382 |
| 2003 | Ruderisch A, Sailer H, Schurig V, Kern DP | Studies on sensitivity and etching resistance of calix[4]arene derivatives as negative tone electron beam resists | Microelectronic Engineering | 10.1016/S0167-9317(03)00081-9 |
| 2003 | Seuret P, Cicoira F, Ohta T, Doppelt P, Hoffmann P, Weber J, Wesolowski TA | An experimental and theoretical study of [RhCl(PF3)2]2 fragmentation | Physical Chemistry Chemical Physics | 10.1039/b206731e |
| 2003 | Sharma R, Crozier PA, Marx R, Weiss K | An environmental transmission electron microscope for in-situ observation of chemical processes at the nanometer level | Microscopy and Microanalysis | 10.1017/s1431927603444565 |
| 2003 | Silvis-Cividjian N, Hagen CW, Kruit P, Stam MA, Groen HB | Direct fabrication of nanowires in an electron microscope | Applied Physics Letters | 10.1063/1.1575506 |
| 2003 | Smith S, Walton AJ, Bond S, Ross AW, Stevenson JT, Gundlach AM | Electrical characterization of platinum deposited by focused ion beam | IEEE Transactions on Semiconductor Manufacturing | 10.1109/TSM.2003.811580 |
| 2003 | Takai M, Jarupoonphol W, Ochiai C, Yavas O, Park YK | Processing of vacuum microelectronic devices by focused ion and electron beams | Applied Physics A: Materials Science and Processing | 10.1007/s00339-002-1941-3 |
| 2003 | Thong JT, Oon CH, Yeadon M, Zhang WD | Field-emission induced growth of nanowires | Applied Physics Letters | 10.1063/1.1529084 |
| 2003 | Tseng AA, Chen K, Chen CD, Ma KJ | Electron beam lithography in nanoscale fabrication: Recent development | IEEE Transactions on Electronics Packaging Manufacturing | 10.1109/TEPM.2003.817714 |
| 2003 | Wang J, Griffis DP, Garcia R, Russell PE | Etching characteristics of chromium thin films by an electron beam induced surface reaction | Semiconductor Science and Technology | 10.1088/0268-1242/18/4/302 |
| 2002 | Akita S, Nakayama Y | Manipulation of nanomaterial by carbon nanotube nanotweezers in scanning probe microscope | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/jjap.41.4242 |
| 2002 | Chen X, Morimoto A, Nagai K, Kumeda M, Shimizu T | Electron-beam-induced nucleation centers and selective deposition of thin zinc films | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/jjap.41.775 |
| 2002 | Djenizian T, Macak J, Schmuki P | Selective titanium oxide formation using electron-beam induced carbon deposition technique | Materials Research Society Symposium – Proceedings | 10.1557/proc-741-j4.5 |
| 2002 | Dong L, Arai F, Fukuda T | Electron-beam-induced deposition with carbon nanotube emitters | Applied Physics Letters | 10.1063/1.1504486 |
| 2002 | Dong LX, Arai F, Fukuda T | Nanofabrications with Electron-Beam-Induced Deposition through Carbon Nanotube Emitters | The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec) | 10.1299/jsmermd.2002.30_3 |
| 2002 | Edgcombe CJ, Valdrè U | Experimental and computational study of field emission characteristics from amorphous carbon single nanotips grown by carbon contamination. I. Experiments and computation | Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties | 10.1080/13642810208218357 |
| 2002 | Floreani F, Koops HW, Elsäßer W | Concept of a miniaturised free-electron laser with field emission source | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 10.1016/S0168-9002(02)00367-4 |
| 2002 | Guzman L, Miotello A, Checchetto R, Adami M | Ion beam-induced enhanced adhesion of gold films deposited on glass | Surface and Coatings Technology | 10.1016/S0257-8972(02)00306-7 |
| 2002 | Hoffmann P, Utke I, Cicoira F | Limits of 3D nanostructures fabricated by focused electron beam (FEB) induced deposition | Proceedings of SPIE – The International Society for Optical Engineering | 10.1117/12.510421 |
| 2002 | Jänchen G, Hoffmann P, Kriele A, Lorenz H, Kulik AJ, Dietler G | Mechanical properties of high-aspect-ratio atomic-force microscope tips | Applied Physics Letters | 10.1063/1.1485307 |
| 2002 | Jarupoonphol W, Ochiai C, Takai M, Hosono A, Okuda S | Prototyping of field emitter array using focused ion and electron beams | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 10.1143/jjap.41.4311 |
| 2002 | Johnson SD, Hasko DG, Teo KB, Milne WI, Ahmed H | Fabrication of carbon nanotips in a scanning electron microscope for use as electron field emission sources | Microelectronic Engineering | 10.1016/S0167-9317(02)00431-8 |
| 2002 | Joodaki M, Janus P, Gotszalk T, Kompa G, Edinger K, Rangelow IW | Thermal imaging of microwave power GaAs-FET with scanning thermal nanoprobe | Nanoscale Optics and Applications | 10.1117/12.450989 |
| 2002 | Jungwirthová I, Eklund J, Sun Y, White JM | System for inducing and characterizing electron beam-induced surface reactions at pressures up to 10-4Torr | Review of Scientific Instruments | 10.1063/1.1499542 |
| 2002 | Kim SH, Somorjai GA | Stereospecific Ziegler-Natta model catalysts produced by electron beam-induced deposition of TiCl4: Deposition kinetics, film structure, and surface structure | Journal of Physical Chemistry B | 10.1021/jp013239q |
| 2002 | Kiyohara S, Takamatsu H, Mori K | Microfabrication of diamond films by localized electron beam chemical vapour deposition | Semiconductor Science and Technology | 10.1088/0268-1242/17/10/311 |
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| 2002 | Pedraza AJ, Fowlkes JD, Guan Y | Generation and manipulation of nanostructures by pulsed-laser ablation | High-Power Laser Ablation IV | 10.1117/12.482084 |
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| 2002 | Utke I, Cicoira F, Jaenchen G, Hoffmann P, Scandella L, Dwir B, Kapon E, Laub D, Buffat P, Xanthopoulos N, Mathieu HJ | Focused electron beam induced deposition of high resolution magnetic scanning probe tips | Materials Research Society Symposium – Proceedings | 10.1557/proc-706-z9.24.1 |
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| 2002 | Utke I, Luisier A, Hoffmann P, Laub D, Buffat PA | Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals | Applied Physics Letters | 10.1063/1.1517180 |
| 2002 | Yalcin AU, Dincer M, Aslan V, Gulbas Z | Effect of spironolactone on impaired fibrinolysis of hypertensive patients | Kidney and Blood Pressure Research | 10.1159/000066348 |
| 2001 | Akita S, Nakayama Y, Mizooka S, Takano Y, Okawa T, Miyatake Y, Yamanaka S, Tsuji M, Nosaka T | Nanotweezers consisting of carbon nanotubes operating in an atomic force microscope | Applied Physics Letters | 10.1063/1.1403275 |
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| 2001 | Bedson TR, Palmer RE, Wilcoxon JP | Electron beam lithography in passivated gold nanoclusters | Microelectronic Engineering | 10.1016/S0167-9317(01)00562-7 |
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| 2001 | Bøggild P, Hansen TM, Tanasa C, Grey F | Fabrication and actuation of customized nanotweezers with a 25 nm gap | Nanotechnology | 10.1088/0957-4484/12/3/322 |
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| 2001 | Edinger K, Gotszalk T, Rangelow IW | Novel high resolution scanning thermal probe | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1420580 |
| 2001 | Edinger K, Kraus T | Modeling of focused ion beam induced chemistry and comparison with experimental data | Microelectronic Engineering | 10.1016/S0167-9317(01)00487-7 |
| 2001 | Floreani F, Elsäßer W, Koops HW | Concept of a miniaturized free electron laser with field emission source | Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC | 10.1109/ivmc.2001.939625 |
| 2001 | Floreani F, Koops HW, Elsäßer W | Operation of high power field emitters fabricated with electron beam deposition and concept of a miniaturised free electron laser | Microelectronic Engineering | 10.1016/S0167-9317(01)00567-6 |
| 2001 | Huang Y, Duan X, Wei Q, Lieber CM | Directed assembly of one-dimensional nanostructures into functional networks | Science | 10.1126/science.291.5504.630 |
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| 2001 | Liu LJ, Wang JJ | Investigation of deposited Pt films induced by Focused Ion Beam | 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 – Proceedings | 10.1109/ICSICT.2001.982087 |
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| 2001 | Wang HZ, Liu XH, Yang XJ, Wang X | Intergrowth of a carbon layer and fractal-like trees on 3Y-TZP in TEM observations | Materials Science and Engineering: A | 10.1016/S0921-5093(01)00916-9 |
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| 2000 | Alman DA, Ruzic DN, Brooks JN | A hydrocarbon reaction model for low temperature hydrogen plasmas and an application to the Joint European Torus | Physics of Plasmas | 10.1063/1.873960 |
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| 2000 | Bedson TR, Nellist PD, Palmer RE, Wilcoxon JP | Direct electron beam writing of nanostructures using passivated gold clusters | Microelectronic Engineering | 10.1016/S0167-9317(00)00293-8 |
| 2000 | Berry GJ, Cairns JA, Davidson MR, Fan YC, Fitzgerald AG, Thomson J, Shaikh W | Analysis of metal features produced by UV irradiation of organometallic films | Applied Surface Science | 10.1016/S0169-4332(00)00240-3 |
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| 2000 | Edinger K, Kraus T | Modeling of focused ion beam induced surface chemistry | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1321761 |
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| 2000 | Schlesinger R, Bruns M | Quality control of gas sensor microarrays using Auger electron spectroscopy | Thin Solid Films | 10.1016/S0040-6090(00)00884-1 |
| 2000 | Stevens MR, Chen Q, Weierstall U, Spence JC | Transmission electron diffraction at 200 eV and damage thresholds below the carbon K edge | Microscopy and Microanalysis | 10.1017/S1431927602000636 |
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| 2000 | Utke I, Hoffmann P, Dwir B, Leifer K, Kapon E, Doppelt P | Focused electron beam induced deposition of gold | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.1319690 |
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| 1999 | Alexe M, Harnagea C, Hesse D, Gösele U | Patterning and switching of nanosize ferroelectric memory cells | Applied Physics Letters | 10.1063/1.124822 |
| 1999 | DeMarco AJ, Melngailis J | Lateral growth of focused ion beam deposited platinum for stencil mask repair | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.590971 |
| 1999 | Dutta A, Lee SP, Hatatani S, Oda S | Silicon-based single-electron memory using a multiple-tunnel junction fabricated by electron-beam direct writing | Applied Physics Letters | 10.1063/1.124713 |
| 1999 | Fritzsche W, Köhler JM, Böhm KJ, Unger E, Wagner T, Kirsch R, Mertig M, Pompe W | Wiring of metallized microtubules by electron beam-induced structuring | Nanotechnology | 10.1088/0957-4484/10/3/317 |
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| 1999 | Khoury M, Gunther A, Rack MJ, Pivin DP, Ferry DK | Single electron effects in silicon quantum dots in a MOSFET structure | Microelectronic Engineering | 10.1016/S0167-9317(99)00186-0 |
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| 1999 | Singh NK, Krout R | Thermal and electron-induced reactions of AsCl3 on GaAs(100) | Surface Science | 10.1016/S0039-6028(99)00959-0 |
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| 1997 | Komuro M, Hiroshima H | Fabrication and properties of dot array using electron-beam-induced deposition | Microelectronic Engineering | 10.1016/S0167-9317(96)00105-0 |
| 1997 | Komuro M, Hiroshima H | Lateral tunnel junction produced by electron-beam-induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.589733 |
| 1997 | Koops HW, Dobisz E, Urban J | Novel lithography and signal processing with water vapor ions | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.589540 |
| 1997 | Lee R, Cecere M | The Usage of Focused Ion Beam Induced Deposition of Gold Film in IC Device Modification and Repair | Conference Proceedings from the International Symposium for Testing and Failure Analysis | 10.31399/asm.cp.istfa1997p0121 |
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| 1997 | Nyffenegger RM, Penner RM | Nanometer-Scale Surface Modification Using the Scanning Probe Microscope: Progress since 1991 | Chemical Reviews | 10.1021/cr960069i |
| 1997 | Schoessler C, Koops HW | Nanostructured integrated electron source | Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC | 10.1116/1.589921 |
| 1997 | Schössler C, Urban J, Koops HW | Conductive supertips for scanning probe applications | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.589394 |
| 1997 | Skidmore GD, Dahlberg ED | Improved spatial resolution in magnetic force microscopy | Applied Physics Letters | 10.1063/1.120316 |
| 1997 | Wagner P, Nock S, Spudich JA, Volkmuth WD, Chu S, Cicero RL, Wade CP, Linford MR, Chidsey CE | Bioreactive self-assembled monolayers on hydrogen-passivated Si(111) as a new class of atomically flat substrates for biological scanning probe microscopy | Journal of Structural Biology | 10.1006/jsbi.1997.3881 |
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| 1996 | Babin S, Koops HW | Three-dimensional electron-beam lithography using an all-dry resist process | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.588682 |
| 1996 | Carcenac F, Vieu C, Haghiri-Gosnet AM, Simon G, Mejias M, Launois H | High voltage electron beam nanolithography on WO3 | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.588591 |
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| 1996 | Hoyle PC, Cleaver JR, Ahmed H | Electron beam induced deposition from W(CO)6 at 2 to 20 keV and its applications | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.589154 |
| 1996 | Hübner B, Jede R, Specht I, Zengerle R | E-beam lithography by using an stem with integrated laser interferometer stage | Microelectronic Engineering | 10.1016/0167-9317(95)00190-5 |
| 1996 | Jourdan M, Huth M, Adrian H | Evidence for unconventional superconductivity in UPd2Al3 thin films | Czechoslovak Journal of Physics | 10.1007/BF02583702 |
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| 1996 | Lee JM, Hwang CS, Kim HJ | Characterization of MOCVD Pt electrode for ferroelectric thin films | Integrated Ferroelectrics | 10.1080/10584589608013082 |
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| 1996 | Winkler D, Zimmermann H, Mangerich M, Trauner R | E-beam probe station with integrated tool for electron beam induced etching | Microelectronic Engineering | 10.1016/0167-9317(95)00336-3 |
| 1995 | Baba K, Hatada R, Nagata S, Fujiyama H, Wolf GK, Ensinger W | SiO2 coatings produced by ion beam assisted ECR-plasma CVD | Surface and Coatings Technology | 10.1016/0257-8972(95)08304-9 |
| 1995 | Banhart F | Laplacian growth of amorphous carbon filaments in a non-diffusion-limited experiment | Physical Review E | 10.1103/PhysRevE.52.5156 |
| 1995 | Berry GJ, Cairns JA, Thomson J | The production of fine metal tracks from a new range of organometallic compounds | Sensors and Actuators: A. Physical | 10.1016/0924-4247(95)01069-6 |
| 1995 | Chen YD, Reisman A, Turlik I, Temple D | Cu CVD from Copper(II) Hexafluoroacetylacetonate: II . Laser‐Assisted Selective Area Deposition | Journal of The Electrochemical Society | 10.1149/1.2048433 |
| 1995 | Folch A, Tejada J, Peters CH, Wrighton MS | Electron beam deposition of gold nanostructures in a reactive environment | Applied Physics Letters | 10.1063/1.113909 |
| 1995 | Fujita J, Watanabe H, Ochiai Y, Manako S, Tsai JS, Matsui S | Sub-10 nm lithography and development properties of inorganic resist by scanning electron beams | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.588260 |
| 1995 | Hessert J, Huth M, Jourdan M, Adrian H | Anisotropic transport properties of UPd2Al3 thin films | Physica B: Physics of Condensed Matter | 10.1016/0921-4526(94)00537-6 |
| 1995 | Hiroshima H, Okayama S, Ogura M, Komuro M, Nakazawa H, Nakagawa Y, Ohi K, Tanaka K | Nanobeam process system: An ultrahigh vacuum electron beam lithography system with 3 nm probe size | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.588384 |
| 1995 | Jensen MB, Thiel PA | Thermally-Induced and Electron-Induced Chemistry of CF3I on Ni(100) | Journal of the American Chemical Society | 10.1021/ja00106a050 |
| 1995 | Koops HW, Kaya A, Weber M | Fabrication and characterization of platinum nanocrystalline material grown by electron-beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.588008 |
| 1995 | Mancini DC, Skytt P, Nordgren J, Tägtström P | Chemical vapour deposition of Cr, Mo and W thin films induced by synchrotron radiation | Vacuum | 10.1016/0042-207X(95)00132-8 |
| 1995 | Plank H, Wang W, Eckstein W, Schwörer R, Steffen HJ, Roth J | Deposition and hydrogen content of carbon films grown by CH +3 ion-beam bombardment | Journal of Applied Physics | 10.1063/1.359717 |
| 1995 | Ro JS, Thompson CV, Melngailis J | Microstructure of gold grown by ion-induced deposition | Thin Solid Films | 10.1016/0040-6090(94)06399-0 |
| 1995 | Wang D, Hoyle PC, Cleaver JR, Porkolab GA, MacDonald NC | Lithography using electron beam induced etching of a carbon film | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 10.1116/1.588119 |
| 1995 | Wang W, Eckstein W, Schwörer R, Plank H, Roth J | Deposition of hydrogenated carbon layers from CH3+ ion beams | Journal of Nuclear Materials | 10.1016/0022-3115(94)00468-4 |
| 1995 | Weber M, Koops HW, Rudolph M, Kretz J, Schmidt G | New compound quantum dot materials produced by electron-beam induced deposition | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 10.1116/1.587854 |
| 1995 | Weber M, Rudolph M, Kretz J, Koops HW | Electron-beam induced deposition for fabrication of vacuum field emitter devices | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 10.1116/1.588333 |
| 1995 | Wendel M, Lorenz H, Kotthaus JP | Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging | Applied Physics Letters | 10.1063/1.115365 |
| 1994 | Adachi H, Nakane H, Katamoto M | Field emission characteristics of a carbon needle made by use of electron-beam-assisted decomposition of methane | Applied Surface Science | 10.1016/0169-4332(94)90315-8 |
| 1994 | Banhart F | Fractal carbon filaments grown on insulators under irradiation in an electron microscope | Philosophical Magazine Letters | 10.1080/09500839408242436 |
| 1994 | Hirsch P, Kässens M, Püttmann M, Reimer L | Contamination in a scanning electron microscope and the influence of specimen cooling | Scanning | 10.1002/sca.4950160207 |
| 1994 | Hoyle PC, Cleaver JR, Ahmed H | Ultralow-energy focused electron beam induced deposition | Applied Physics Letters | 10.1063/1.111912 |
| 1994 | Huth M, Kaldowski A, Hessert J, Heske C, Adrian H | UPd2Al3 heavy fermion superconducting films | Physica B: Physics of Condensed Matter | 10.1016/0921-4526(94)91753-1 |
| 1994 | Koops HW, Kretz J, Rudolph M, Weber M, Dahm G, Lee KL | Characterization and application of materials grown by electron-beam-induced deposition | Japanese Journal of Applied Physics | 10.1143/JJAP.33.7099 |
| 1994 | Kretz J, Rudolph M, Weber M, Koops HW | Three-dimensional structurization by additive lithography, analysis of deposits using TEM and EDX, and application to field-emitter tips | Microelectronic Engineering | 10.1016/0167-9317(94)90199-6 |
| 1994 | Ro JS, Thompson CV, Melngailis J | Mechanism of ion beam induced deposition of gold | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.587111 |
| 1994 | Saulys DS, Ermakov A, Garfunkel EL, Dowben PA | Electron-beam-induced patterned deposition of allylcyclopentadienyl palladium using scanning tunneling microscopy | Journal of Applied Physics | 10.1063/1.357935 |
| 1994 | Weber M | Scattering of non-relativistic electrons in tip structures | Journal of Physics D: Applied Physics | 10.1088/0022-3727/27/7/004 |
| 1994 | Wendel M, Kühn S, Lorenz H, Kotthaus JP, Holland M | Nanolithography with an atomic force microscope for integrated fabrication of quantum electronic devices | Applied Physics Letters | 10.1063/1.112914 |
| 1993 | Boughaba S, Auvert G | Deposition of micron-size nickel lines by argon-ion laser-assisted decomposition of nickel tetracarbonyl | Applied Surface Science | 10.1016/0169-4332(93)90486-U |
| 1993 | Brünger WH, Kohlmann KT | E-Beam-Induced Fabrication of Microstructures | Journal of Microelectromechanical Systems | 10.1109/84.232592 |
| 1993 | Cosby PC | Electron-impact dissociation of nitrogen | The Journal of Chemical Physics | 10.1063/1.464385 |
| 1993 | Cosby PC | Electron-impact dissociation of oxygen | The Journal of Chemical Physics | 10.1063/1.464387 |
| 1993 | Cosby PC | Electron-impact dissociation of carbon monoxide | The Journal of Chemical Physics | 10.1063/1.464588 |
| 1993 | Della Ratta AD, Melngailis J, Thompson CV | Focused-ion beam induced deposition of copper | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.586455 |
| 1993 | Hoyle PC, Ogasawara M, Cleaver JR, Ahmed H | Electrical resistance of electron beam induced deposits from tungsten hexacarbonyl | Applied Physics Letters | 10.1063/1.109133 |
| 1993 | Huth M, Kaldowski A, Hessert J, Steinborn T, Adrian H | Preparation and characterization of thin films of the heavy fermion superconductor UPd2Al3 | Solid State Communications | 10.1016/0038-1098(93)90816-6 |
| 1993 | Ito Y, Bleloch AL, Paterson JH, Brown LM | Electron diffraction from gratings fabricated by electron beam nanolithography | Ultramicroscopy | 10.1016/0304-3991(93)90045-Y |
| 1993 | Kempf J, Nonnenmacher M, Wagner HH | Electron and ion beam induced heating effects in solids measured by laser interferometry | Applied Physics A Solids and Surfaces | 10.1007/BF00324360 |
| 1993 | Kohlmann-von Platen KT, Chlebek J, Weiss M, Reimer K, Oertel H, Brünger WH | Resolution limits in electron-beam induced tungsten deposition | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.586460 |
| 1993 | Ochiai Y, Watanabe H, Fujita JI, Baba M, Manako S, Matsui S | Nanometer-scale direct carbon mask fabrication using electron-beam-assisted deposition | Japanese Journal of Applied Physics | 10.1143/JJAP.32.6147 |
| 1993 | Prewett PD | Focused ion beams-microfabrication methods and applications (invited) | Vacuum | 10.1016/0042-207X(93)90181-9 |
| 1993 | Ramsier RD, Yates JT | Thermal and electron-induced behavior of d6-benzene-chromium-tricarbonyl adsorbed on Ag(111) | Surface Science | 10.1016/0039-6028(93)90886-O |
| 1993 | Schiffmann KI | Investigation of fabrication parameters for the electron-beam-induced deposition of contamination tips used in atomic force microscopy | Nanotechnology | 10.1088/0957-4484/4/3/006 |
| 1993 | Uesugi F, Nishiyama I | Temperature dependence of synchrotron radiation induced growth initiation in the molecular beam chemical vapor deposition of Al on a SiO2 surface | Applied Surface Science | 10.1016/0169-4332(93)90477-S |
| 1993 | Xu X, Melngailis J | Quasiperiodic nanostructures in focused ion beam deposited tungsten at high angles of incidence | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.587001 |
| 1992 | Allen PE, Griffis DP, Radzimski ZJ, Russell PE | Electron beam patterning of SiO2 | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.577887 |
| 1992 | Borsje HR, Jaeger HM, Radelaar S | Ultra-high-resolution negative e-beam resist: AlF3 | Microelectronic Engineering | 10.1016/0167-9317(92)90064-X |
| 1992 | Ehrichs EE, Smith WF, de Lozanne AL | Four-probe resistance measurements of nickel wires written with a scanning tunneling microscope/scanning electron microscope system | Ultramicroscopy | 10.1016/0304-3991(92)90462-S |
| 1992 | Funsten HO, Boring JW, Johnson RE, Brown WL | Low-temperature beam-induced deposition of thin tin films | Journal of Applied Physics | 10.1063/1.351241 |
| 1992 | Hübner B, Koops HW, Pagnia H, Sotnik N, Urban J, Weber M | Tips for scanning tunneling microscopy produced by electron-beam-induced deposition | Ultramicroscopy | 10.1016/0304-3991(92)90476-Z |
| 1992 | Kislov NA, Khodos II | Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. – II. The growth of rods outside the substrate | Microscopy Microanalysis Microstructures | 10.1051/mmm:0199200304032300 |
| 1992 | Kohlmann KT, Buchmann LM, Brünger WH | Repair of open stencil masks for ion projection lithography by e-beam induced metal deposition | Microelectronic Engineering | 10.1016/0167-9317(92)90087-8 |
| 1992 | Kohlmann-von Platen KT, Buchmann LM, Petzold HC, Brünger WH | Electron-beam induced tungsten deposition: Growth rate enhancement and applications in microelectronics | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.586027 |
| 1992 | Matsui S, Ichihashi T, Ochiai Y, Baba M, Watanabe H, Sato A | Nanostructure Technology Developed Through Electron-Beam-Induced Surface Reaction | Science and Technology of Mesoscopic Structures | 10.1007/978-4-431-66922-7_36 |
| 1992 | Puretz J, Swanson LW | Focused ion beam deposition of Pt containing films | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.586028 |
| 1992 | Stark TJ, Mayer TM, Griffis DP, Russell PE | Formation of complex features using electron-beam direct-write decomposition of palladium acetate | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.586026 |
| 1992 | Takahashi T, Arakawa Y, Nishioka M, Ikoma T | MOCVD selective growth of GaAs: C wire and dot structures by electron beam irradiation | Journal of Crystal Growth | 10.1016/0022-0248(92)90462-R |
| 1992 | Takahashi T, Arakawa Y, Nishioka M, Ikoma T | Selective growth of GaAs wire structures by electron beam induced metalorganic chemical vapor deposition | Applied Physics Letters | 10.1063/1.107376 |
| 1992 | Uesugi K, Yao T | Nanometer-scale fabrication on graphite surfaces by scanning tunneling microscopy | Ultramicroscopy | 10.1016/0304-3991(92)90463-T |
| 1992 | Walter WK, Jones RG | 1,2-dichloroethane adsorption on Cu(111): molecular adsorption | Surface Science | 10.1016/0039-6028(92)90194-B |
| 1992 | Ximen H, Russell PE | Microfabrication of AFM tips using focused ion and electron beam techniques | Ultramicroscopy | 10.1016/0304-3991(92)90477-2 |
| 1992 | Zheng X, Hetrick J, Yau ST, Nayfeh MH | Parallel fabrication on chemically etched silicon using scanning tunneling microscopy | Ultramicroscopy | 10.1016/0304-3991(92)90439-Q |
| 1992 | Zhou XL, White JM | Low-energy electron-induced chemistry of ethylene on clean and Cl- and D-covered Ag(111) | Journal of Physical Chemistry | 10.1021/j100198a040 |
| 1991 | Henderson MA, Ramsier RD, Yates JT | Low-energy electron induced decomposition of Fe(CO)5 adsorbed on Ag(111) | Surface Science | 10.1016/0039-6028(91)90535-Z |
| 1991 | Henderson MA, Ramsier RD, Yates JT | Photon- versus electron-induced decomposition of Fe(CO)5 adsorbed on Ag(111): Iron film deposition | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.577662 |
| 1991 | Ishibashi A, Funato K, Mori Y | Electron-beam-induced resist and aluminum formation | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.585281 |
| 1991 | Kohlmann KT, Thiemann M, Brünger WH | E-beam induced X-ray mask repair with optimized gas nozzle geometry | Microelectronic Engineering | 10.1016/0167-9317(91)90093-S |
| 1991 | Lee KL, Abraham DW, Secord F, Landstein L | Submicron Si trench profiling with an electron-beam fabricated atomic force microscope tip | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.585845 |
| 1991 | Petzold HC, Heard PJ | Ion-induced deposition for x-ray mask repair: Rate optimization using a time-dependent model | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.585668 |
| 1991 | Ramsier RD, Henderson MA, Yates JT | Electron induced decomposition of Ni(CO)4 adsorbed on Ag(111) | Surface Science | 10.1016/0039-6028(91)90774-M |
| 1991 | Takahashi T, Arakawa Y, Nishioka M | In situ patterning of contamination resists in metalorganic chemical vapor deposition for fabrication of quantum wires | Applied Physics Letters | 10.1063/1.104874 |
| 1991 | Tao T, Wilkinson W, Melngailis J | Focused ion beam induced deposition of platinum for repair processes | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | 10.1116/1.585279 |
| 1991 | Yau ST, Zheng X, Nayfeh MH | Nanolithography of chemically prepared Si with a scanning tunneling microscope | Applied Physics Letters | 10.1063/1.105994 |
| 1990 | Akama Y, Nishimura E, Sakai A, Murakami H | New scanning tunneling microscopy tip for measuring surface topography | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.576413 |
| 1990 | Fujioka H, Nakamae K, Hirota M, Ura K, Tamura N, Takagi T | RAPID COMMUNICATION: Measurements of the energy dependence of electron beam assisted etching of, and deposition on, silica | Journal of Physics D: Applied Physics | 10.1088/0022-3727/23/2/023 |
| 1990 | Harriott LR, Temkin H, Wang YL, Hamm RA, Weiner JS | Vacuum lithography for three-dimensional fabrication using finely focused ion beams | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.585082 |
| 1990 | Kanaya K, Yonehara K, Oho E, Inoue N, Izumida M | A cone formation theory of contamination in high resolution transmission electron microscopy | Micron And Microscopica Acta | 10.1016/0739-6260(90)90004-Y |
| 1990 | Mancini DC, Varma S, Simons JK, Rosenberg RA, Dowben PA | Synchrotron radiation induced chemical vapor deposition of thin films from metal hexacarbonyls* | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.585163 |
| 1990 | Matsui S, Ichihashi T, Baba M, Satoh A | Electron beam induced selective etching and deposition technology | Superlattices and Microstructures | 10.1016/0749-6036(90)90213-Q |
| 1990 | Taneya M, Sugimoto Y, Hidaka H, Akita K | Electron-beam-induced pattern etching of AlGaAs using an ultrathin GaAs oxide as a resist | Journal of Applied Physics | 10.1063/1.346325 |
| 1990 | Tao T, Ro J, Melngailis J, Xue Z, Kaesz HD | Focused ion beam induced deposition of platinum | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.585167 |
| 1989 | Blauner PG, Butt Y, Ro JS, Thompson CV, Melngailis J | Focused ion beam induced deposition of low-resistivity gold films | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584465 |
| 1989 | Cho CC, Bernasek SL | Molybdenum deposition from the decomposition of molybdenum hexacarbonyl | Journal of Applied Physics | 10.1063/1.342695 |
| 1989 | Dubner AD, Wagner A | Mechanism of ion beam induced deposition of gold | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584654 |
| 1989 | Giinther P, Ch Fischer U, Dransfeld K | Rapid Communication Scanning Near-Field Acoustic Microscopy | Applied Physics B | |
| 1989 | Kotera M | A Monte Carlo simulation of primary and secondary electron trajectories in a specimen | Journal of Applied Physics | 10.1063/1.343341 |
| 1989 | Kotera M, Kishida T | A Monte Carlo Simulation of Secondary Electron Trajectories in a Specimen | Japanese Journal of Applied Physics | 10.1143/JJAP.28.148 |
| 1989 | Lee KL, Hatzakis M | Direct electron-beam patterning for nanolithography | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584652 |
| 1989 | Matsui S, Ichihashi T, Mito M | Electron beam induced selective etching and deposition technology | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584570 |
| 1989 | Rüb M, Koops HW, Tschudi T | Electron beam induced deposition in a reducing image projector | Microelectronic Engineering | 10.1016/0167-9317(89)90059-2 |
| 1989 | Swanson JR, Flitsch FA, Friend CM | Low energy electron induced decomposition on surfaces: W(CO)6 on Si(111)-(7 × 7) | Surface Science | 10.1016/0039-6028(89)90694-8 |
| 1989 | Zhang BR, Yu Z, Collins GJ, Hwang T, Ritchie WH | Chemical composition of soft vacuum electron beam assisted chemical vapor deposition of silicon nitride/oxynitride films versus substrate temperature | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 10.1116/1.575749 |
| 1988 | Allen TE, Kunz RR, Mayer TM | Monte Carlo calculation of low-energy electron emission from surfaces | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584111 |
| 1988 | Bozso F, Avouris P | Electron-induced chemical vapor deposition by reactions induced in adsorbed molecular layers | Applied Physics Letters | 10.1063/1.100655 |
| 1988 | Bozso F, Avouris P | Thermal and electron-beam-induced reaction of disilane on Si(100)-(2×1) | Physical Review B | 10.1103/PhysRevB.38.3943 |
| 1988 | Kanaya K, Oho E, Osaki N, Oda T | A contamination reducing method by ion beam bombardment of the specimen in high resolution electron microscopy | Micron And Microscopica Acta | 10.1016/0739-6260(88)90026-3 |
| 1988 | Koops HW, Weiel R, Kern DP, Baum TH | High-resolution electron-beam induced deposition | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584045 |
| 1988 | Kunz RR, Mayer TM | Electron beam induced surface nucleation and low-temperature decomposition of metal carbonyls | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584214 |
| 1988 | Matsui S, Ichihashi T | In situ observation on electron-beam-induced chemical vapor deposition by transmission electron microscopy | Applied Physics Letters | 10.1063/1.100089 |
| 1988 | Matsui S, Mito M | Si deposition by electron beam induced surface reaction | Applied Physics Letters | 10.1063/1.100465 |
| 1988 | Ro JS, Dubner AD, Thompson CV, Melngailis J | Summary Abstract: Ion induced deposition of gold films | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584346 |
| 1988 | Sudraud P, Ben Assayag G, Bon M | Focused-ion-beam milling, scanning-electron microscopy, and focused-droplet deposition in a single microcircuit surgery tool | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.584012 |
| 1988 | Umbach C, Broers A, Koch R, Wilson G, Laibowitz R | Nanolithography With a High-Resolution Stem | IBM Journal of Research and Development | 10.1147/rd.324.0454 |
| 1987 | Kunz RR, Allen TE, Mayer TM | Selective area deposition of metals using low-energy electron beams | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.583629 |
| 1987 | Kunz RR, Mayer TM | Catalytic growth rate enhancement of electron beam deposited iron films | Applied Physics Letters | 10.1063/1.97999 |
| 1987 | Kunz RR, Mayer TM | Summary Abstract: Surface reaction enhancement via low energy electron bombardment and secondary electron emission | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.583919 |
| 1987 | Melngailis J | Focused ion beam technology and applications | Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 10.1116/1.583937 |
| 1987 | Ro JS, Dubner AD, Thompson CV, Melngailis J | Microstructure of Gold Films Grown by Ion Induced Deposition | MRS Proceedings | 10.1557/proc-101-255 |
| 1987 | Swanson JR, Friend CM, Chabal YJ | Laser-assisted deposition of iron on Si(111)-(7×7): The mechanism and energetics of Fe(CO)5 decomposition | The Journal of Chemical Physics | 10.1063/1.452819 |
| 1986 | Behringer UF, Vettiger P | Repair Techniques for Silicon Transmission Masks Used for Submicron Lithography | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 10.1116/1.583402 |
| 1986 | Eliasson B, Kogelschatz U | Electron impact dissociation in oxygen | Journal of Physics B: Atomic and Molecular Physics | 10.1088/0022-3700/19/8/018 |
| 1986 | Foord JS, Jackman RB | Studies of adsorption and electron-induced dissociation of Fe(CO)5 on Si(100) | Surface Science | 10.1016/0039-6028(86)90570-4 |
| 1986 | Jackman RB, Foord JS | Electron beam stimulated chemical vapor deposition of patterned tungsten films on Si(100) | Applied Physics Letters | 10.1063/1.97168 |
| 1986 | Kakuchi M, Hikita M, Tamamura T | Amorphous carbon films as resist masks with high reactive ion etching resistance for nanometer lithography | Applied Physics Letters | 10.1063/1.96683 |
| 1986 | Matsui S, Mori K | New Selective Deposition Technology By Electron-Beam Induced Surface Reaction | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 10.1116/1.583317 |
| 1986 | Oostra DJ, Haring A, De Vries AE | Electron-induced etching of silicon by SF6 | Nuclear Inst. and Methods in Physics Research, B | 10.1016/0168-583X(86)90097-2 |
| 1986 | Scheuer V, Koops H, Tschudi T | Electron beam decomposition of carbonyls on silicon | Microelectronic Engineering | 10.1016/0167-9317(86)90072-9 |
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| 1985 | Howie A, Rocca FJ, Valdrè U | Electron beam ionization damage processes in p-terphenyl | Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties | 10.1080/13642818508240634 |
| 1984 | Matsui S, Mori K | New Selective Deposition Technology by Electron Beam Induced Surface Reaction | Japanese Journal of Applied Physics | 10.1143/JJAP.23.L706 |
| 1983 | Howard RE, Craighead HG, Jackel LD, Mankiewich PM, Feldman M | ELECTRON BEAM LITHOGRAPHY FROM 20 TO 120 kev WITH A HIGH QUALITY BEAM | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 10.1116/1.582642 |
| 1983 | Thompson LR, Rocca JJ, Emery K, Boyer PK, Collins GJ | Electron beam assisted chemical vapor deposition of SiO2 | Applied Physics Letters | 10.1063/1.94502 |
| 1982 | Bigelow RW, Black JG, Duke CB, Salaneck WR, Thomas HR | Analysis of thin films arising from electron-, ion- and photon-beam-induced decomposition of Cr(CO)6 and Al(CH3)3 | Thin Solid Films | 10.1016/0040-6090(82)90300-5 |
| 1982 | Craighead HG, Mankiewich PM | Ultra-small metal particle arrays produced by high resolution electron-beam lithography | Journal of Applied Physics | 10.1063/1.331614 |
| 1980 | George PM, Beauchamp JL | Deposition of metal films by the controlled decomposition of organometallic compounds on surfaces | Thin Solid Films | 10.1016/0040-6090(80)90311-9 |
| 1979 | Coburn JW, Winters HF | Ion- and electron-assisted gas-surface chemistry – An important effect in plasma etching | Journal of Applied Physics | 10.1063/1.326355 |
| 1979 | Komuro M, Atoda N, Kawakatsu H | Ion Beam Exposure of Resist Materials | Journal of The Electrochemical Society | 10.1149/1.2129067 |
| 1979 | Winters HF, Coburn JW | The etching of silicon with XeF2 vapor | Applied Physics Letters | 10.1063/1.90562 |
| 1978 | Zipf EC, McLaughlin RW | On the dissociation of nitrogen by electron impact and by E.U.V. photo-absorption | Planetary and Space Science | 10.1016/0032-0633(78)90066-1 |
| 1976 | Broers AN, Molzen WW, Cuomo JJ, Wittels ND | Electron-beam fabrication of 80-Å metal structures | Applied Physics Letters | 10.1063/1.89155 |
| 1976 | Egerton RF, Rossouw CJ | Direct measurement of contamination and etching rates in an electron beam | Journal of Physics D: Applied Physics | 10.1088/0022-3727/9/4/016 |
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